• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.21 no.12
• /
• pp.2341-2346
• /
• 2017

The relative position of the eyeballs in the orbit can be a criterion for estimating multiple pathological conditions. Especially, it is useful to diagnose orbital fracture, thyroid eye disease, orbital tumor, and to evaluate the result of drug and surgical treatment. The Hertel and Naugle exophthalmometer, which are the most commonly used measuring instruments for measuring the prominence of the eye, are different from each other. Even if the same examiner repeatedly measures, it is inevitable. Also, even if the same exophthalmometer is different from the manufacturing company, the design of the fixed part of the orbit is different, and a measurement error is caused by the inspectors. In this paper, we propose a method of automatic measurement that can increase the accuracy and repeatability of measurement of exophthalmos using white light scanning interferometer, which is a 3D image measurement technique.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.23 no.1
• /
• pp.63-69
• /
• 2019

The relative position of the orbital eye can be a criterion for evaluating several pathological conditions. It is especially useful to diagnose orbital fractures, thyroid eye disease, orbital tumors and to evaluate the outcome of medication and surgical treatment. Hertel and Naugle are representative measurement tools used to measure eyeball protrusion values, and have different measurement results, such as fixed orbits, every time they are inspected, even if the same inspector repeatedly measures them. Even with the same calibrator, it is inevitable that different manufacturers will change the design of the stationary part of the orbit, causing the surveyor to make a measurement error. In this paper, we designed and fabricated a protrusion measuring device using a white light interferometer and measured the protrusion of the human eye and found that the precision and repeatability were significantly higher than the manual measurement method.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2013.05a
• /
• pp.917-918
• /
• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2011.06a
• /
• pp.75-76
• /
• 2011

• Journal of Institute of Control, Robotics and Systems
• /
• v.14 no.6
• /
• pp.519-522
• /
• 2008

As industry of a semiconductor and LCD industry have been rapidly growing, precision technologies of machining such as etching and 3D measurement are required. Stylus has been important measuring method in traditional manufacturing process. However, its disadvantages are low measuring speed and damage possibility at contacting point. To overcome mentioned disadvantage, non-contacting measurement method is needed such as PMP(Phase Measuring Profilometry), WSI(white scanning interferometer) and Confocal Profilometry. Among above 3 well-known methods, WSI started to be applied to FPD(flat panel display) manufacturing process. Even though it overcomes 21t ambiguity of PMP method and can measure objects which has specular surface, the measuring speed and vibration coming from manufacturing machine are one of main issue to apply full automatic total inspection. In this study, We develop high speed WSI system and algorithm to reduce unknown noise. The developing WSI and algorithm are implemented to measure 3D surface of wafer. Experimental results revealed that the proposed system and algorithm are able to measure 3D surface profile of wafer with a good precision and high speed.

• Proceedings of the KAIS Fall Conference
• /
• 2011.05b
• /
• pp.761-764
• /
• 2011

본 연구에서는 대면적 백색광 간섭계의 개발과 개발 되어진 대면적 백색광 간섭계의 고속화를 위하여 Multi-PC를 이용한 동기화 이미지 획득 및 이미지 분할연산과 최적의 Multi-Thread 구성을 통한 영역분할 ROI 알고리즘에 대한 연구결과를 기술하였다.

• Proceedings of the Optical Society of Korea Conference
• /
• 2003.02a
• /
• pp.88-89
• /
• 2003

산업이 고도로 발달함에 따라 생산 부품의 소형화와 정밀도가 크게 요구되고 있다. 특히 최첨단 제품인 반도체와 광통신 부품, 그리고 광학 부품 등에 있어 이러한 추세가 두드러지게 나타나고 있다. 이에 따라 이들 부품들에 대한 제조 공정 못지 않게 초정밀 측정에 대한 관심도 꾸준히 늘고 있다. 뿐만아니라 요즘 새롭게 부각되고 있는 생명 공학 기술(Bio-Technology)과 나노기술(Nano-Technology)을 이용한 바이오센서나 칩, 그리고 타소 나노 튜브 등을 제작하거나 검사를 할 때도 초정밀 측정을 필요로 하게 된다. (중략)

• Journal of Institute of Control, Robotics and Systems
• /
• v.17 no.3
• /
• pp.248-253
• /
• 2011

This paper proposes the robust matching algorithm for optical images obtained by WSI(White-light Scanning Interferometer) machine. The matching algorithms are divided by two part according to the matching points: algorithm whether the matching points between two images exist or not. Also, after matching the images, we propose the algorithm to smooth the matched image. Finally, we show the effectiveness and feasibility of the proposed method through some experiments.

• Korean Journal of Optics and Photonics
• /
• v.20 no.5
• /
• pp.272-275
• /
• 2009

In order to enhance the background noise filtering performance of the white light interferometry(WLI), we demonstrate the noise filtering performance of preprocessing of the measured fringe signals. The WLI was realized through a mirau interferometer which was equipped with a green LED. When measuring large-height and rough surface objects, the illumination optics are considered the numerical aperture(NA) and the depth of focus(DOF). In this case, the limited NA of the illumination optics has a considerable impact on the interference fringe. Therefore, we propose a preprocessing method that uses the intensity difference between the measured intensity and the moving average intensity. The performance is demonstrated by measuring an array of metal solder balls fabricated on printed circuit board(PCB). The proposed method reduces the noise pixels by 15 percent.

• Journal of the Korean Society for Precision Engineering
• /
• v.28 no.3
• /
• pp.323-329
• /
• 2011

Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multi-probe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of $10{\times}$ and $100{\times}$. CRMs with nominal step heights of $0.5\;{\mu}m$, $1\;{\mu}m$, $3\;{\mu}m$, $5\;{\mu}m$, $7\;{\mu}m$, and $10\;{\mu}m$ were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm ($1{\sigma}$).