• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.538-541
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• 2005

In tapping mode atomic force microscopy(TM-AFM). the vibro-contact response of a resonating tip is used to measure the nanoscale topology and other properties of a sample surface. However, the nonlinear tip-surface interact ions can affect the tip response and destabilize the tapping mode control. Especially it is difficult to obtain a good scanned image of high adhesion surfaces such as polymers and biomoleculars using conventional tapping mode control. In this study, theoretical and experimental investigations are made on the nonlinear dynamics and control of TM-AFM. To analyze the complex dynamics and control of the tapping tip, the classical contact models are adopted due to the surface adhesion. Also we report the surface adhesion is an additional important parameter to determine the control stability of TM-AFM. In addition, we prove that it is more adequate to use Johnson-Kendall-Roberts (JKR) contact model to obtain a reasonable tapping response in AFM for the soft and high adhesion samples.

• Journal of the Korean Society for Precision Engineering
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• v.20 no.5
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• pp.189-195
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• 2003

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for. the last few decade. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of silicon and silicon nitride were in the range of ${10}^{-1}$~${10}^{-3}$ and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was discussed. It was found that the tip wear has more severe for harder test materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• International Journal of Precision Engineering and Manufacturing
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• v.5 no.2
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• pp.39-45
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• 2004

Atomic Force Microscope (AFM) has been widely used in micro/nano-scale studies and applications for the last few decades. In this work, wear characteristics of silicon-based AFM tip was investigated. AFM tip shape was observed using a high resolution SEM and the wear coefficient was approximately calculated based on Archard's wear equation. It was shown that the wear coefficient of Si and ${Si}_3$$N_4$ tips were in the range of ${10}^{-1}$~${10}^{-3}$and ${10}^{-3}$~${10}^{-4}$, respectively. Also, the effect of relative humidity and sliding distance on adhesion-induced tip wear was investigated. It was found that the tip wear has more severe for harder counter surface materials. Finally, the probable wear mechanism was analyzed from the adhesive and abrasive interaction point of view.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.11 s.254
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• pp.1335-1347
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• 2006

Surface energies calculated from measured contact angles between several solutions and test samples, such as Si wafer, $Al_2O_3$, $SiO_2$, PTFE(Polytertrafluoroethylene), and DLC(Diamond Like Carbon) films, based on geometric mean method and Lewis acid base method. In order to relate roughness to adhesion force, surface roughness of test samples were scanned large area and small by AFM(Atomic Force Microscopy). Roughness was representative of test samples in large scan area and comparable with AFM tip radius in small scan area. Adhesion forces between AFM tip and test samples were matched well with order of roughness rather then surface energy. When AFM tips having different radius were used to measure adhesion force on DLCI film, sharper AFM tip was, smaller adhesion force was measured. Therefore contact area was more important factor to determine adhesion force.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.501-504
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• 2004

This paper describes the fabrication method for atomic force microscopy(AFM) tip with multi-walled carbon nanotube(MWNT). For making a carbon nanotube (CNT) modified tips, AC electric field which cause the dielectrophoresis was used for alignment and deposition of CNTs in this research. By dropping the MWNT solution and applying an electric field between an AFM tip and an electrode, MWNTs which were dispersed into a diluted solution were directly assembled onto the apex of the AFM tips due to the attraction by the dielectrophoretic force. In this case, we investigate the effect of the angle between a tip axis and an electrode. Experimental setup were presented, and then CNT attached AFM tips are successfully shown in this paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.375-378
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• 2002

In this paper, the frequency response separation scheme is proposed for high scanning speed and simple structure of non-contact type of AFM. A self-sensing cantilever is attached on the actuator for detect the atomic force between tip and the media surface. VCM or PZT are used for actuator. This paper presents the method to simplify the actuator structure and the performance of each actuator for non-contact type AFM. Based on the frequency response separation scheme, the only one actuator plays roles 1311owing low frequency surface and modulating self-sensing cantilever tip in contrast with convention non-contact type AFM. 10 ${\mu}{\textrm}{m}$ standard grid sample imaged to verify proposed scheme. This result shows the possibility simplifying the actuator structure and reducing cost of non-contact type AFM.

• Journal of Electrochemical Science and Technology
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• v.15 no.2
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• pp.261-267
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• 2024

An unconventional fabrication technique of nanoelectrode was developed using atomic force microscopy (AFM) and hydrogel. Until now, the precise control of electroactive area down to a few nm² has always been an obstacle, which limits the wide application of nanoelectrodes. Here, the nanometer-sized contact between the boron-doped diamond (BDD) as conductive AFM tip and the agarose hydrogel as solid electrolyte was well governed by the feedback amplitude of oscillation in the non-contact mode of AFM. Consequently, this low-cost and feasible approach gives rise to new possibilities for the fabrication of nanoelectrodes. The electroactive area controlled by the set point of AFM was investigated by cyclic voltammetry (CV) of the ferrocenmethanol (FcMeOH) combined with quasi-solid agarose hydrogel as an electrolyte. Single copper (Cu) nanoparticle was deposited at the apex of the AFM tip using this platform whose electrocatalytic activity for nitrate reduction was then investigated by CV and Field Emission-Scanning Electron Microscopy (FE-SEM), respectively.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.2 s.245
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• pp.135-140
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• 2006

In tapping mode atomic force microscopy (TM-AFM), the vibro-contact response of a resonating tip is used to measure the nanoscale topology and other properties of a sample surface. However, the nonlinear tipsurface interactions can affect the tip response and destabilize the tapping mode control. Especially it is difficult to obtain a good scanned image of high adhesion surfaces such as polymers and biomolecules using conventional tapping mode control. In this study, theoretical and experimental investigations are made on the nonlinear dynamics and control of TM-AFM. Also we report the surface adhesion is an additional important parameter to determine the control stability of TM-AFM. In addition, we proved that it was adequate to use Johnson-Kendall-Roberts (JKR) contact model to obtain a reasonable tapping response in AFM for the soft and high adhesion samples.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• Journal of Adhesion and Interface
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• v.19 no.4
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• pp.163-166
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• 2018

Dip-pen nanolithography(DPN) is an atomic force microscope (AFM) based method of generating nano- or micro-patterns. This technique has been used to transfer various ink materials on the substrate through water meniscus formed between AFM tip and the substrate surface. In this study, the heptadecafluoro-1,1,2,2-tetrahydrodecyltrimethoxysilane (HDFDTMS) ink materials were coated on the pre-coated AFM tip surface with the HDFDTMS molecules. When the tip brought into contact with the hydroxyl-functionalized silicon surface, HDFDTMS ink molecules have been successfully transported from the tip onto the surface via water meniscus. The created array and passivation area showed stable structures on the surface, and the transport of ink materials from the AFM tip to the surface followed linear increase in pattern size with contact time.