한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2006년도 춘계학술대회 논문집
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- Pages.459-460
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- 2006
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- 2005-8446(pISSN)
전자빔 가공기용 고전압 발생기의 입력 형태에 따른 제어회로의 설계
Design of Control Circuit for Various Input Types of High Voltage Generator in E-Beam Manufacturing System
초록
Electron beam manufacturing system can be used to make patterns that are smaller than can a photolithography. In this system, High voltage generator is a fundamental element for stable beam. We used high voltage with transformer. However, this instrument has several problems (for examples, dimensions, buying parts, simplicity of control circuit). For solving these problems, a commercial product is considered. This is developed for SEM(Scanning Electron Microscope). In this paper, we designed a control circuit for a commercial product and analyzed performance.
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