• International journal of advanced smart convergence
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• v.5 no.2
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• pp.1-7
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• 2016

Recently, with the development of advanced thin film devices comes the need for constant high quality vacuum as the deposition pressure is more demanding. It is for this reason our research seeks to understand how the variable design factors are employed in such vacuum systems. In this study, the effects of design factor applications on the vacuum characteristics were simulated to obtain the optimum design modeling of variable models on an ultra high vacuum system. The commercial vacuum system simulator, $VacSim^{(multi)}$, was used in our investigation. The reliability of the employed simulator was verified by the simulation of the commercially available models of ultra high vacuum system. Simulated vacuum characteristics of the proposed modeling aligned with the observed experimental behavior of real systems. Simulated behaviors showed the optimum design models for the ideal conditions to achieve optimal pressure, pumping speed, and compression ratio in these systems.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.4
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• pp.15-21
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• 1997

Pneumatics is widly used in the industrial implementation, in the operation of air-powered actuators and the control devices needed in their operation. However, there are many empirical factors in pneumatics design, it might cause excessive design of pneumatic components. For that reason, we developed VDES(Vacuum Design Expert System) for the economic design of pneumatic vacuum equipment. VDES is achieved with CLIPS(C Language Integrated Production System) and knowledge base that contains a number of facts and rules for pneumatic vacuum design. Forward chaining and depth first search technique are used in this system. Appling VDES to the actual field, this system is verified to be a good efficiency and could be applied to the field of pneumatic vacuum equipment design.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.6
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• pp.86-95
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• 2007

This paper presents the optimal design of an exhaust system of a vacuum-compatible air bearing using a genetic algorithm. To use the air bearings in vacuum conditions, the differential exhaust method is adopted to minimize the air leakage, which prevents air from leaking into a vacuum chamber by recovering air through several successive seal stages in advance. Therefore, the design of the differential exhaust system is very important because several design parameters such as the number of seals, diameter and length of an exhaust tube, pumping speed and ultimate pressure of a vacuum pump, seal length and gap(bearing clearance) influence on the air leakage, that is, chamber's degree of vacuum. In this paper, we used a genetic algorithm to optimize the design parameters of the exhaust system of a vacuum-compatible air bearing under the several constraint conditions. The results indicate that chamber's degree of vacuum after optimization improved dramatically compared to the initial design, and that the distribution of the spatial design parameters, such as exhaust tube diameter and seal length, was well achieved, and that technical limit of the pumping speed was well determined.

• International journal of advanced smart convergence
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• v.10 no.1
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• pp.159-165
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• 2021

Electronic devices used in the mobile environments fabricated under the plasma conditions in high vacuum system. Especially for the development of advanced electronic devices, high quality plasma as the process conditions are required. For this purpose, the variable conductance throttle valves for controllable plasma employed to the high vacuum system. In this study, we analyzed the effects of throttle valve applications on vacuum characteristics simulated to obtain the optimum design modelling for plasma conditions of high vacuum system. We used commercial simulator of vacuum system, VacSim(multi) on this study. Reliability of simulator verified by simulation of the commercially available models of high vacuum system. Simulated vacuum characteristics of the proposed modelling agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve schematized as the modelling of throttle valve for the constant process-pressure of below 10-3 torr. Simulation results plotted as pump down curve of chamber, variable valve conductance and conductance logic of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably in plasma process.

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Journal of Power System Engineering
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• v.13 no.6
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• pp.110-116
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• 2009

In the present study, we proposed a simulation model of vacuum booster with AMESIM software to predict the output characteristic. And we performed the sensitivity analysis of output characteristic with main design parameters, such as diaphragm diameter. All of these parameters are main design parameters in the procedure of vacuum booster design. The simulation results of this paper offer qualitative information of vacuum booster output. Therefore, the simulation results of this paper will be used effectively for the design procedure of vacuum booster in the industrial field.

• Journal of the Korean Vacuum Society
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• v.16 no.6
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• pp.405-413
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• 2007

Effect of design factors on the performance of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for $VacSim^{Multi}$ simulator was proposed. Simulation results of pumping design factor showed the possibilities of simulation fore-study for the detailed design factors. Simulation of roughing pump presented the expected pumping behaviors based on the specifications of commercial pump. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the characteristics of process application of both systems were also acquired.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.70.1-70.1
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• 2015

The facility for RAON superconducting heavy-ion accelerator at a beam power of up to 400 kW will be produced rare isotopes with two electron cyclotron resonance (ECR) ion sources. Highly charged ions generated by the ECR ion source will be injected to a superconducting LINAC to accelerate them up to 200 MeV/u. During the acceleration of the heavy ions, a good vacuum system is required to avoid beam loss due to interaction with residual gases. Therefore ultra-high vacuum (UHV) is required to (i) limit beam losses, (ii) keep the radiation induced within safe levels, and (iii) prevent contamination of superconducting cavities by residual gas. In this work, a RAON vacuum design for all the accelerator system will be presented along with Monte Carlo simulation of vacuum levels in order to validate the vacuum hardware configuration, which is needed to meet the baseline requirements.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.287-292
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• 2010

Effect of conductance factors on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSim$^{Multi}$ simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of exhaust pipeline were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust pipeline. Variation of pipeline diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of pipeline had the superior vacuum characteristics among the modeled systems.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.2
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• pp.77-83
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• 2012

Effect of valve conductance on performance of vacuum system was simulated for optimum design of vacuum system. In this investigation, the feasibility of modeling mechanism for VacSimMulti simulator was proposed. Application specific design of vacuum system is required to meet the particular process conditions for various industrial implementations of vacuum equipments. Geometry and length, diameter of vacuum valve were modeled as simulation modeling variables for conductance effects. Series vacuum system was modeled and simulated with varied dimensions and structures of exhaust valves. Variation of valve diameter showed the more significant effects on vacuum characteristics than that of pipeline length variations. It was also observed that the aperture structure of valve had the superior vacuum characteristics among the modeled systems.