• Title/Summary/Keyword: thermal probe

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Microstructure Evaluation of Nano-thick Au-inserted Nickel Silicides (나노급 Au층 삽입 니켈실리사이드의 미세구조 변화)

  • Yoon, Ki-Jeong;Song, Oh-Sung
    • Korean Journal of Materials Research
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    • v.18 no.1
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    • pp.5-11
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    • 2008
  • Thermally evaporated 10 nm-Ni/1 nm-Au/(30 nm-poly)Si structures were fabricated in order to investigate the thermal stability of Au-inserted nickel silicide. The silicide samples underwent rapid thermal annealing at $300{\sim}1100^{\circ}C$ for 40 seconds. The sheet resistance was measured using a four-point probe. A scanning electron microscope and a transmission electron microscope were used to determine the cross-sectional structure and surface image. High-resolution X-ray diffraction and a scanning probe microscope were employed for the phase and surface roughness. According to sheet resistance and XRD analyses, nickel silicide with Au had no effect on widening the NiSi stabilization temperature region. Au-inserted nickel silicide on a single crystal silicon substrate showed nano-dots due to the preferred growth and a self-arranged agglomerate nano phase due to agglomeration. It was possible to tune the characteristic size of the agglomerate phase with silicidation temperatures. The nano-thick Au-insertion was shown to lead to self-arranged microstructures of nickel silicide.

A Theoretical Study for the Thermal Diffusivity Measurement of Semi-Infinite Solid Using Photothermal Displacement Method (광열변위법을 이용한 반무한 고체의 열확산계수 결정에 대한 이론적 연구)

  • Jeon, Pil-Soo;Lee, Kwang-Jai;Yoo, Jai-Suk;Park, Young-Moo;Lee, Jong-Hwa
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.26 no.12
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    • pp.1747-1755
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    • 2002
  • A complete theoretical treatment of the photothermal displacement technique has been performed for thermal diffusivity measurement in semi-infinite solid materials. The influence of the parameters, such as radius and modulation frequency of the heating beam and the thermal diffusivity, was studied. Usually, thermal diffusivity was determined by the deformation angle and phase angle as the relative position between the heating and probe beams. In this study, we proposed the simple analysis method based on the real part of deformation gradient as the relative position between two beams. It is independent in the parameters such as power of heating beam, absorption coefficient, reflectivity, Poisson's ratio, and thermal expansion coefficient.

Non-Destructive Evaluation of Material Properties of Nanoscale Thin-Films Using Ultrafast Optical Pump-Probe Methods

  • Kim, Yun-Young;Krishnaswamy, Sridhar
    • Journal of the Korean Society for Nondestructive Testing
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    • v.32 no.2
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    • pp.115-121
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    • 2012
  • Exploration in microelectromechanical systems(MEMS) and nanotechnology requires evaluation techniques suitable for sub-micron length scale so that thermal and mechanical properties of novel materials can be investigated for optimal design of miro/nanostructures. The ultrafast optical pump-probe technique provides a contact-free and non-destructive way to characterize nanoscale thin-films, and its ultrahigh temporal resolution enables the study of heat-transport phenomena down to a sub-picosecond regime. This paper reviews the principle of optical pump-probe technique and introduces its application to the area of micro/nano-NDE.

Contact Probing Technique for Profile Measurement of Aspheric Lenses (비구면 렌즈의 형상 측정을 위한 접촉식 프로브 기술 개발)

  • 유승봉;장인철;김승우
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.603-606
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    • 2000
  • This dissertation is concerned with ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a leaf spring mechanism and a capacitive-type sensor. The contact probe is attached on the z-axis during measurement while aspheric objects are supported on an precision xy-stage whose lateral motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed in this investigation is capable of providing a repeatability of 50 nanometers with a $\pm$3$\sigma$ uncertainty of 300 nanometers. Thermal disturbance is found the most significant factor that should be precisely controlled for accurate measurement.

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Plasma Uniformity Analysis of Inductively Coupled Plasma Assisted Magnetron Sputtering by a 2D Voltage Probe Array

  • Joo, Junghoon
    • Applied Science and Convergence Technology
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    • v.23 no.4
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    • pp.161-168
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    • 2014
  • A real-time monitoring of immersed antenna type inductively coupled plasma (ICP) was done with a homemade 2 dimensional voltage probe array to check the uniformity of the plasma. Measured voltage values with a high impedance voltmeter are close to the floating potential of the plasma. As the substrate carrier was moving into a magnetron sputtering plasma diffusive from a $125mm{\times}625mm$ size cathode, measured results showed reliably separation of plasma into the upper and lower empty space over the carrier. Infra red thermal imaging camera was used to observe the cross corner effect in situ without eroding a target to the end of the usage. 3 dimensional particle trace model was used to analyze the magnetron discharge's behavior.

