• KSTLE International Journal
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• v.5 no.1
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• pp.32-35
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• 2004

The purpose of this study is to investigate the effects of the structure and mechanical properties of laser-processed pads on their polishing behavior such as their removal rate and WIWNU (within wafer non-uniformity) during the chemical mechanical planarization (CMP) process. The holes on the pad acted as the reservoir of slurry particles and enhanced the removal rate. Without grooves, no effective removal of wafers was possible. When the length of the circular-type grooves was increased, higher removal rates and lower wafer non-uniformity were measured. The removal rate and non-uniformity linearly increased as the elastic modulus of the top pad increased. Higher removal rates and lower non-uniformity were measured as the hardness of the pad increased.

• Journal of the Korean Society of Safety
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• v.19 no.3 s.67
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• pp.40-44
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• 2004

To the removal of hardness materials, we've test the absorptive capacity of main material $Mg^{2+},\;Ca^{2+}$ on the using the activated carbon powder saturated in 0.1M Nitrilotriacetic acid by experimental methods. The absorptive properties of $Ca^{2+}\;and\;Mg^{2+}$ were measured with absorbent quantity and contact time., and investigated the physical properties of overall rate constant and adsorption constant adsorption isotherm, and Langmuir and Freundlich constant. In case of k' adsorption rate constants of $Ca^{2+},\;Mg^{2+}$, was 0.00299, 0.00529 by Bhattahary and Venkobachar equation. $k_{aa}$ was 0.00373, 0.00640 according with adsorption rate constants of Lagergren.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1227-1235
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• 2013

Ceramic materials are classified by oxide, nitride and carbide material and have high brittleness, strength and hardness. Ceramic materials are strong in compression but weak in shearing and tension. This review paper has focused on technology trends and mechanism analysis of ceramics removal machining. The ceramic materials have superior mechanical, physical and chemical properties, but it is very hard to machining and the use of ceramics has been limited because of high strength and brittleness. In this paper, technology trends of ceramic removal-machining was introduced for types of machining technology, abrasive machining, cutting process, laser machining and so on.

• The Journal of Korean Academy of Prosthodontics
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• v.33 no.3
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• pp.569-583
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• 1995

Disinfection of dental impressions are necessary due to contamination with patient’s saliva and blood, which is a potential for cross-infection. The purpose of this study was to evaluate the effects of disinfection of four hydrophilic rubber impression materials with three disinfecting solutions, on the dimensional stability and surface hardness of improved stone casts. Three hydrophilic vinyl polysiloxane impression materials(Express, Reprosil, Exafine) and one polyether impression material(Impregum-F) were mixed according to the manufacturer’s directions and impressions were made on a ADA specification No. 19 stainless-steeldie. On removal of the impressions, each impression was immersed in one of the disinfectants(Banicide, Potadine, Clorox) for 10 minutes. After disinfection, type IV improved stone. casts were poured. On this cast, the linear dimension and surface hardness were measuredusing a Measurescope(Nikon, Japan) and a Barcol hardness tester(Barber, Colman Co U. S. A). The results were as follows : 1. The improved stone casts from disinfected Reprosil and Impregum-F impression material did not show dimensional changes(P>0.01). Those from disinfected Express and Exafine impression material showed dimensional changes(P<0.01). The amount of shrinkage was not clinically significant. 2. The improved stone casts from disinfected Express impression material did not exhibit changes in surface hardness(P>0.01), but those from disinfected Reprosil, Exafine, Imp regnum-F impression material showed changes in surface hardness(P<0.01). 3. The dimensinal stability and surface hardness of the improved stone casts were satisfactory using Banicide on Express, all disinfectants used in this study on Reprosil, Potadin and Clorox on Exafine, Banicide and Clorox on Impregum-F. According to these results, immersion disinfection of hydrophilic rubber impression mate rials did not adversely affect the resultant casts. Nevertheless compatibility tests of impression materials and disinfectants should be done when disinfecting impressions.

• Tribology and Lubricants
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• v.37 no.6
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• pp.208-212
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• 2021

Chemical mechanical polishing (CMP) is a key technology used for the global planarization of thin films in semiconductor production and smoothing the surface of substrate materials. CMP is a type of hybrid process using a material removal mechanism that forms a chemically reacted layer on the surface of a material owing to chemical elements included in a slurry and mechanically removes the chemically reacted layer using abrasive particles. Sapphire is known as a material that requires considerable time to remove materials through CMP owing to its high hardness and chemical stability. This study introduces a technology using electrolytic ionization and ultraviolet (UV) light in sapphire CMP and compares it with the existing CMP method from the perspective of the material removal rate (MRR). The technology proposed in the study experimentally confirms that the MRR of sapphire CMP can be increased by approximately 29.9, which is judged as a result of the generation of hydroxyl radicals (·OH) in the slurry. In the future, studies from various perspectives, such as the material removal mechanism and surface chemical reaction analysis of CMP technology using electrolytic ionization and UV, are required, and a tribological approach is also required to understand the mechanical removal of chemically reacted layers.

