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http://dx.doi.org/10.5757/JKVS.2007.16.6.405

Simulation of Design Factor Effects on Performance of Vacuum System  

Kim, Hyung-Taek (Division of Advanced Materials and Safety Engineering, College of Engineering, University of Incheon)
Jeong, Kwang-Pil (Division of Advanced Materials and Safety Engineering, College of Engineering, University of Incheon)
Publication Information
Journal of the Korean Vacuum Society / v.16, no.6, 2007 , pp. 405-413 More about this Journal
Abstract
Effect of design factors on the performance of vacuum system was simulated for optimum design of system. In this investigation, the feasibility of modelling mechanism for $VacSim^{Multi}$ simulator was proposed. Simulation results of pumping design factor showed the possibilities of simulation fore-study for the detailed design factors. Simulation of roughing pump presented the expected pumping behaviors based on the specifications of commercial pump. Application of booster pump exhibited the high pumping efficiency for middle vacuum range. Combinations of optimum backing pump for diffusion and turbo vacuum system were obtained. And, the characteristics of process application of both systems were also acquired.
Keywords
vacuum system; simulation; design factor; optimum design;
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