• 센서학회지
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• 제15권3호
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• pp.153-157
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• 2006

This paper presents the method for three-dimensional micro structure with photoresist spray coating system. The system consists of a high temperature rotational chuck, ultrasonic spray nozzle module, angle control module and nozzle moving module. Spray coating system is effected by several parameters such as the solid contents, the dispensed volume, the scanning speed of the spray nozzle and the wafer of dimension. The photoresist (AZ 1512) has been coated on the three-dimensional micro structure by spray coating system and the characteristics have been evaluated.

• 한국정밀공학회지
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• 제21권8호
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• pp.34-42
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• 2004

A new polishing technique for three dimensional micro/meso-scale parts is suggested using a micro quill and a magnetic chain structure. The principle of this method is to polish the target surface with the collected magnetic brushes at a micro tool by the non-uniform magnetic field generated around the tool. In a typical magnetic abrasive finishing process magnetic particles and abrasive particles are unbonded each other. But, to finish the three dimensional small parts bonded magnetic abrasive have to be used. Bonded magnetic abrasives are made from direct bonding, and their polishing characteristics are also examined. Alumina, silicon carbide and diamond micro powders are used as abrasives. Base metal matrix is carbonyl iron powder. It is found that bonded magnetic abrasives are superior to unbonded one by experiment. finally, the polished surface roughness is evaluated by atomic force microscope.

• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2005년도 추계학술대회 논문집
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• pp.99-102
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• 2005

This study was conducted for obtaining the optimized data to build the mixer or micro fluid device as measuring the three dimensions flow field in micro mixer. To acquire the rapid diffusion on the region of low Reynolds (Re < 100), the staggered herringbone mixer using chaotic advection was selected in this case. At first, by conducting the numerical analytical virtual experiment using CFD-ACE+, three dimensions flow field in the micro mixer was estimated As this flow field was proven using defocusing particle tracing method, the behavior of micro flow with three dimensional aspects could be analyzed. Numerical analysis and flow pattern in the micro mixer by experimental verification made to be able to analyze the chaotic advection. These can be important sources for building more optimized form. Verifying the information of three dimensional flow structure, these information can be used as the data for developing and improving the $\mu$ -TAS.

• 한국정밀공학회지
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• 제21권2호
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• pp.186-194
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• 2004

Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2002년도 학술대회지
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• pp.419-422
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• 2002

A three-dimensional inlet flow structure inside a microfluidic element has been investigated using a micro-PIV(particle image velocimetry) measurement as well as a numerical analysis. The present study employs a state-of-art micro-PIV system which consists of epi-fluorescence microscope, 620nm diameter fluorescent seed particles and an 8-bit megapixel CCD camera. For the numerical analysis, a commercial software CFD-ACE+(V6.6) was employed for comparison with experimental data. Fixed pressure boundary condition and a 39900 structured grid system was used for numerical analysis. Velocity vector fields with a resolution of $6.7{\times}6.7{\mu}m$ has been obtained, and the attention has been paid on the effect of varying measurement conditions of particle diameter and particle concentration on the resulting PIV results. In this study, the microfluidic elements were fabricated on plastic chips by means of MEMS processes and a subsequent melding process.

• Applied Microscopy
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• 제47권3호
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• pp.160-164
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• 2017

Electron crystallography has been used as the one of powerful tool for studying the structure of biological macromolecules at high resolution which is sufficient to provide details of intramolecular and intermolecular interactions at near-atomic level. Previously it commonly uses two-dimensional crystals that are periodic arrangement of biological molecules, however recent studies reported a novel technical approach to electron crystallography of three-dimensional crystals, called micro electron-diffraction (MicroED) which involves placing the irregular and small sized protein crystals in a transmission electron microscope to determine the atomic structure. In here, we review the advances in electron crystallography techniques with several recent studies. Furthermore, we discuss the future direction of this structural approach.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권1호
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• pp.45-49
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• 2006

A nano-stereolithography (NSL) process has been developed for the fabrication of three-dimensional (3D) micro-devices with high spatital resolution of approximately 100 nm. In the NSL process, a complicated 3D structure can be created by stacking layer-by-layer, so it does not require any sacrificial layer or any supporting structure. A laminated layer was fabricated by means of solidifying liquid-state monomers using two-photon absorption (TPA) which was induced by a femtosecond laser. When the fabrication of a 3D stacked structure was finished, unsolidified liquid resins were rinsed by ethanol to develop the fabricated structures; then, the polymerized structure was only left on the glass substrate. Through this work, several 3D microstructures such as a micro-channel, shell structures, and photonic crystals were fabricated to evaluate the possibility of the developed system.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.910-911
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• 2006

We newly designed and manufactured a new arranging system for a three-dimensional artificial crystal of monosized micro particles. In this system, a robotic micro-manipulator accurately locates the spherical particle onto the lattice point, and subsequently fiber lasers micro-weld the contact points between the neighboring particles. Actually, one- and two-dimensional arrays were constructed using monosized tin particles with the diameter of 400 m. Moreover, due to optimization of the process parameters, we successfully constructed the artificial crystals of simple cubic and diamond structures. In particular, the diamond structure which can represent a large photonic band gap is expected to progress toward a practical photonic crystal device.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.615-618
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• 2005

All over the world, many kinds of micro-actuators were already developed for various applications. The actuators are using various principles such as electromagnetic, piezoelectric and thermopneumatic etc. The most of the micro-actuators have been made using 2D based MEMS technology. In these actuators, it is difficult to drive 3-dimensional motion. This characteristic gives the limit of actuator application. However, micro-stereolithography technology has made it possible to fabricate freeform three-dimensional microstructures. In this technology, 2-dimensional micro-shape layer is cumulated on the other layers. This layer-by-layer process is the main principle to fabricate 3-dimensioal micro-structures. In this research, a micro-bellows actuator that is vertically moving was developed using the micro-stereolithography technology. When pressure was applied into the bellows, a non-contact actuating motion is generated. For actuation experiment, syringe pump and laser interferometer were used for applying pressure and measuring the displacement. Several hundreds micro-scale actuation was observed. And, to demonstrate the feasibility of proposed actuation principle, in this research, a micro-gripper was developed using half-bellows structure.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2000년도 특별강연 및 추계학술발표대회 개요집
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• pp.170-172
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• 2000

In this research, newly proposed heat source equations were calculated to predict micro distortion of small structure in laser welding and compared with experimental results which were measured using laser speckle metrology. A finite element code, ABAQUS is used for the heat transfer analysis with a three-dimensional plane assumption. The results suggest that weld distortion is varied according to the heat source of the. laser beam.