A Theoretical Study for the Thermal Conductivity Measurement of Anisotropic Material using Photothermal Deflection Spectroscopy (광열편향법을 이용한 이방성 재료의 열전도계수 측정에 관한 이론적 연구)

  • Jeon, Pil-Soo;Yoo, Jai-Suk;Kim, Hyun-Jung
    • Proceedings of the KSME Conference
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    • 2007.05b
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    • pp.2465-2470
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    • 2007
  • We have analyzed the three-dimensional thermal conduction in anisotropic materials using nonsymmetric-Fourier transforms. And a complete theoretical treatment of the photothermal deflection spectroscopy has been performed for thermal conductivity measurement in anisotropic medium. Thermal conductivity tensor was determined by the deflection angle and phase angle with the relative position between the heating and probe beams. The influence of the parameters, such as modulation frequency of the heating beam, the thermal conductivity tensor, was investigated.

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A study on the OMM error compensation considering the thermally induced errors (열변형 오차를 고려한 기상측정 오차 보정에 관한 연구)

  • 박규백;송길홍;조명우;권혁동;서태일
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.399-404
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    • 2002
  • Improvement of measuring accuracy is an essential part of quality control manufacturing process. The OMM is less than the CMM in measure accuracy but the OMM system is more efficient, easier to use than other measurement system. About 40~70% of the machine tool errors are induced by the thermal errors. Therefore, a key requirement for improving the measuring accuracy is to reduce the geometric and thermal errors. Thermal errors are measured by a ball bar system and predicted by the thermal error modeling. Furthermore, using the pre-defined thermal error map approach compensates the geometric accuracy of the OMM. Appropriate experiments are performed using ball-bar system, temperature measuring devices and touch-type probe. Compensated results are compared with those obtained using CMM to verify the proposed methods.

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A study on the identification of the weld defects and hydrogen embrittlement in heat affected zone of AISI 5160 spring steel using thermal analysis technique (열분석 방법을 이용한 AISI 5160스프링강의 용접시 Heat Affected Zone에서의 결합규명과 수소취성에 관한 연구)

  • 김민태;이재영
    • Journal of Welding and Joining
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    • v.5 no.1
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    • pp.34-41
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    • 1987
  • To explore the possible application of thermal analysis technique as a probe for finding weld defects, Hydrogen trapping phenomena in Heat Affected Zone (HAZ) of the AISI 5160 spring steel were investigated. HAZ was divided into five parts, which were used as thermal analysis specimens. Two types of trap sites were found in HAZ, ferrite/cementin interface and microvoid. The thermal analysis peak due to the ferrite/cementite interface increased its height toward the weld deposit. The thermal analysis peak due to the microvoid was the highest where the grain size was the smallest. The correspondence between the cold cracking and hydrogen trap nature is also discussed.

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Thermal Conductivity of Petiole Tissue of Chinese Cabbage (배추줄기의 열전도도에 관한 연구)

  • Kim, Ju-Bong;Lee, Dong-Sun;Choi, Dong-Won;Pyun, Yu-Ryang
    • Korean Journal of Food Science and Technology
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    • v.23 no.3
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    • pp.325-329
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    • 1991
  • Changes in thermal conductivity of petiole tissue of Chinese cabbage during steam heating and salting were measured by probe method. The thermal conductivity($k_e,\;W/m{\cdot}K$) of the tissue decreased with the increase in gas content and the decrease in moisture content. The correlating equation. $k_e=0.0192$ MC-0.6284 $V_a-1.3252$, obtained over the range of moisture content(MC) of 92 to 96% and gas content($V_a$) of 0 to 0.15 ml/g cabbage at $30^{\circ}C$ The thermal conductivity of salted cabbage was about $0.04\;W/m{\cdot} K$ higher than that of raw cabbage at the same moisture content.

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Numerical Discussion on Natural Convection in Soils (지반내 자연대류에 대한 수치해석적 논의)

  • Shin, Hosung
    • Journal of the Korean Geotechnical Society
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    • v.33 no.2
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    • pp.35-47
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    • 2017
  • Thermal behavior of soils is mainly focused on thermal conduction, and the study of natural convection is very limited. Increase of soil temperature causes natural convection due to buoyancy from density change of pore water. The limitations of the analysis using fluid dynamics for natural convection in the porous media is discussed and a new numerical analysis is presented for natural convection in porous media using THM governing equations fully coupled in the macroscopic view. Numerical experiments for thermal probe show increase in the uncertainty of thermal conductivity estimated without considering natural convection, and suggest appropriate experimental procedures to minimize errors between analytical model and numerical results. Burial of submarine power cable should not exceed the temperature changes of $2^{\circ}C$ at the depth of 0.2 m under the seabed, but numerical analysis for high permeable ground exceeds this criterion. Temperature and THM properties of the seafloor are important design factors for the burial of power cable, and in this case effects of natural convection should be considered. Especially, in the presence of heat sources in soils with high permeability, natural convection due to the variation of density of pore water should be considered as an important heat transfer mechanism.