• JSTS:Journal of Semiconductor Technology and Science
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• v.2 no.4
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• pp.259-267
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• 2002

We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

• Journal of the Korean Society of Radiology
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• v.9 no.7
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• pp.439-443
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• 2015

An electrical signals of a conventional radiation medical imaging sensor are obtained by charge integration method. In this study, the polycrystalline cadmium telluride(p-CdTe) film was fabricated by a thermal evaporation method for the photon counting sensor development with excellent resolution in low exposure dose. From the fabricated p-CdTe sensor, the physical properties(SEM, XRD) and the electrical properties(leakage current, x-ray sensitivity, SNR) were evaluated. As a result, the leakage current of below $5nA/cm^2$ and $7{\mu}C/cm^2-R$ of the X-ray sensitivity were showed in below $1V/{\mu}m$. In addition, the signal to noise ratio showed the values of above 5000 at operating voltage.

• Journal of the Korean Society of Radiology
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• v.10 no.8
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• pp.591-596
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• 2016

The purpose of this study is to determine the equivalent energy of a 6MV X-ray beam in the experiment. The half-value layer (HVL) of lead for the 6 MV X-ray beam was measured using an ionization chamber. The linear attenuation coefficients were calculated with HVL. And, the mass attenuation coefficient was obtained by dividing the linear attenuation coefficient by the density of lead. The equivalent energy of mass attenuation coefficient was determined using the photon energy versus mass attenuation coefficient data of lead given by National Institute of Standards and Technology (NIST). In conclusion, the equivalent energy of the 6 MV X-ray beam was determined to be 1.61 MeV. This equivalent energy was determined to be about 30% lower than reported by Reft. The reason is presumed to be due to the presence of an air cavity between the lead attenuators.

• Journal of the Korean Society of Radiology
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• v.9 no.6
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• pp.375-379
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• 2015

The purpose of this study is to determine the effective energy of a polyenegetic X-ray beam. The half value layer(HVL) of aluminum for 80 kVp X-ray beam was measured by using optically stimulated luminescent nanoDot dosimeters(OSLnDs). The linear attenuation coefficient(${\mu}$) was calculated using the measured HVL. And the mass attenuation coefficient(${\mu}/{\rho}$) was obtained by dividing the linear attenuation coefficient by the density(${\rho}$) of aluminum. The effective energy($E_{eff}$) of the obtained mass attenuation coefficient was determined using data of the X-ray mass attenuation coefficients for photon energies of aluminum given by National Institute of Standards and Technology(NIST). As a result, the HVL value is 2.262 mmAl. The ${\mu}$ value is $3.06cm^{-1}$. The ${\mu}/{\rho}$ value is $1.114cm^2/g$. And the $E_{eff}$ value was determined at 29.79 keV.

• Progress in Medical Physics
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• v.13 no.4
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• pp.229-233
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• 2002

We have tested a combined CT/SPECT system with a single CZT detector for x-ray and gamma-ray medical imaging. The size of detector is 10$\times$10$\times$5 ㎣, and the anodes are pixellated as a 4$\times$4 array with a pixel dimension of $1.5\times$1.5 $\textrm{mm}^2$. The cathode was coated with a continuous Au-plated. We have characterized the system performance by scanning a radiographic resolution phantom and the Hoffman Brain phantom. Pulse counting electronics with very short shaping time (50 ㎱) are used to satisfy high photon rates in x-ray imaging, and response linearity up to 3$\times$10$^{5}$ counts per second per detector element is achieved. Energy resolution of 10.4% and 5.3% FWHM at Tc-99m 140 keV peak are obtained for the 50 ㎱ and 2 $mutextrm{s}$ shaping times, respectively. The spatial resolutions of CT and SPECT are about 1mm and 9mm, respectively. Photopeak efficiency of detector systems are 41.0% for 50㎱ and 72.5% for 2 $mutextrm{s}$ shaping time.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.456-456
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• 2013

We report the modifications in the electronic structureof ZnO thin films induced by swift heavy ion (SHI) irradiated ZnO thin films by using near edge X-ray absorption fine structure (NEXAFS) spectroscopy at O K-edge was performed at BL10D XAS-KIST beamline at Pohang Accelerator Lab (PAL). ZnO films of 250 nm thickness oriented in [200] plane deposited by RF magnetron sputtering using equal $Ar:O_2$ atmosphere and air annealed at $500^{\circ}C$ for 6 hours for stability were irradiated with 120 MeV Au and 100 MeV O beams separately with different doses ranging from $1{\times}10^{11}$ to $5{\times}10^{12}$ ions/$cm^2$. High Resolution X-ray diffraction and NEXAFS analysis indicates significant changes in the electronic structure and the SHI effect is different for Ag and O-beams. The NEXAFS measurements provide direct evidence of O 2p and Zn 3d orbital hybridization. The NEXAFS results will be presented in detail.

• Korean Journal of Materials Research
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• v.4 no.5
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• pp.510-515
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• 1994

Yttria-stabilized zirconia(YSZ) films were prepared onto p-type (100) silicon wafer by a plasma-enhanced metallorganic chemical vapor deposition(PE MO CVD) processing involving the application of vapor mixture of tri(2.2.6.6-tetramethyl-3, 5-heptanate) yttrium$[Y(DPM)_3]$, zirconiumtriflouracethyla cetonate$(Zr(tfacac)_4$ and oxygen gas. The x-ray diffraction(XRD) and fourier transform infrared spectra(FT1R) results showed that the deposited YSZ films had a single cubic phase. $Y_2O_3$ content of YSZ film was analyzed by PIXE(partic1e induced x-ray emission). The experimental results by PIXE revealed that 12.lmol%, 20.4mol% and 31.6mol% $Y_2O_3$ could be obtained as the $Y(DPM)_3$ bubbling temperature varied at $160^{\circ}C, 165^{\circ}C$ and $170^{\circ}C$ respectively. The increase of $Y(DPM)_3$ bubbling temperature caused shifting flat band voltage to have a negative value.

