Design and Fabrication of a Step Height Certified Reference Material for Multi-probe Inspection Instruments
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Maeng, Sae-Rom
(Center for Length, Division of Physical Metrology, KRISS)
Jin, Jong-Han (Center for Length, Division of Physical Metrology, KRISS) Buajarern, Jariya (National Institute of Metrology) Kim, Jae-Wan (Center for Length, Division of Physical Metrology, KRISS) Kim, Jong-Ahn (Center for Length, Division of Physical Metrology, KRISS) Kang, Chu-Shik (Center for Length, Division of Physical Metrology, KRISS) |
1 | Quinn, T. J., "Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2001)," Metrologia, Vol. 40, No. 2, pp. 103-133, 2003. DOI ScienceOn |
2 | Felder, R., "Practical realization of the definition of the metre, including recommended radiations of other optical frequency standards (2003)," Metrologia, Vol. 42, No. 4, pp. 323-325, 2005. DOI ScienceOn |
3 | Jin, J., Misumi, I., Gonda, S. and Kurosawa, T., "Pitch measurement of 150 nm 1D-grating Standards Using an Nano-metrological Atomic force Microscope," International Journal of Precision Engineering and Manufacturing, Vol. 5, No. 3, pp. 19-25, 2004. |
4 | Kim, J.-A., Kim, J. W., Kang, C.-S. and Eom, T. B., "Measurement of Two-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation," International Journal of Precision Engineering and Manufacturing, Vol. 24, No. 9, pp. 68-75, 2007. |
5 | Kim, J.-A., Kim, J. W., Kang, C.-S. and Eom, T. B., "Metrological Atomic Force Microscope Using a Large Range Scanning Dual Stage," International Journal of Precision Engineering and Manufacturing, Vol. 10, No. 5, pp. 11-17, 2009. DOI |
6 | ISO-5436-1(Type A) guideline, International Organization for Standardization, www.iso.org |
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