• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.461-462
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• 2006

This paper reports on the development of a scanning probe microscopy(SPM) tip with caborn nanotubes. We used an electric field which causes dielectrophoresis(DEP), to align and deposit CNTs on a metal-coated SPM tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip align toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for scanning probe microscopy.

• Journal of the Korean Vacuum Society
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• v.18 no.5
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• pp.346-351
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• 2009

Due to the decrease of line width and increase of the integration level of the device, it is expected that 'Bottom-up' method will replace currently used 'Top-down' method. Researches about 'Bottom-up' device production such as Nanowires and Nanobelts are widely held on. To utilize these technologies in devices, properties of matter should be exactly measured. Nano-indenters are used to measure the properties of nano-scale structures. Additionally, Nano-indenters provide AFM(Atomic Force Microscopy) function to get the image of the surface and get physical properties for exact position of nano-structure using this image. However, nano-indenter tips have relatively much bigger size than ordinary AFM probes, there occurs considerable error in surface image by Nano-Indenter. Accordingly, this research used 50nm Berkovich tip and 1um $90^{\circ}$ Conical tip, which are commonly used in Nano-Indenter. To find out the surface characteristics for each kind of tip, we indented the surface of thin layer by each tip and compared surface image and indentation depth. Then, we got image of 100nm-size structure by surface scanning using Nano-Indenter and compared it with surface image gained by current AFM technology. We calculated the errors between two images and compared it with theoretical error.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.12 s.189
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• pp.122-127
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• 2006

This paper reports on the development of carbon nanotube tip modified with focused ion beam(FIB). We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a metal-coated canning Probe Microscope (SPM) tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip was aligned toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for SPM.

• Polymer Science and Technology
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• v.15 no.3
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• pp.363-373
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• 2004

1980년대 초, IBM의 과학자들에 의해 양자역학 현상에 기초한 새로운 현미경이 발명되었다. 뾰족한 금속 팁에 전압을 걸고 전도성 시료의 표면에 접근시키면, 팁이 표면에 접촉하기 직전에 터널링에 의한 전류가 흐르게 된다. 이 전류는 거리에 매우 민감해서 고체 표면에 배열된 원자들에 의해 형성되는 표면 굴곡 (surface corrugation)이 분간 가능하였다. 이 기계가 바로 STM (Scanning Tunneling Microscope)이다 (그럼 1). 이 발명이 있기까지의 약 2세기 가량의 시간 동안 "누구에 의해서도 결코 감지된 적 없는" (H. J. Robinson, Physics Today, March, 24, 1984.) 원자와 분자는 과학자들의 논리 속에 이론상으로 존재할 뿐이었다. STM의 발명으로 인해 인류는 바야흐로 개개의 원자와 분자를 직접적으로 감지할 수 있게 되었던 것이다. 처음으로 STM을 이용하여 원자해상도로 본 표면은 실리콘의 안정한 표면인 Si (111)-7${\times}$7 표면이었는데, 이러한 실리콘 표면의 STM 사진의 예를 그림 2에 나타내었다. (중략)타내었다. (중략)

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.2
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• pp.132-138
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• 2010

Vibro-contact of cantilever tip is studied with respect to contact mechanics and an elastic characteristic of nanoscale surface is imaged. The contact resonance frequency is calculated theoretically using the spring-mass and Herzian models, and the variation of resonance frequency of cantilever was analyzed when the cantilever was free and contact. The elasticity imaging was also achieved successfully using phase and amplitude signals obtained from the spheroidized steel specimens by prototype ultrasonic AFM.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.5
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• pp.461-466
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• 2015

Atomic force microscopy (AFM) is powerful tool for determining properties of samples based on interactions between the sample surface and an approaching probe tip. In this study, we modeled the interactions between the sample and the tip of the AFM microcantilever as a single nonlinear spring with an equivalent stiffness element and simulated the dynamic behaviors of the AFM microcantilevers using the finite element method (FEM) and ANSYS software. With the simulation results, we analyzed the complex dynamic responses of the AFM cantilever using proper orthogonal decomposition (POD). In addition, we compared the simulation and experimental results using the same method. Consequently, we suggest an effective method to express the interaction between the tip and sample, and we confirm that the influence of the higher order model due to the interaction between the tip and sample is increased.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.402.2-402.2
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• 2014