• Bulletin of the Korean Chemical Society
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• v.21 no.6
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• pp.588-594
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• 2000

Structural changes of an iron phthalocyanine (FePC) monolayer induced by adsorption and externally applied potential on high area carbon surface have been investigated in situ by iron K-edge X-ray absorption fine structure (XAFS) in 0.5 M $H_2S0_4.$ Fine structures shown in the X-ray absorption near edge structure (XANES) for microcrystalline FePC decreased upon adsorption and further diminished under electrochemical conditions. Fe(II)PC(-2) showed a 1s ${\rightarrow}$ 4p transition as poorly resolved shoulder to the main absorption edge rather than a distinct peak and a weak 1s ${\rightarrow}$ 3d transition. The absorption edge position measured at half maximum was shifted from 7121.8 eV for Fe(lI)PC(-2) to 7124.8 eV for $[Fe(III)PC(-2)]^+$ as well as the 1s ${\rightarrow}$ 3d pre-edge peak being slightly enhanced. However, essentially no absorption edge shift was observed by the 1-electron reduction of Fe(Il)PC(-2), indicating that the species formed is $[Fe(II)PC(-3)]^-$. Structural parameters were obtained by analyzing extended X-ray absorption fine structure (EXAFS) oscillations with theoretical phases and amplitudes calculated from FEFF 6.01 using multiple-scattering theory. When applied to the powder FePC, the average iron-to-phthalocyanine nitrogen distance, d(Fe-$N_p$) and the coordination number were found to be 1.933 $\AA$ and 3.2, respectively, and these values are the same, within experimental error, as those reported ( $1.927\AA$ and 4). Virtually no structural changes were found upon adsorption except for the increased Debye-Wailer factor of $0.005\AA^2$ from $0.003\AA^2.$ Oxidation of Fe(II)PC(-2) to $[Fe(III)PC(-2)]^+$ yielded an increased d(Fe-Np) (1 $.98\AA)$ and Debye-Wailer factor $(0.005\AA^2).$ The formation of $[Fe(II)PC(-3)]^-$, however, produced a shorter d(Fe-$N_p$) of $1.91\AA$ the same as that of crystalline FePC within experimental error, and about the same DebyeWaller $factor(0.006\AA^2)$.

• Journal of the Korean Society of Radiology
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• v.13 no.4
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• pp.517-522
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• 2019

The purpose of this study is to determine the effective energy of CT X-ray beams by using the CT slice images of a CT number calibration insert part in the AAPM CT performance phantom. The CT number calibration insert part in the AAPM CT performance phantom was scanned five times by using a CT canner for 80, 100 and 120 kVp X-ray beams. The average value of CT numbers of each pin were measured for each CT slice image. The correlation coefficients were obtained by linear fit between the average value of CT numbers measured and liner attenuation coefficient under different energy at each pin calculated from data of NIST. A photon energy corresponding to the maximum value of the obtained correlation coefficient was determined as an effective energy. As a result, the effective energy was 56, 62 and 66~67 keV, respectively, for 80, 100 and 120 kVp X-ray beams.

• Structural Engineering and Mechanics
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• v.85 no.1
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• pp.29-53
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• 2023

High-strength shielding concrete against gamma radiation is a priority for many medical and industrial facilities. This paper aimed to investigate the gamma-ray shielding properties of high-strength hematite concrete mixed with silica fume (SF) with nanoparticles of lead dioxide (PbO₂), tungsten oxide (WO₃), and bismuth oxide (Bi₂O₃). The effect of mixing steel fibres with the aforementioned binders was also investigated. The reference mixture was prepared for high-strength concrete (HSCC) containing 100% hematite coarse and fine aggregate. Thirteen mixtures containing 5% SF and nanoparticles of PbO₂, WO₃, and Bi₂O₃ (2%, 5%, and 7% of the cement mass, respectively) were prepared. Steel fibres were added at a volume ratio of 0.28% of the volume of concrete with 5% of nanoparticles. The slump test was conducted to workability of fresh concrete Unit weight water permeability, compressive strength, splitting tensile strength, flexural strength, and modulus of elasticity tests were conducted to assess concrete's engineering properties at 28 days. Gamma-ray radiation of 137Cs emits photons with an energy of 662 keV, and that of 60Co emits two photons with energies of 1173 and 1332 keV were applied on concrete specimens to assess radiation shielding properties. Nanoparticles partially replacing cement reduced slump in workability of fresh concrete. The compressive strength of mixtures, including nanoparticles was shown to be greater, achieving 94.5 MPa for the mixture consisting of 7.5 PbO2. In contrast, the mixture (5PbO₂-F) containing steel fibres achieved the highest values for splitting tensile, flexural strength, and modulus of elasticity (11.71, 15.97, and 42,840 MPa, respectively). High-strength shielded concrete (7.5PbO2) showed the best radiation protection. It also showed the minimum concrete thickness required to prevent the transmission of radiation.