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Development of micro-stereolithography system for the fabrication of three-dimensional micro-structures  

이인환 (포항공과대학교 기계공학과)
조윤형 (현대자동차)
조동우 (포항공과대학교 기계공학과)
이응숙 (한국기계연구원)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.2, 2004 , pp. 186-194 More about this Journal
Abstract
Micro-stereolithography is a newly proposed technology as a means that can fabricate a 3D micro-structure of free form. It makes a 3D micro-structure by dividing the shape into many slices of relevant thickness along horizontal surfaces, hardening each layer of slice with a focused laser beam, and stacking them up to a desired shape. In this technology, differently from the conventional stereolithography, scale effect is dominant. To realize micro-stereolithography technology, we developed the micro-stereolithography apparatus which is composed of an Ar+ laser, x-y-z stages. controllers. optical devices and scan path generation software. Related processes were developed, too. Using the system, a number of micro-structures were successfully fabricated. Some of these samples are shown for prove this system. Laser scan path generation algorithm and software considering photopolymer solidification phenomena as well as given 3D model were developed. Sample fabrication of developed software shows relatively high dimensional accuracy compared to the uncompensated result.
Keywords
micro-stereolithography; photopolymer; UV laser; Optical system; x-y-z stage; 3D micro-structure; scan path;
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Times Cited By KSCI : 1  (Citation Analysis)
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