• 한국표면공학회지
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• 제36권2호
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• pp.128-134
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• 2003

Alloys of Ti-43%Al-2%W-0.1%Si were oxidized isothermally and cyclically between $900^{\circ}C$ and$ 1050^{\circ}C$, and their oxidation characteristics were studied. During isothermal tests, the alloys oxidized slowly up to 100$0^{\circ}C$, but fast at $1050^{\circ}C$. Though the scale adherence was not good above $900^{\circ}C$, the alloys displayed better oxidation behavior than unalloyed TiAl alloys. The oxide scales consisted primarily of an outer $TiO_2$ layer, intermediate $Al_2$$O_3$-rich layer, and an inner mixed layer of (TiO$_2$ $+Al_2$$O_3$). Tungsten was present mainly at the lower part of the oxide scale, while Si over the whole oxide scale.

• 한국기계가공학회지
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• 제2권4호
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• pp.17-24
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• 2003

Chemical mechanical polishing(CMP) has been applied for planarization of topography after patterning process in semiconductor fabrication process. Tungsten CMP is necessary to build up interconnects of semiconductor device. But the tungsten dishing and the oxide erosion defects appear at end-point during tungsten CMP. It has been known that the generation of dishing and erosion is based on the over-polishing time, which is determined by pattern selectivity. Fixed abrasive pad takes advantage of decreasing the defects resulting flam reducing pattern selectivity because of the lower abrasive concentration. The manufacturing technique of fixed abrasive pad using hydrophilic polymers is introduced in this paper. For application to tungsten CMP, chemicals composed of oxidizer, catalyst, and acid were developed. In comparison of the general pad and slurry for tungsten CMP, the fixed abrasive pad and the chemicals resulted in appropriate performance in point of removal rate, uniformity, material selectivity and roughness.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.163-166
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• 2006

The dishing and the erosion were evaluated on the tungsten CMP process with conventional and new developed slurry. The tungsten thin film was polished by orbital polishing equipment. Commercial pattern wafer was used for the evaluation. Both slurries were pre tested on the oxide region on the wafer surface and the removal rate was not different very much. At the pattern density examination, the erosion performance was increased at all processing condition due to the reduction of thickness loss in new slurry. However, the dishing thickness was not remarkably changed at high pattern density despite of the improvement at low pattern density. At the large pad area, the reduction of dishing thickness was clearly found at new tungsten slurry.

• 한국진공학회지
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• 제8권2호
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• pp.136-140
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• 1999

The stability and response time of $WO_3$ thin films for EC device are critical problems being solved. Those are affected by the species of electrolyte, preparation conditions and fabricating methods of specimen. In this paper, we compared the stabilities of three kinds of tungsten oxide film in electrolyte. Each of three films was prepared by different manufacturing conditions, that is, one is a thermal oxidation film of tungsten metal deposited on pure glass substrate, another is a $WO_3$ film made on ITO glass directly, the other is a thermally oxidized film on tungsten plate. It was observed that thermally oxidized $WO_3$ films has a remarkable stability (the lifetime was above $10^6$ cycle). From these results, we found that the stability was closely related to the stoichiometric bonding between tungsten and oxygen atoms in addition to crystallinity and density of film.

• 한국융합학회논문지
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• 제12권4호
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• pp.87-94
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• 2021

의료기관의 방사선 차폐체의 차폐물질이 친환경소재로 변화되면서 기존 납의 일반된 차폐특성보다 차폐물질의 특성에 따른 방사선 방어가 중요한 요소로 대두되고 있다. 납과 유사한 차폐물질로 대표적인 텡스텐과 황산바륨은 친환경 소재로 시트나, 섬유 형태로 제작되어 사용되고 있다. 이테르븀은 치과 방사선영역에서 불투과성 물질로 불소화합물로 사용되었으며, 에너지대별 차폐특성과 기존 친환경소재의 차폐특성과 비교하여 x-선 차폐영역에서 차폐성능을 평가하고자 한다. 동일한 공정과 조건하에 세 종류의 차폐시트를 제작하여 실험하였으며, 의료방사선 영역에서 텅스텐과 약 5 % 차폐성능 차이가 나타났으며, 황산바륨보다 우수한 차폐성능을 보였다. 차폐시트의 단면 구조에서는 인자의 배열이 일정하지 못하는 큰 단점을 보였다. 따라서 산화이테르븀은 의료방사선 차폐물질로 충분한 가능성을 보였으며, 입자배열 구조와 입자크기 조절로 차폐성능을 향상시킬 수 있을 것으로 사료된다.