과학과 기술이 발전할수록 나노크기를 넘어서 나노 크기미만의 관찰 분해능과 가공능력이 필수로 요구되어 측정장비와 가공장비의 연구 및 개발이 매우 중요하다. 현재는 주사전자현미경과 투과전자현미경의 발달로 나노크기 이하의 이미징 분해능에는 도달하였지만, 전자 입자의 가벼운 무게 때문에 가공측면에서는 한계를 가지고 있다. 또한 지난 수십 년간 정밀가공에 사용된 갈륨이온 LMIS(Liquid Metal Ion Source)기반의 집속이온빔 시스템은 수십 nm의 가공정밀도를 가지지만 10 nm 미만의 가공정밀도까지 구현하기에는 현재 기술적인 한계로 힘들다. 나노크기 이하의 이미징 분해능과 수 nm의 가공정밀도를 갖는 이온현미경이 최근에 상용화되어 판매되고 있는데, 이 이온 현미경에 사용되는 것이 가스장 이온원(GFIS:Gas Field Ionization Source)이다. 가스장 이온원은 작은 발산각, 작은 가상 이온원 크기 그리고 좁은 에너지 퍼짐의 특징을 가지며 이에 따라 구면수차 및 색수차에도 둔감한 특징을 가지고 있다. 또한 LMIS 는 갈륨이온이 시편속에 파고들어 시편의 물질 특성이 변화되는 문제가 있지만, GFIS에서는 주로 He, Ne 와 같은 불활성 기체를 주로 사용하므로 시편과 반응을 최소화 할 수 있는 장점도 있다. 위와 같은 특징을 갖는 이온빔을 GFIS 로 생성하고 이온현미경에 사용하기 위해서는 이온빔이 팁의 단원자 내지 수 개 정도의 원자에서 생성되도록 해야 한다. 본 연구에서는 GFIS 의 원리를 소개하고 장(전계)이온현미경(Field Ion Microscope)실험을 통하여 GFIS기반으로 생성된 이온빔의 형상을 보여준다. 또한 높은 각전류밀도 구현을 위하여 질소가스 에칭으로 텅스텐 팁 끝 단원자에서만 이온빔을 생성하고, 각전류 밀도 계산과 안정도 실험결과로 본 연구에서 개발한 이온원이 이온총으로서의 이온현미경 적용 가능성에 대해 보여준다.

• The Journal of Korean Academy of Prosthodontics
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• v.52 no.3
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• pp.177-185
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• 2014

Purpose: This study is designed to investigate the various impacts of different types of scaler tips such as cooper alloy base tip and the others on the surface roughness of teeth and implant by the method which is currently in clinical use. Materials and methods: Four different types of disc shaped porcelain, titanium, zirconia, and Type III gold alloy dental materials sized 15 mm diameter, 1.5 mm thickness were used for the experiment. Plastic hand curette (Group PS), cooper alloy new tip (Group IS), and stainless steel tip (Group SS) were used as testing appliances. A total of 64 specimens were used for this study; Four specimens for each material and appliance group. Surface roughness was formed with 15 degree angle in ultrasonic scaler tip and with 45 degree angle in hand curette of instrument tip and the specimen surface with 5 mm long, one horizontal-reciprocating motion per second for 30 seconds by 40 g force. To survey the surface roughness of each specimen, a field emission scanning electron microscope, an atomic force microscope, and a surface profiler were used. (Ra, ${\mu}m$). Results: According to SEM, most increased surface roughness was observed in SS group while IS groups had minimal roughness change. Measurement by atomic force microscope presented that the surface roughness of SS group was significantly greater than those of PS, IS and control groups in the type III gold alloy group (P<.05). IS group showed lesser surface roughness changes compared to SS group in porcelain and gold alloy group (P<.05). According to surface profiler, surface roughness of SS group showed greater than those of PS, IS and control groups and IS group showed lesser than those of SS group in all specimen groups. Type III gold alloy group had large changes on surface roughness than those of porcelain, titanium, zirconia (P<.05). Conclusion: The result of this study showed that newly developed copper alloy scaler tip can cause minimal roughness impacts on the surface of implant and dental materials; therefore this may be a useful alternative for prophylaxis of implant and restored teeth.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.8 s.185
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국신재생에너지학회:학술대회논문집
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• 2005.06a
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• pp.538-541
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• 2005

In tapping mode atomic force microscopy(TM-AFM). the vibro-contact response of a resonating tip is used to measure the nanoscale topology and other properties of a sample surface. However, the nonlinear tip-surface interact ions can affect the tip response and destabilize the tapping mode control. Especially it is difficult to obtain a good scanned image of high adhesion surfaces such as polymers and biomoleculars using conventional tapping mode control. In this study, theoretical and experimental investigations are made on the nonlinear dynamics and control of TM-AFM. To analyze the complex dynamics and control of the tapping tip, the classical contact models are adopted due to the surface adhesion. Also we report the surface adhesion is an additional important parameter to determine the control stability of TM-AFM. In addition, we prove that it is more adequate to use Johnson-Kendall-Roberts (JKR) contact model to obtain a reasonable tapping response in AFM for the soft and high adhesion samples.