• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.1
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• pp.363-366
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• 2005

A micro flow sensor on silicon substrate allows the fabrication of small components where many different functions can be integrated so that the functionality of the sensors can be increased. Further more, due to the small size of the elements the sensors can be quite fast. A thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. In normal, a mass flow sensor is composed of a central heater and a pair of temperature sensing elements around the heater. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensors and a central heater was proposed and numerically simulated by the Finite difference formulation to confirm the feasibility of the flow sensor structure.

• Journal of Sensor Science and Technology
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• v.22 no.6
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• pp.415-420
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• 2013

Calibration capabilities for thermometer calibration by comparison method were assessed using high-precision industrial platinum resistance thermometers (IPRT). It was found in the performance assessment that out of 31 laboratories who participated, 28 laboratories resulted magnitude of En number less than 1 at every calibration points they submitted results in the range from 50 to $500^{\circ}C$. The results of about 75% of the laboratories showed the difference from the assigned values less than 1/10 of the tolerance level of the class B IPRT. This indicates that the participating calibration laboratories performed with satisfactory level that was enough to calibrate IPRTs to significant precision. The sensors used in this work were manufactured and chosen by the criteria of long-term instability less than 4 mK and hysteresis less than 8 mK in the temperature range used in this work. Furthermore, the change in the resistance of the sensors in the calibration temperature range were less than the uncertainty of the calibration, 25 mK (k=2).

• Proceedings of the Korea Concrete Institute Conference
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• 2009.05a
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• pp.553-554
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• 2009

This paper introduces the new measuring method for the water level and the scour. The method measures temperature between water and ground by temperature sensors. It analyzes the change of temperature. It estimates the water level and the ground level, and calculates the scour. If the temperature sensors installed until the top of the pier, it can measure the water level.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.274-274
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• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.05a
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• pp.563-567
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• 2004

In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128$^{\circ}$ YX-LiNbO$_3$ Substrate. The frequency responses of SAW sensors on the temperature change are compared. To measure the change of center frequency, two center frequencies on the 3dB and 20dB are measured and compared. Since the center frequency on the temperature change from -30$^{\circ}C$ to 80$^{\circ}C$ is linearly changed, the SAW sensor is applicable to the temperature sensor.

• Proceedings of the KIEE Conference
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• 1998.07b
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• pp.766-768
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• 1998

Optical Temperature Distribution measurement System (OTDS) is completely different from conventional electric point sensor in that it uses the optical fiber itself as the sensor. This new concept in temperature measuring system requires only one fiber to be laid. The use of optical fiber also gives the advantage of small diameter, light weight, explosion resistance, and electromagnetic noise resistance. The OTDS is a sensor which is capable of making a precise measurement over a wide range of areas using only a single optical fiber. Since current temperature sensors, such as the thermocouple, are only used to measure temperaturea of point, they are almost impractical for measuring a wider range because of the extremely high cost. In comparision with current sensors, the optical fiber distributed temperature sensor can make much quicker and more precise measurements at a comparatively low cost.

• ETRI Journal
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• v.38 no.3
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• pp.551-559
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• 2016

In this paper, we propose a hybrid sensor calibration scheme for mobile crowdsensing applications. As the number of newly produced mobile devices containing embedded sensors continues to rise, the potential to use mobile devices as a sensor data source increases. However, because mobile device sensors are generally of a lower performance and cost than dedicated sensors, sensor calibration is crucial. To enable more accurate measurements of natural phenomena through the use of mobile device sensors, we propose a hybrid sensor calibration scheme for such sensors; the scheme makes use of mobile device sensors and existing sensing infrastructure, such as weather stations, to obtain dense data. Simulation results show that the proposed scheme supports low mean square errors. As a practical application of our proposed scheme, we built a temperature map of a city using six mobile phone sensors and six reference sensors. Thanks to the mobility of the sensors and the proposed scheme, our map presents more detailed information than infrastructure-based measurements.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.16 no.12
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• pp.8306-8313
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• 2015

Open-type current sensors have been commonly used for DC motor controller, AC variable controller and Uninterruptible Power Supply. Recently they have begun to be used more widely, as the growth of renewable energy and smart-grid in power system. Considering most of the open-type current sensors are imported, developing the core technology needed to produce open-type current sensors is required. This paper describes the development and test results of open-type current sensors. Design of C type magnetic core, selection and test of a Hall sensor, design of current source circuit and signal conditioning circuit are described. 100A class DIP(Dual In-line Package) type and SMD(Surface Mount Devide) type open-type current sensors was made and tested. Test results show that the developed open-type current sensor satisfies the accuracy requirement of 2% and linearity requirement of 2% at 100 A of DC and AC current of 60Hz. Temperature compensation was carried out by using a temperature compensation circuit with NTC(Negative Temperature Coefficient) thermistor and the effect of the temperature compensation are described.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.1
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• pp.87-93
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• 2013

The selection of the temperature sensor in a cryogenic system depends on the temperature range, shape, and accuracy. An accurate temperature sensor is essential for improving the reliability of an experiment. We have developed a calibration system for cryogenic temperature sensors using a two-stage cryocooler. To reduce the heat load, a thermal shield is installed at the first stage with multiple layer insulation (MLI). We have also developed a sensor holder for calibrating more than 20 sensors simultaneously in order to save time and reduce costs. This system can calibrate sensors at variable temperatures via temperature control using a heater. In this paper, we present the design and fabrication of the temperature sensor calibration system and a representative experimental result.

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.109-110
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• 2006

In bio applications, high temperature coefficient of resistance (TCR) at $30^{\circ}C{\sim}40^{\circ}C$ is especially important for a temperature sensor. In this work, single phase-vanadium dioxide ($VO_2$) thin films for temperature sensor were fabricated by reactive DC magnetron sputtering and post-annealing method. VOx thin films deposited by reactive sputtering in a controlled $Ar/O_2$ atmosphere can be transformed into single phase-$VO_2$ films by post-annealing in $N_2$ atmosphere. The grown $VO_2$ thin films have a moderate resistance at room temperature and very high TCR at room temperature and transition temperature, respectively 2.88%/K and 15.8%/K. A detailed structural characterization is performed by SEM, XRD and RBS. SEM morphology image indicates that grains of fabricated $VO_2$films are homogeneous and ball-like in shape. A fact that the films contain only single phase-$VO_2$ is obtained by XRD and RBS analysis. After deposition, the sensors were fabricated by micromachining technology. Silicon nitride membrane and black nickel were used for a thermal isolation structure and absorption layer. In the vicinity of room temperature, the TCR of sensors was enough high to apply for bio sensors.