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http://dx.doi.org/10.7742/jksr.2015.9.7.439

The Fabrication and Property Evaluation of Poly-crystalline CdTe based Photon Counting X-ray Sensor  

Kang, Sang Sik (Department of Radiological Science, International University of Korea)
Park, Ji Koon (Department of Radiological Science, International University of Korea)
Publication Information
Journal of the Korean Society of Radiology / v.9, no.7, 2015 , pp. 439-443 More about this Journal
Abstract
An electrical signals of a conventional radiation medical imaging sensor are obtained by charge integration method. In this study, the polycrystalline cadmium telluride(p-CdTe) film was fabricated by a thermal evaporation method for the photon counting sensor development with excellent resolution in low exposure dose. From the fabricated p-CdTe sensor, the physical properties(SEM, XRD) and the electrical properties(leakage current, x-ray sensitivity, SNR) were evaluated. As a result, the leakage current of below $5nA/cm^2$ and $7{\mu}C/cm^2-R$ of the X-ray sensitivity were showed in below $1V/{\mu}m$. In addition, the signal to noise ratio showed the values of above 5000 at operating voltage.
Keywords
photon counting; polycrystalline; cadmium telluride; charge collection efficiency; thermal evaporation;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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