한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)

한국정밀공학회 (Korean Society for Precision Engineering)
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High aspect ratio 팁의 비접촉모드에서의 측정

Non-contact mode measurement of high aspect ratio tip

  • Shin Y.H. (Dept. of intelligent Precision Machine, KIMM) ;
  • Han C.S. (Dept. of intelligent Precision Machine, KIMM)
  • 발행 : 2006.05.01
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초록

This paper present experimental results by non-contact mode Atomic Force Microscopy using high aspect ratio tips (HAR-T). We fabricated the carbon nanotube tip based on dielectrophoresis and the carbon nano probe by focused ion beam after dielectrophoretic assembling. In this paper, we measure AAO sample and trench structure to estimate HAR-T's performance and compared with conventional Si tip. We confirmed that results of HAR-T's performance in non contact mode was very superior than conventional tip.

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