• 제목/요약/키워드: thin-sample

검색결과 715건 처리시간 0.032초

나노미터 크기의 미세구조물을 제작하기 위한 공정기술 개발 (Development of process technique of the alumina membrane with nano-sized pore array)

  • 이재홍;이병욱;김창교;이경호
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.1971-1973
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    • 2005
  • We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of $60{\sim}120nm$ was obtained by $40{\sim}80$ voltage. The pore widening process was employed for obtaining the flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano- structure.

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Cross-Sectional Transmission Electron Microscopy Sample Preparation of Soldering Joint Using Ultramicrotomy

  • Bae, Jee-Hwan;Kwon, Ye-Na;Yang, Cheol-Woong
    • Applied Microscopy
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    • 제46권3호
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    • pp.167-169
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    • 2016
  • Solder/electroless nickel immersion gold (ENIG) joint sample which is comprised of dissimilar materials with different mechanical properties has limited the level of success in preparing thin samples for transmission electron microscopy (TEM). This short technical note reports the operation parameters for ultramicrotomy of solder joint sample and TEM analysis results. The solder joint sample was successfully sliced to 50~70 nm thick lamellae at slicing speed of 0.8~1.2 mm/s using a boat-type $45^{\circ}$ diamond knife. Ultramicrotomy can be applied as a routine sample preparation technique for TEM analysis of solder joints.

초음파 Spectroscopy에 의한 두께측정을 위한 다중반사파의 시뮬레이션 (Computer Simulation of Multiple Reflection Waves for Thickness Measurement by Ultrasonic Spectroscopy)

  • 박익근;한응교;최만용
    • 비파괴검사학회지
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    • 제12권1호
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    • pp.9-15
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    • 1992
  • Ultrasonic spectroscopy is likely to become a very powerful NDE method for detection of microfects and thickness measurement of thin film below the limit of ultrasonic distance resolution in the opaque materials, provides a useful information that cannot be obtained by a conventional ultrasonic measuring system. In this paper, we considered a thin film below the limit of ultrasonic distance resolution sandwitched between two substances as acoustical analysis model, demonstrated the usefulness of ultrasonic spectroscopic analysis technique using information of ultrasonic frequency for measurements of thin film thickness, regardless of interference phenomenon and phase reversion of ultrasonic waveform. By using frequency intervals(${\triangle}f$) of periodic minima from the ratio of reference power spectrum of reflective waveform obtained a sample to power spectrum of multiple reflective waves obtained interference phenomenon caused by ultrasonic waves reflected at the upper and lower surfaces of a thin layer, can measured even dimensions of interest are smaller than the ultrasonic wave length with simplicity and accuracy.

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레이저 조사에 의한 Ag/As-Ge-Se-S 박막의 전기적 저항특성 (Electrical Resistance Characteristic of Ag/As-Ge-Se-S Thin film with Laser Irradiation)

  • 구용운;김진홍;구상모;정홍배
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.110-111
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    • 2006
  • In this paper, we investigated resistance characteristic of chalcogenide material for next generation ReRAM nonvolatile memory device with laser irradiation. A AES is used to test Ag doping ratio into a As-Ge-Se-S thin film. A sample resistance was observed in real time with He-Ne laser(632.8nm). As a result, resistance of thermal treated As-Ge-Se-S thin film was $500{\Omega}$ which is smaller than initial $1.3M{\Omega}$. A resistance of non-treated Ag/As-Ge-Se-S thin film was $200{\Omega}$ which is lower than $35M{\Omega}$.

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RF-Magnetron Sputtering에 의한 Bi-Sr-Ca-Cu-O 초전도 박막의 제조 (Fabrication and Bi-Sr-Ca-Cu-O Superconducting Thin Films by RF Magnetron Sputtering)

  • 홍철민;박현수
    • 한국세라믹학회지
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    • 제31권2호
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    • pp.227-233
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    • 1994
  • The Bi-Sr-Ca-Cu-O thin films were deposited by RF-magnetron sputtering method on Si(P-111) wafer without a buffer layer and annealed at various temperatures in oxygen atmosphere. The temperature dependence of electrical resistance, the microstructure of intermediate phase, and the surface morphology of films were examined by four probe method, XRD, and SEM, respectively. The chemical composition and the depth profile of the films were determined by ESCA spectra. Thin films annealed at $600^{\circ}C$ and $700^{\circ}C$ in oxygen atmosphere showed onset temperatures of 90 K and 85K, and Tc(zero) of 22K and 31K, respectively. The sample annealed at $700^{\circ}C$ had the highest volume fraction of superconducting phase and showed smooth microsturcture. In ESCA spectra, the thin films were homogeneous with depth.

