• Title/Summary/Keyword: target mobility

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Electrical mechanism analysis of $Al_2O_3$ doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering (원통형 타겟 형태의 DC 마그네트론 스퍼터링을 이용한 산화 아연 박막의 전기적 기제에 대한 분석)

  • Jang, Juyeon;Park, Hyeongsik;Ahn, Sihyun;Jo, Jaehyun;Jang, Kyungsoo;Yi, Junsin
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.11a
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    • pp.55.1-55.1
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    • 2010
  • Cost efficient and large area deposition of superior quality $Al_2O_3$ doped zinc oxide (AZO) films is instrumental in many of its applications including solar cell fabrication due to its numerous advantages over ITO films. In this study, AZO films were prepared by a highly efficient rotating cylindrical dc magnetron sputtering system using AZO target, which has a target material utilization above 80%, on glass substrates in argon ambient. A detailed analysis on the electrical, optical and structural characteristics of AZO thin films was carried out for solar cell application. The properties of films were found to critically depend on deposition parameters such as sputtering power, substrate temperature, working pressure, and thickness of the films. A low resistivity of ${\sim}5.5{\times}10-4{\Omega}-cm$ was obtained for films deposited at 2kW, keeping the pressure and substrate temperature constant at 3 mtorr and $230^{\circ}C$ respectively, mainly due to an increase in carrier mobility and large grain size which would reduce the grain boundary scattering. The increase in carrier mobility with power can be attributed to the columnar growth of AZO film with (002) preferred orientation as revealed by XRD analysis. The AZO films showed a high transparency of>87% in the visible wavelength region irrespective of deposition conditions. Our results offers a cost-efficient AZO film deposition method which can fabricate films with significant low resistivity and high transmittance that can find application in thin-film solar cells.

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증착 온도를 변화시켜 DC magnetron sputter로 증착한 Ga-doped ZnO 박막의 특성

  • Park, Ji-Hyeon;Sin, Beom-Gi;Lee, Min-Jeong;Lee, Tae-Il;Myeong, Jae-Min
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.10a
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    • pp.41.2-41.2
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    • 2011
  • Display 산업의 확대로 인해 광학적 특성 및 전기적 특성이 우수한 TCO (Transparent conductive oxide) 연구가 활발히 진행되고 있다. 기존에는 ITO가 대부분의 분야에서 이용되었지만 In의 경제적인 단점으로 인해 새로운 대체물로써 ZnO가 떠오르고 있다. ZnO는 전형적인 n-type 반도체이며, wide band gap 물질로써 Al, Ga, B과 같은 3 족 원소를 doping 함으로써 광학적 및 전기적 특성을 향상시킬 수 있다. 최근에는 ZnO의 이온반경과 비슷한 Ga을 도핑한 Ga-doped ZnO 박막에 대한 연구가 활발히 진행되고 있다. 이는 ZnO에 Ga을 도핑함으로써 격자결함을 최소화 시키고 carrier concentration 및 hall mobility를 향상시켜 전기전도도의 향상을 이루기 때문이다. 본 연구에서는 $Ga_2O_3$이 3wt% doping 된 ZnO rotating cylindrical target 을 DC magnetron sputtering 을 이용하여 2 kW의 파워와 70 kHz의 주파수를 고정하고, 증착 온도를 변화시켜 유리 기판 위에 Ga-doped ZnO 박막을 증착 하였다. 증착 시 온도가 Ga-doped ZnO 박막에 미치는 영향을 관찰하기 위해 박막 표면의 조성을 분석하였고, 결정성 및 전기적 특성의 변화를 통해 박막의 특성을 비교 평가하였다. Ga-doped ZnO 박막의 표면과 두께는 SEM (Scanning electron microscope) 분석을 통해 관찰하였고, XRD (X-ray diffractometer) 를 이용하여 결정학적 특성을 확인하였다. 또한 Van der Pauw 방법을 이용한 hall 측정을 통해 resistivity, carrier concentration, hall mobility를 분석하였고, UV-Vis를 이용하여 박막의 투과율을 분석하였으며, 이를 토대로 투명 전도막으로써 Ga-doped ZnO 박막의 응용 가능성을 평가하였다.

