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http://dx.doi.org/10.6109/jkiice.2010.14.1.191

A Study on the High Quality and Low Cost Fabrication Technology of ZnO Thin Films for Solar Cell Applications  

Lee, Jae-Hyeong (군산대학교 전자정보공학부)
Publication Information
Journal of the Korea Institute of Information and Communication Engineering / v.14, no.1, 2010 , pp. 191-196 More about this Journal
Abstract
Aluminum doped zinc oxide (AZO) films have been prepared on Coming 7059 glass substrates by r.f. magnetron sputtering method. A powder target instead of a conventional sintered ceramic target was used in order to improve the utilization efficiency of the target and reduce the cost of the film deposition process. The influence of sputter pressure on the structural, electrical, and optical properties of AZO films were studied. The AZO films had hexagonal wurtzite structure with a preferred c-axis orientation, regardless of sputter pressure and target types. The crystallinity and degree of orientation was increased by increasing the sputter pressure. For higher sputtering pressures, a reduction of the resistivity was observed due to a increase on the mobility and the carrier concentration. The lowest resistivity of $6.5{\times}10^{-3}\;{\Omega}-cm$ and the average transmittance of 80% can be obtained for films deposited at 15 mTorr.
Keywords
Aluminum doped zinc oxide (AZO) film; magnetron sputter; Powder target; solar cell;
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