• Title/Summary/Keyword: via-free

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Characteristic of Through Silicon Via's Seed Layer Deposition and Via Filling (실리콘 관통형 Via(TSV)의 Seed Layer 증착 및 Via Filling 특성)

  • Lee, Hyunju;Choi, Manho;Kwon, Se-Hun;Lee, Jae-Ho;Kim, Yangdo
    • Korean Journal of Materials Research
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    • v.23 no.10
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    • pp.550-554
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    • 2013
  • As continued scaling becomes increasingly difficult, 3D integration has emerged as a viable solution to achieve higher bandwidths and good power efficiency. 3D integration can be defined as a technology involving the stacking of multiple processed wafers containing integrated circuits on top of each other with vertical interconnects between the wafers. This type of 3D structure can improve performance levels, enable the integration of devices with incompatible process flows, and reduce form factors. Through silicon vias (TSVs), which directly connect stacked structures die-to-die, are an enabling technology for future 3D integrated systems. TSVs filled with copper using an electro-plating method are investigated in this study. DC and pulses are used as a current source for the electro-plating process as a means of via filling. A TiN barrier and Ru seed layers are deposited by plasma-enhanced atomic layer deposition (PEALD) with thicknesses of 10 and 30 nm, respectively. All samples electroplated by the DC current showed defects, even with additives. However, the samples electroplated by the pulse current showed defect-free super-filled via structures. The optimized condition for defect-free bottom-up super-filling was established by adjusting the additive concentrations in the basic plating solution of copper sulfate. The optimized concentrations of JGB and SPS were found to be 10 and 20 ppm, respectively.

Naturally-Occurring Novel Anticatcinogens : Conjugated Dienoic Derivatives of Linoliec Acid (CLA) (새로이 분류된 천연 항암제 : Conjugated Dienoic Derivatives of Linoleic Acid (CLA))

  • 하영래;마이클파리자
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.20 no.4
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    • pp.401-407
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    • 1991
  • Anticarcinogenic conjugated dienoic derivatives of linoleic acid (CLA) is present in grilled beef, cheese, and related foods, CLA is generated via isomerization of linoleic acid in the cow's rumen by anaerobic bacteria and food proceessing as well. Another source of CLA is its endogenous generation via the carbon centered free radical oxdation of linoleic acid. We propose that the formation and generation of CLA in vivo represents a previously unrecognized in situ "defense mechanism" against membrane attack by oxygen free radicals. The cis, 9-trans, 11 CLS isomer is selectively incorporated into cellular phospholipid, which exhibits a potent antioxidant, reduces the activation of 2-amino-3-methylimidazo, [4,5-f] quinoline (IQ) for baxterial mutagenesis, and inhibits ornithine decarboxylase(ODC) activity induced by 12-0-tetradecanoylphorbol-13-acetate (TPA). We believe that at least these biological activities of CLA explain the anticarcinogenic activity of CLA.

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Experimental and Finite Element Analysis of Free Vibration Behaviour of Graphene Oxide Incorporated Carbon Fiber/Epoxy Composite

  • Adak, Nitai Chandra;Uke, Kamalkishor Janardhanji;Kuila, Tapas;Samanta, Pranab;Lee, Joong Hee
    • Composites Research
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    • v.31 no.6
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    • pp.311-316
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    • 2018
  • In the present study, the effect of GO in damping capacity of CF/epoxy laminates was studied via free vibration analysis. The composite laminates were manufactured by using vacuum assisted resin transfer molding technique. The damping properties of the prepared hybrid composites were determined in terms of natural frequency and damping ratio in free vibration test. The foremost aspire of this investigation was to compare the vibration properties i.e. natural frequency and modal damping of the prepared composites with the numerical results. The numerical study was carried out via FEA using $ANSYS^{TM}$ workbench software. The parametric study of the numerical models was also studied considering the beam free length and the beam thickness. It was found that the incorporation of GO enhanced the damping capacity of the composite and the variation of natural frequencies in mode1varied by 2-5% compared to the experimental study.

