Proceedings of the Korean Society for Noise and Vibration Engineering Conference (한국소음진동공학회:학술대회논문집)
- 2004.05a
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- Pages.563-567
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- 2004
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- 1598-2548(pISSN)
A study on the Fabrication and Characteristics of SAW Temperature Sensor using piezoelectric material
압전재료를 이용한 SAW 온도센서의 제작 및 특성에 대한 연구
Abstract
In this paper, a remote temperature sensor based on surface acoustic wave is introduced and the issues on design, manufacturing, and test of the sensor are addressed. SAW sensors having single and double electrode are prepared on the 128
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