1 |
Hyung-Taek Kim. Analysis of High Vacuum System Based on the Applications of Vacuum Materials. The journal of The Transactions on electrical and electronic materials VOL.14,No.6,pp.334-338,December25,2013, DOI; http://dx.doi.org
DOI
|
2 |
Varian Associates, Inc, "Basic Vacuum Practice 2ndEd.",p.69,2001.
|
3 |
James M. Lafferty, "Foundations of Vacuum Science and Technology", John Wiley & Sons, p. 103, 1999.
|
4 |
H.W. Kim, D.H. Park and K.J. Lim, Introduction to basic vacuum engineering for semiconductor and display processing (NaeHa, Seoul, 2007) p. 100-109.
|
5 |
Y.S Kim, Journal of the Semiconductor & Display Equipment Technology, 8., 1., 7 (2009).
|
6 |
M.J. Seo, Journal of the Korean Institute of Electrical and Electronic Material Engineers,
|