• Tribology and Lubricants
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• v.38 no.6
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• pp.247-254
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• 2022

Chemical mechanical polishing (CMP) is a hybrid surface-polishing process that utilizes both mechanical and chemical energy. However, the recently emerging semiconductor substrate and thin film materials are challenging to process using the existing CMP. Therefore, previous researchers have conducted studies to increase the material removal rate (MRR) of CMP. Most materials studied to improve MRR have high hardness and chemical stability. Methods for enhancing the material removal efficiency of CMP include additional provision of electric, thermal, light, mechanical, and chemical energies. This study aims to introduce research trends on CMP using ultraviolet (UV) light to these methods to improve the material removal efficiency of CMP. This method, photocatalysis-assisted chemical mechanical polishing (PCMP), utilizes photocatalytic oxidation using UV light. In this study, the target materials of the PCMP application include SiC, GaN, GaAs, and Ru. This study explains the photocatalytic reaction, which is the basic principle of PCMP, and reviews studies on PCMP according to materials. Additionally, the researchers classified the PCMP system used in existing studies and presented the course for further investigation of PCMP. This study aims to aid in understanding PCMP and set the direction of future research. Lastly, since there have not been many studies on the tribology characteristics in PCMP, research on this is expected to be required.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.100-108
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• 2004

Contamination of environment induces the shortage of drinkables. In this trend, the leakage of water that occurs by breakage or erosion of rubber valve seats is serious problem. Rubber is apt to cause breakage between two materials when they contact with each other. The possible way to avoid leakage of water by damage and breakdown of rubber is to replace that with metal. Because of this reason, nowadays, rubber is being substituted with metal as valve seat materials for water works. In tribology, a severe from of wear is characterized by local, macroscopic material transfer, removal, or formation of surface protrusions when two solid surfaces experience relative sliding under load. One of the major problems in sliding of metals is galling due to bad surface quality. Experimentally, there are various elements which influence on incipient galling, such as hardness, surface roughness, temperature, load, velocity and external environments. This paper is aimed at verifying the galling tendencies according to hardness, surface roughness, load and velocity and showing how much effect the factors have on the galling tendencies.

• Journal of Powder Materials
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• v.15 no.5
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• pp.359-364
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• 2008

To satisfy the demand of higher cutting performance, mechanical properties with tungsten carbide (WC-Co) tool materials were investigated. Hardness and transverse rupture strength with WC grain size, Co content and density were measured. Compared to H, K, and S manufacture maker as tungsten carbide (WC-Co) tool materials were used for high-speed machining of end-milling operation. The three tungsten carbide (WC-Co) tool materials were evaluated by cutting of STD 11 cold-worked die steel (HRC25) under high-speed cutting condition. Also, tool life was obtained from measuring flank wear by CCD wear measuring system. Tool dynamometer was used to measure cutting force. The cutting force and tool wear are discussed along with tool material characteristics. Consequently, the end-mill of K, H manufacture maker showed higher wear-resistance due to its higher hardness, while the S maker endmill tool showed better performance for high metal removal.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.1
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• pp.46-51
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• 2007

Environmental contamination creates shortages of potable water. In such situations, the leakage of water due to breakage or aging of rubber valve seats is a serious problem. Rubber is apt to break when it is placed between two materials that contact each other. One way to avoid water leakage due to rubber damage and breakdown is to replace the rubber with metal, which is currently taking place in water distribution systems. In tribology, a severe form of wear is characterized by local macroscopic material transfer or removal, or by problems with sliding protrusions when two solid surfaces experience relative sliding under load. One of the major problems when metal slides is the occurrence of galling. Experimentally, various conditions influence incipient galling, such as hardness, surface roughness, temperature, load, velocity, and the external environment. This study sought to verify the galling tendencies of metal according to its hardness, surface roughness, load, and sliding velocity, and determine the quantitative effect of each factor on the galling tendencies.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.35-42
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• 2004

At the large-sized mold fer injection molding, the remaining gas in the mold causes some problems with final products. In order to solve these problems, air-bent was drilled on the surface of mold. However, this method leaves the scar on the surface of a product. Therefore, porous material was developed to the removal of remaining gas in this study. Porcerax II, which is a commercialized porous material, were developed in USA. It requires the electric discharge machining(EDM) process to make pores on the surface of the materials. The electric discharge machining (EDM) process, however, cause the increase of the time and cost for the fabrication of the mold. In this study, high speed machining(HSM) process was applied to the fabrication of porous mold without electric discharge machining(EDM) process. Some characteristics of the developed materials machined by high speed machining(HSM) and electric discharge machining(EDM) including air-permeability and porosity were compared with those of Porcerax II. Besides, in order to be applied to the molding process, hardness and tensile ＆ yield strength were compared between Porcerax II and developed materials.