• Transactions on Electrical and Electronic Materials
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• 제12권4호
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• pp.144-147
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• 2011

In this work, we present a study regarding the etching characteristics on titanium nitride (TiN) thin films using an inductively coupled plasma system. The TiN thin film was etched using a $N_2/BCl_3$/Ar plasma. The studied etching parameters were the gas mixing ratio, the radio frequency (RF) power, the direct current (DC)-bias voltages, and the process pressures. The baseline conditions were as follows: RF power = 500 W, DC-bias voltage = -150 V, substrate temperature = $40^{\circ}C$, and process pressure = 15 mTorr. The maximum etch rate and the selectivity of the TiN to the $SiO_2$ thin film were 62.38 nm/min and 5.7, respectively. The X-ray photoelectron spectroscopy results showed no accumulation of etching byproducts from the etched surface of the TiN thin film. Based on the experimental results, the etched TiN thin film was obtained by the chemical etching found in the reactive ion etching mechanism.

• Journal of Oral Medicine and Pain
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• 제42권4호
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• pp.102-108
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• 2017

Purpose: Many metal ions released from dental casting alloys have been reported to influence the intraoral symptoms of oral lichen planus (OLP) and burning mouth syndrome (BMS). The aim of this study was to investigate the relationship between salivary metal ion levels and the prosthetic duration as well as to evaluate the time-dependent morbid effects of metal ions in OLP and BMS patients. Methods: Three study groups consist of the following subjects respectively: 17 OLP patients, 12 BMS patients, and 12 patients without oral symptoms. The salivary concentrations of 13 metal ions (copper, cobalt, zinc, chromium, nickel, aluminum, silver, iron, titanium [Ti], platinum, tin, palladium, and gold) were measured by Laser Ablation Microprobe Inductively coupled Plasma Mass Spectrometry. Results: The Ti ions had statistically significant differences among the groups with a prosthetic duration of less than 5 years. There were no significant differences between all ion levels among the groups wearing dental cast alloys for over 5 years. In the BMS group, the level of Ti ions in patients with prosthetic restorations less than 5 years old were significantly high (p<0.05). Conclusions: In the BMS group, 3-60 months during which salivary Ti levels were higher were matched with the duration of burning symptoms ($15.6{\pm}17.1months$). Furthermore, Ti ions were statistically high in the oral cavity of BMS patients fitted with dental casting alloys for 5 years. These results suggest that Ti ions released from dental implants and oral prostheses could attribute to burning sensation of BMS.

• 한국표면공학회지
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• 제31권5호
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• pp.251-260
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• 1998

Stainless Steel is being used widely for various purposes due to its good corrosion resistance. There have been many researches to produce colored stainless steel by several methods such as anodizing and ion-plating. In this experiment, we $Ti_XN$(C,O) on the films SUS304, aluminium, and glass substrates with DC magentron sputterinng system made by Leybold Hereus, and strdied the structur, corrsion and pit characture of the TiXN observed by TeM image was black and whink and white columnar hed a very fine(200$\AA$) dense sturcture,and the diffraction resistance at the $3{\times}10_6A/\textrm{cm}^2$ and $10_{10}\times{cm}^2$current density were obtained in the under-stoichiometry $Ti_xN$ compound of Ar/$N_2$(Ar:$N_2$=100:6, titanium-rich compound) and the over-stoichiometry compound of Ar/$N_2$((Ar:$N_2$=60:15) respectively. When the thiness was over 1.64$\mu\textrm{m}$, good pit resistance could be obtained and its improvement was especially affected by perfect surfaceface. Typical TiN anodic polarzation curves of very unstable corrosion were observed by $Ti_xN$ film on the glass and perfect film of 3.28$\mu\textrm{m}$ thickness.

• 대한화학회지
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• 제36권1호
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• pp.51-56
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• 1992

페로브스카이트구조를 갖는 $Pb(Zr_{1-y}Ti_y)O_3$ (PZT)계의 $Pb^{2+}$ 위치에 $Nd^{3+}$ 이온을 치환시키면서 그 결정구조와 결합특성을 X-선 회절분석법 및 적외선 분광광도법으로 알아보았으며, 이런 구조변화가 (Pb1-xNdx)(Zr1-yTiy)O3 (PNZT)계의 전기적 및 광학적 특성에 미치는 영향에 대하여 조사하였다. $Pb^{2+}$ 이온이 $Nd^{3+}$ 이온으로 치환될수록 정방성이 감소하며, 8${\sim}$12 mol% 치환되었을 때 입방정계의 구조이다. 결정내의 결합강도는 입방정게의 구조일 때 가장 강하고 높은 투광도를 나타냈으며, PNZT계 화합물이 투광도를 나타내는 것은 전자의 전하-이동 전이에 의한 것으로 생각된다.