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Remote control of individual modules based on mobile phone and web (모바일 폰과 웹을 연동한 개별모듈 원격제어)

  • Park, Sang-Gug
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.15 no.4
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    • pp.780-788
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    • 2011
  • This paper suggests one model, which can be monitor and control target system at anytime and anywhere by a WAP and ME based personal cellular phone(Feature phone) and internet connection. The suggesting model tried to overcome constraints of distance and mobility of conventional methods, TCP/IP based remote data monitoring system, which combine PDA and WLAN technologies. For the experiments of suggesting model, the target systems are constructed with individual modules, which need AC or DC power control. The development software for the control and monitor of local system use NI Labview for the easy-programming and confidence. Also, web server use APM setup for the general user. The mobile connection environments of personal cellular phone are programmed by use WML and mHTML language for the general access. Through the experiments, we have showed that suggesting model can overcome constraints of distance and mobility of conventional system.

Studies on Preconcentration and Electrophoretic Mobility of Fluorescent Dyes Depending on Flow Velocity and Concentration in the Electromembrane System (전기막 시스템에서 유속과 농도에 따른 형광염료의 농축 및 전기영동 이동도에 관한 연구)

  • Minsung, Kim;Bumjoo, Kim
    • Applied Chemistry for Engineering
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    • v.34 no.1
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    • pp.45-50
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    • 2023
  • Microfluidic preconcentration technologies, which collect or extract low-abundance analytes in a specific location, have been spotlighted in various applications such as medical and bio-engineering. Here, we conducted extensive studies on the variables to be considered when concentrating target samples based on electrophoresis in an electromembrane system utilizing an ion exchange membrane. Using negatively charged Alexa Fluor 488 and positively charged Rhodamine 6G as fluorescent dyes, we examined the effects of flow velocity of the main channel, channel electrolyte concentration, and applied voltage on sample preconcentration. As a result, it was found that the preconcentration of the target sample occurs much better when the flow velocity is slow and the concentration of the main channel containing the sample is high, given that the channel concentration ratio (main and buffer) is constant. In addition, based on the experimental data acquired in this study, the electrophoretic mobility values of Alexa Fluor 488 and Rhodamine 6G were experimentally calculated and compared.

A Study on the High Quality and Low Cost Fabrication Technology of ZnO Thin Films for Solar Cell Applications (태양전지 응용을 위한 고품위 및 저가격 ZnO 박막 제조에 관한 연구)

  • Lee, Jae-Hyeong
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.14 no.1
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    • pp.191-196
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    • 2010
  • Aluminum doped zinc oxide (AZO) films have been prepared on Coming 7059 glass substrates by r.f. magnetron sputtering method. A powder target instead of a conventional sintered ceramic target was used in order to improve the utilization efficiency of the target and reduce the cost of the film deposition process. The influence of sputter pressure on the structural, electrical, and optical properties of AZO films were studied. The AZO films had hexagonal wurtzite structure with a preferred c-axis orientation, regardless of sputter pressure and target types. The crystallinity and degree of orientation was increased by increasing the sputter pressure. For higher sputtering pressures, a reduction of the resistivity was observed due to a increase on the mobility and the carrier concentration. The lowest resistivity of $6.5{\times}10^{-3}\;{\Omega}-cm$ and the average transmittance of 80% can be obtained for films deposited at 15 mTorr.

The Mechanism of Proxy Mobile IPv4 to Minimize the Latency of Handover Using MIH Services (MIH 서비스를 활용한 Proxy Mobile IPv4의 핸드오버 지연 최소화 방안)

  • Kim, Sung-Jin;You, Heung-Ryeol;Rhee, Seuck-Ho
    • 한국정보통신설비학회:학술대회논문집
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    • 2008.08a
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    • pp.211-217
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    • 2008
  • Recently, there are many efforts to support seamless mobility in 802.11 WLANs using IP Layer mobility protocols. The IP layer mobility protocols are the most efficient mechanism to guarantee the service session continuity when IP subnet is changed during handover. Even if the IP layer mobility protocols are quite efficient, the feature of the protocols that had been designed to consider only L3 layer makes it difficult to improve the performance of hand over more and more. Nowadays, to overcome this limitation of IP mobility protocols, many researchers have worked on the mobility protocols integration of different layers (e.g., L2 layer). In this paper, we propose the enhanced Proxy MIPv4 to minimize the latency of handover using MIH protocol in 802.11 WLANs. The proposed mechanism minimizes the latency of authentication by exchanging security keys between Access Routers during handover. Moreover, it also minimizes packet losses by Inter-AP Tunneling and data forwarding.