The effects of current conditions on the defect free deep via fill with reduced overburden (Overburden 억제와 무결함 Deep Via Cu Fill 도금을 위한 전류조건의 영향)

  • Im, Eun-Jeong;Kim, Tae-Ho;Byeon, Jeong-Su;Kim, Tae-Ho;Won, Gyeong-A;Nam, Hyo-Seung
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.11a
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    • pp.27-27
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    • 2007
  • Cu via fill 도금 시, void, seam과 같은 내부 defects는 공정 중 신뢰성을 떨어뜨리며, 전기신호 전달속도를 느리게 한다. 또한 Cu via fell 도금 공정 중 발생하는 과도한 Cu 표면 도금층은 wafer thenning 공정의 생산성 저하와 공정 비용 상승을 유발한다. 3D Interconnection용 직경 30${\mu}$m, 깊이 120${\mu}$m (Aspect Ratio : 4) Via를 이용하여 정류방법, 전류 parameter, 첨가제 조성에 따른 Cu via felling 특성과 overburden두께 변화를 실험적으로 검증하였다.

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Structure Optimization of Solute Molecules via Free Energy Gradient Method

  • Nagaoka, Masataka
    • Bulletin of the Korean Chemical Society
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    • v.24 no.6
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    • pp.805-808
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    • 2003
  • Fundamental ideas of the free energy gradient method are briefly reviewed with three applications: the stable structures of glycine and ammonia-water molecule pair in aqueous solution and the transition state (TS) structure of a Menshutkin reaction $NH_3 + CH_3Cl → CH_3NH_3^+ + Cl^-$ in aqueous solution, which is the first example of full TS optimization of all internal degrees of freedom.

RELATIVE RELATION MODULES OF FINITE ELEMENTARY ABELIAN p-GROUPS

  • Yamin, Mohammad;Sharma, Poonam Kumar
    • Bulletin of the Korean Mathematical Society
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    • v.51 no.4
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    • pp.1205-1210
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    • 2014
  • Let E be a free product of a finite number of cyclic groups, and S a normal subgroup of E such that $$E/S{\sim_=}G$$ is finite. For a prime p, $\hat{S}=S/S^{\prime}S^p$ may be regarded as an $F_pG$-module via conjugation in E. The aim of this article is to prove that $\hat{S}$ is decomposable into two indecomposable modules for finite elementary abelian p-groups G.

Free vibration analysis of clamped free circular cylindrical shells (일단고정-일단자유 원통 셸의 진동 해석)

  • 임정식
    • Journal of KSNVE
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    • v.6 no.1
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    • pp.45-56
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    • 1996
  • Frequency equation for clamped-free circular cylindrical thin shell is derived by the application of Rayleigh-Ritz method using the Sanders shell equation. The cubic frequency equation is solved for each axial and circumferential mode number. Integration of the beam characteristic funcitions was performed via Mathematica which results in more accurate integration of the beam functions that affect the accuracy of the frequency. The natural frequencies from this calculation are compared with existing results. It shows that this calculation predicts natural frequencies closer to the test results than existing results.

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REVISIT TO CONNECTED ALEXANDER QUANDLES OF SMALL ORDERS VIA FIXED POINT FREE AUTOMORPHISMS OF FINITE ABELIAN GROUPS

  • Sim, Hyo-Seob;Song, Hyun-Jong
    • East Asian mathematical journal
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    • v.30 no.3
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    • pp.293-302
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    • 2014
  • In this paper we provide a rigorous proof for the fact that there are exactly 8 connected Alexander quandles of order $2^5$ by combining properties of fixed point free automorphisms of finite abelian 2-groups and the classification of conjugacy classes of GL(5, 2). Furthermore we verify that six of the eight associated Alexander modules are simple, whereas the other two are semisimple.