A Study on the Electrical Properties of ITO Thin Films with Various Oxygen Gas Flow Rate |
Choi, Dong-H.
(Center for Advanced Plasma Surface Technology, SungKyunKwan University)
Keum, Min-J. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) Jean, A.R. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) Han, Jean-G. (Center for Advanced Plasma Surface Technology, SungKyunKwan University) |
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