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화학 반응에 의한 PbS 박막의 열기전력 특성 (Properties of Thermoelectric Power in PbS Thin Films by Chemical Bath Deposition)

  • 조종래;조정호;김강언;정수태
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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    • pp.21-24
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    • 2000
  • Properties of thermoelectric power in PbS thin films by chemical bath deposition were investigated The qualified PbS thin film was gained with the amounts of Thiourea($4-8ml/{\ell}$ ), Triethanolamine (1-2ml) and NaOH(l0ml). The molecular ratio of Pb and S was 3 : 7. Satisfied crystallization rate and deposition rate of PbS were greater at $50^{\circ}C$ than at $30^{\circ}C$. The constant of thermoelectric power in PbS was nearly $ 500uv/^{\circ}k$. The PbS thin film was changed from p-type to n-type semiconductor at around $200^{\circ}C$. In case of heat treatment at $300^{\circ}C$, the sample kept the characteristic of p-type semiconductors up to $250^{\circ}C$.

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금속유기분해 법으로 제조한 ZrTiO4 박막의 미세구조 및 고주파 유전특성 (Microstructure and Microwave Dielectric Properties of ZrTiO4 Thin Films Prepared by Metal-organic Decomposition)

  • 박창순;선호정
    • 한국전기전자재료학회논문지
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    • 제22권1호
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    • pp.53-60
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    • 2009
  • $ZrTiO_4$ dielectric thin films were coated by metal-organic decomposition, and annealed by rapid thermal processing up to $900^{\circ}C$ for their crytallization. Crystallized single-phase $ZrTiO_4$ thin films were fabricated above the annealing temperature of $800^{\circ}C$, but their grains were randomly oriented without specific textured orientation. Best dielectric properties were presented by the sample annealed at $800^{\circ}C$ which had crystalline structure and flat surface. Dielectric constant of the film was maintained at 32 throughout full frequency range up to 6 GHz, and dielectric loss was varied between 0.01 and 0.04.

Growth and Characteristics for $ZnGa_2Se_4$ thin film

  • Hong, Kwang-Joon;Lee, Sang-Youl
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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    • pp.136-137
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    • 2006
  • The stochiometric mix of evaporating materials for the $ZnGa_2Se_4$ single crystal thin films were prepared from horizental furnace. To obtains the single crystal thin films, $ZnGa_2Se_4$ mixed crystal were deposited on throughly etched Si(100) by the Hot Wall Epitaxy (HWE) system. The temperates of the source and the substrate were $590^{\circ}C$ and $450^{\circ}C$, respectively. The crystalline structure of single crystal thin films was investigated by the double crystal X-ray diffraction(DCXD). Hall effect on this sample was measured by the method of van der Pauw and studied on carrier density and mobility dependence on temperature.

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Radiation heat exchange 방법을 이용한 금속박막의 열전도도 측정 (Thermal conductivity measurement of thin metallic films using radiation heat exchange method)

  • 류상;김영만;정우남
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2007년도 춘계학술발표회 초록집
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    • pp.111-113
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    • 2007
  • Thermal conductivities of copper thin films on silicon wafer was obtained from temperature distribution on the surface of wafer measured by radiation thermometry, when sample was heated with constant temperature ate the both ends in a vacuum and dissipate heat by radiation heat transfer into an environment.

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Deducing thick plate solutions from classical thin plate solutions

  • Wang, C.M.
    • Structural Engineering and Mechanics
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    • 제11권1호
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    • pp.89-104
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    • 2001
  • This paper reviews the author's work on the development of relationships between solutions of the Kirchhoff (classical thin) plate theory and the Mindlin (first order shear deformation) thick plate theory. The relationships for deflections, stress-resultants, buckling loads and natural frequencies enable one to obtain the Mindlin plate solutions from the well-known Kirchhoff plate solutions for the same problem without much tedious mathematics. Sample thick plate solutions, deduced from the relationships, are presented as benchmark solutions for researchers to use in checking their numerical thick plate solutions.