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An Efficient Management Scheme of Hierarchical P2P System based on Network Distance (계층적 P2P 시스템의 효율적 관리를 위한 네트워크 거리 기반 운영 기법)

  • Hong, Chung-Pyo;Kim, Cheong-Ghil;Kim, Shin-Dug
    • Journal of The Institute of Information and Telecommunication Facilities Engineering
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    • v.10 no.4
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    • pp.121-127
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    • 2011
  • Many peer-to-peer (p2p) systems have been studied in distributed, ubiquitous computing environments. Distributed hash table (DHT)-based p2p systems can improve load-balancing even though locality utilization and user mobility are not guaranteed. We propose a mobile locality-based hierarchical p2p overlay network (MLH-Net) to address locality problems without any other services. MLH-Net utilizes mobility features in a mobile environment. MLH-Net is constructed as two layers, an upper layer formed with super-nodes and a lower layer formed with normal-nodes. Because super-nodes can share advertisements, we can guarantee physical locality utilization between a requestor and a target during any discovery process. To overcome a node failure, we propose a simple recovery mechanism. The simulation results demonstrate that MLH-Net can decrease discovery routing hops by 15% compared with JXTA and 66% compared with Chord.

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The Effects of Oxygen Partial Pressure and Post-annealing on the Properties of ZnO-SnO2 Thin Film Transistors (ZnO-SnO2 투명박막트랜지스터의 특성에 미치는 산소분압 및 후속열처리의 영향)

  • Ma, Tae-Young
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.4
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    • pp.304-308
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    • 2012
  • Transparent thin film transistors (TTFT) were fabricated using the rf magnetron sputtered ZnO-$SnO_2$ films as active layers. A ceramic target whose Zn atomic ratio to Sn is 2:1 was employed for the deposition of ZnO-$SnO_2$ films. To study the post-annealing effects on the properties of TTFT, ZnO-$SnO_2$ films were annealed at $200^{\circ}C$ or $400^{\circ}C$ for 5 min before In deposition for source and drain electrodes. Oxygen was added into chamber during sputtering to raise the resistivity of ZnO-$SnO_2$ films. The effects of oxygen addition on the properties of TTFT were also investigated. 100 nm $Si_3N_4$ film grown on 100 nm $SiO_2$ film was used as gate dielectrics. The mobility, $I_{on}/I_{off}$, interface state density etc. were obtained from the transfer characteristics of ZnO-$SnO_2$ TTFTs.

A Study on the Electrical Properties of ITO Thin Films with Various Oxygen Gas Flow Rate (산소 가스 유량비 변화에 따른 ITO 박막의 전기적 특성에 관한 연구)

  • Choi, Dong-H.;Keum, Min-J.;Jean, A.R.;Han, Jean-G.
    • Journal of Surface Science and Engineering
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    • v.40 no.3
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    • pp.144-148
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    • 2007
  • To prepare the transparent electrode for electronic devices such as flat panel or flexible displays, solar cells, and touch panels; tin doped $In_2O_3$ (ITO) films with low resistivity and a high transparency were fabricated using a facing target sputtering (FTS) system at the various oxygen gas flow rate. The carrier concentration and mobility of ITO films were measured by Hall Effect measurement. And the transmittance was measured using the UV-VIS spectrometer. As a result, we can obtain the ITO thin films prepared at 10% oxygen gas flow ratio, thickness 150 nm with transmittance 85% and resistivity $8.1{\times}10^{-4}{\Omega}cm$ and surface roughness 5.01 nm.

Characteristics of InN thin fabricated by RF reactive sputtering (고주파 반응성 스퍼터링에 의해 제작된 InN 박막의 특성)

  • Kim, Young-Ho;Choi, Young-Bok;Chung, Sung-Hoon;Hong, Pil-Young;Moon, Dong-Chan;Kim, Sun-Tae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.11 no.7
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    • pp.527-534
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    • 1998
  • Thin film deposition of InN, which is a less-studied III-nitride compound semiconductor because of the difficulty if crystal growth, was performed by rf reactive sputtering method using In target and $N_2$reactive gas. The structrual, electrical, and optical properties of the produced films were measured and disussed according to the sputtering parameters such as deposition pressure, rf power, and substrate temperature. From the result of deposition pressure, rf power, and substrate temperature, we could obtain optimal conditions of 5m Torr, 60W, $60^{\circ}C$ for preparing InN thin film with high crystallinity, low carrier concentration, and high Hall mobility. The carrier concentration, Hall mobility, and optical bandgap of the fabricated InN thin films at optimal condition were $6.242\times10^{18}cm^{-3}, 212.526cm^2/V\cdot$s, and 1.912eV, respectively.

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