• 한국재료학회지
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• 제2권1호
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• pp.19-26
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• 1992

$WF_6$와 $SiH_4$의 화학반옹으로부터 산화규소막 위에 텅스텐 핵이 형성되는 현상을 실험을 통해 관찰하였다. 핵이 생성되는 속도는 반응온도가 높고 운반기체의 유량이 적으며 반응기내의 압력이 높을수록 큰 것으로 나타났다. 또한 반응기체가 흘러가는 방향에서 아랫쪽으로 위치하는 표면에 핵이 생성되는 속도가 큰 것으로 나타났다. 산화막위에 생성된 텅스텐 핵의 형상과 파단면을 주사현미경으로 관찰하였으며 산화막위에 형성된 텅스텐 박막의 화학적 조성을 밝혀내었다.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2011년도 추계학술발표대회
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• pp.16.1-16.1
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• 2011

Gas sensor properties of $WO_3$ nanowire structures have been studied. The sensing layer was prepared by deposition of tungsten metal on porous single wall carbon nanotubes followed by thermal oxidation. The morphology and crystalline quality of $WO_3$ material was investigated by SEM, TEM, XRD and Raman analysis. A highly porous $WO_3$ nanowire structure with a mean diameter of 82 nm was obtained. Response to CO, $NH_3$ and $H_2$ gases diluted in air were investigated in the temperature range of $100{\sim}340^{\circ}C$ The sensor exhibited low response to CO gas and quite high response to $NH_3$ and $H_2$ gases. The highest sensitivity was observed at $250^{\circ}C$ for $NH_3$ and $300^{\circ}C$ for $H_2$. The effect of the diameters of $WO_3$ nanowires on the sensor performance was also studied. The $WO_3$ nanowires sensor with diameter of 40 nm showed quite high sensitivity, fast response and recovery times to $H_2$ diluted in dry air. The sensitivity as a function of detecting gas concentrations and gas sensing mechanism was discussed. The effect of dilution carrier gases, dry air and nitrogen, was examined.

• Journal of Electrochemical Science and Technology
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• 제7권2호
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• pp.161-169
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• 2016

Porous tungsten oxide thin films were prepared by electrodeposition and tested as anodes of lithium secondary batteries. The synthesized films were composed of nanoparticles of 60-140 nm size, with porosities of 30-40 %. Increasing the temperature turned out to be a more effective approach to introduce porosity in the structure than increasing the electrolyte viscosity. The assessment of the synthesized films as anodes of lithium secondary batteries revealed a much higher initial discharge capacity for the porous than the dense samples. The discharge capacity retention significantly increased with increasing porosity and was further enhanced by heat treatment. In particular, a thin film composed of particles of about 140 nm in size and with a porosity of 40 % exhibited an initial discharge capacity higher than 600 mAh/g and a remaining capacity above 300 mAh/g after 30 cycles. Following heat treatment, the remaining capacity of this sample after 30 cycles increased to about 500 mA h/g.

• 한국분말재료학회지
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• 제14권2호
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• pp.101-107
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• 2007

Ultrasonic-milling of metal oxide nanopowders for the preparation of tungsten heavy alloys was investigated. Milling time was selected as a major process variable. XRD results of metal oxide nanopowders ultrasonic-milled for 50 h and 100 h showed that agglomerate size reduced with increasing milling time and there was no evidence of contamination or change of composition by impurities. It was found that nanocomposite powders reduced at $800^{\circ}C$ in a hydrogen atmosphere showed a chemical composition of 93.1W-4.9Ni-2.0Fe from EDS analysis. Hardness of sintered part using 50 h and 100 h powder samples was 399 Hv and 463 Hv, respectively, which is higher than the that of commercial products (330-340 Hv).

• Nuclear Engineering and Technology
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• 제53권5호
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• pp.1593-1601
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• 2021

Oxide dispersion strengthening (ODS) tungsten alloys are highly desirable in irradiation applications. However, how to improve the properties of ODS-tungsten alloys efficiently has been worth studying for a long time. Here we report a nanostructuring approach that achieves W-La₂O₃ alloy with a high level of flexural strength and Vickers hardness at room temperature, which have the maximum value of 581 MPa and 703 Hv, respectively. This method named solution combustion synthesis (SCS) can generate 30 nm coating structures W-La₂O₃ composite powders by using Keggin-type structural polyoxometalates as raw materials in a fast and low-cost process. The composite powder can be fabricated to W-La₂O₃ alloy with an optimal microstructure of submicrometric W grains coexisting with nanometric oxide particles in the grain interior, and a stability interface structure of grain boundaries (GBs) by forming transition zones. The method can be used to prepare new ODS alloys with excellent properties in the future.