• 한국결정성장학회지
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• 제10권5호
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• pp.362-366
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• 2000

$Li_{0.44}MnO_2$양극재료는 리튬의 삽입과정에서 높은 가역성을 가지며 과충전이나 과방전 과정에서 쉽게 손상되지 않는다. $Mn_2O_3$가 불순물로 자주 나타나며 전기화학적으로 비활성이기 때문에 전극의 전기화학적 용량을 감소시킨다. 잉여의 NaOH 첨가는 $Mn_2O_3$를 X선 회절에 검출되지 않는 정도로 낮추었다. 용량 증가는 큰 단위세포를 가지는 양극재료에서 얻어질 수 있으므로, 망간의 일부를 이온반경이 큰 티타니움으로 치환하였으며, $Li_{0.44}T_{iy}Mn_{1-y}O_2$(여기서 y = 0.11, 0.22, 0.33, 0.44, 0.55) 조성의 분말들을 합성하여 특성을 평가하였다. ECPS 실험결과 $Li/P(EO)_8$LiTFSI/$LixTi_{0.22}Mn_{0.78}O_2$전지에서 150 mAh/g 최대가역용량 값이 얻어졌다. 티타니움이 치환된 망간산화물을 사용한 전지는 충방전당 0.12 %나 그 이하의 용량감소율을 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1989-1991
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• 2005

Lithium titanium oxide as anode material for energy storage prepared by novel synthesis method. $Li_4Ti_5O_{12}$ based spinel-framework structures are of great interest material for lithium-ion batteries. We describe here $Li_4Ti_5O_{12}$ a zero-strain insertion material was prepared by novel sol-gel method and by high energy ball milling (HEBM) of precursor to from nanocrystalline phases. According to the X-ray diffraction and scanning electron microscopy analysis, uniformly distributed $Li_4Ti_5O_{12}$ particles with grain sizes of 100nm were synthesized. Lithium cells, consisting of $Li_4Ti_5O_{12}$ anode and lithium cathode showed the 173 mAh/g in the range of $1.0{\sim}3.0V$. Furthermore, the crystalline structure of $Li_4Ti_5O_{12}$ didn't transfer during the lithium intercalation and deintercalation process.

• 구강회복응용과학지
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• 제24권4호
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• pp.361-369
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• 2008

본 연구의 목적은 다공성의 티타늄 산화막에 불소를 처리한 결과를 평가하는 것이다. 디스크에 양극산화법을 통하여 다공성의 티타늄산화막표면을 얻은 후 불소를 처리하고 일정시간동안 Hank액에 침전을 시켰다. 양극산화를 통해 일정거칠기의 표면을 얻었으며 SEM과 XRD를 통하여 표면의 형상과 성분을 분석하였다. 생성된 표면은 빠른 표면 활성도를 보였으며, 적절한 거칠기와 좋은 골반응으로 골유착에 기여할 수 있을 것으로 여겨진다.

• 한국표면공학회지
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• 제41권3호
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• pp.88-93
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• 2008

Ir-Re thin films with Ti interlayer were deposited onto the tungsten carbide substrate by ion beam assisted DC magnetron sputtering. The Ir-Re films were prepared with targets of having two atomic percent of 7:3 and 5:5. The microstructure and surface analysis of the specimen were conducted by using SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Ir-Re thin film also were examined. The interlayer of pure titanium was formed with 100 nm thickness. The film growth of Ir-30at.%Re was faster than that of Ir-50at.%Re in the same deposition conditions. Ir-Re thin films consisted of dense and columnar structure irrespective of the different target compositions. The values of hardness and adhesion strength of Ir-30at.%Re thin film coated on WC substrate were higher than those of Ir-50at.%Re thin film.

• 멤브레인
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• 제17권3호
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• pp.244-253
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• 2007

광촉매 반응이 자연유기물에 의한 나노여과막의 오염에 미치는 영향을 살펴보았다. 광촉매 분해공정은 자연유기물의 분해와 변형에 효율적이었으며 이산화티타늄과 고정화 비드를 광촉매로 사용하였다. 광촉매적 특성을 비교하기 위하여 칼슘 이온 존재 시의 휴민산의 광분해를 모델 반응으로 설정하였다. 광분해 전에는 치밀한 막오염층이 형성되어 막오염을 가속화시킨 반면, 광분해 후에는 막오염이 크게 감소하였다.

• Membrane and Water Treatment
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• 제8권2호
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• pp.161-169
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• 2017

The adsorption of phosphate onto mesoporous $TiO_2$ was investigated in order to reduce phosphorus concentrations in wastewater and provide a potential mode of phosphorus recovery. Three equilibrium isotherms were used to optimize and properly describe phosphate adsorption ($R^2$>0.95). The maximum capacity of phosphate on the adsorbent was found to be 50.4 mg/g, which indicated that mesoporous $TiO_2$ could be an alternative to mesoporous $ZrO_2$ as an adsorbent. A pseudo-second order model was appropriately fitted with experimental data ($R^2$>0.93). Furthermore, the suitable pH for phosphate removal by $TiO_2$ was observed to be in the range of pH 3-7 in accordance with ion dissociation. In contrast, increasing the pH to produce more basic conditions noticeably disturbed the adsorption process. Moreover, the kinetics of the conducted temperature study revealed that phosphate adsorption onto the $TiO_2$ adsorbent is an exothermic process that could have spontaneously occurred and resulted in a higher randomness of the system. In this study, the maximum adsorption using real wastewater was observed at $30^{\circ}C$.