• 열처리공학회지
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• 제10권2호
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• pp.150-156
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• 1997

The effect of variation of pack activators, compositions, temperature and time on the thickness and structure of aluminide coatings formed on the TiAl alloy was studied in one-step packs and two-step packs containing aluminum for the purpose of improvement of oxidation resistance. The thickness of coating layer was increased with increasing $NH_4Cl$ content up to 3wt% and then it was saturated. Oxidation resistance of coating layers carried out at one step pack was superior to that of ones through of two step pack. The improvement of high temperature oxidation resistance was due to the formation of a protective $Al_2O_3$ surface layers and coating the alloys with $TiAl_3$ phase.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1333-1336
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• 1998

Hydrogenated amorphous silicon(a-Si:H) films which were deposited by plasma enhanced chemical deposition(PECVD) have been recrystallized by the two-step rapid thermal annealing(RTA) employing the halogen lamp. The a-Si:H films evolve hydrogen explosively during the high temperature crystallzation step. In result, the recrystallized polycrystalline silicon(poly-Si) films have poor surface morphology. In order to avoid the hydrogen evolution, the films have undergone the dehydrogenation step prior to the crystallization step Before the RTA process, the active area of thin film transistors (TFT's) was patterned. The prepatterning of the a-Si:H active islands may reduce thermal damage to the glass substrate during the recrystallization. The computer generated simulation shows the heat propagation from the a-Si:H islands into the glass substrate. We have fabricated the poly-Si TFT's on the silicon wafers. The maximun ON/OFF current ratio of the device was over $10^5$.

• 한국정밀공학회지
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• 제28권3호
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• pp.323-329
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• 2011

Certified reference materials (CRMs) have been used to calibrate surface profilers for reliable measurements. In this paper, we present a newly designed step height CRM which has a step height pattern with two different widths and various special patterns for checking radial magnification, distortion of optical viewing systems, etc. Especially, it could be useful for multi-probe inspection instruments in the manufacturing lines. The fabrication was done by conventional optical lithography and dry etching process with optimized conditions. To verify the step height values, a white-light scanning interferometer was used with objective lenses having magnification of $10{\times}$ and $100{\times}$. CRMs with nominal step heights of $0.5\;{\mu}m$, $1\;{\mu}m$, $3\;{\mu}m$, $5\;{\mu}m$, $7\;{\mu}m$, and $10\;{\mu}m$ were fabricated and the uniformity of these CRMs was evaluated to be less than 3 nm ($1{\sigma}$).

• 센서학회지
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• 제28권4호
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• pp.251-255
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• 2019

We propose a two-step lithography process to minimize edge-bead issues caused by thick photoresist (PR) coating. In the conventional PR process, the edge bead can be efficiently removed by applying an edge-bead removal (EBR) process while rotating the silicon wafer at a high speed. However, applying conventional EBR to the production of desired PR mold with unique negative patterns cannot be used because a lower rpm of spin coating and a lower temperature in the soft bake process are required. To overcome this problem, a two-step lithography process was developed in this study and applied to the fabrication of a polydimethylsiloxane (PDMS) film having super-hydrophobic characteristics. Following UV exposure with a first photomask, the exposed part of the silicon wafer was selectively removed by applying a PR developer while rotating at a low rpm. Then, unique PR mold structures were prepared by employing an additional under-exposure process with a second mask, and the mold patterns were transferred to the PDMS. Results showed that the fabricated PDMS film based on the two-step lithography process reduced the height difference from 23% to 5%. In addition, the water contact angle was greatly improved by spraying of hydrophobic nanosilica on the dual-scaled PDMS surface.

• 대한전자공학회논문지
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• 제24권1호
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• pp.91-96
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• 1987

Plasma etching can obtain less damaged etch surface than reactive ion etching. This study was performed to get anisotropic etching characteristics of Si using two step etching technique with C2CIF5 and SF6 gas mixture. The results show that the etch rate and aspect ratio of silicon was increased with increment of SF6 contents. The bulging phenomenon on trench side wall in the plasma one-step etching technique was eliminated by the two step etching technique. The anisotropy was decreased from 12(at 120m Torr) to 2.2(at 400m Torr) with increasing the chamber pressure. At the low rf power (350 watts) anisotrpy of silicon was obtained 7 lower than that of high rf power (650 watts. A:~9). In Summary we obtained anisotropic etching profiles of silicon with e 6\ulcornerm depth by using the plasma two-step etching technique.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 하계학술대회 논문집 D
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• pp.1508-1510
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• 1998

Recent development of scanning probe microscope techniques has made it possible to investigate, not only microscopic surface topography, but also physical and chemical properties on the nanometer-scale. The scanning Maxwell-stress microscopy (SMM) is surface characterization tool capable of mapping both the surface topography and electrical properties, such as surface potential, surface charge dielectric constant of thin films with a nanometer-scale resolution by means of the AC voltage driven oscillation of metal coated cantilever. In this study, we observed the surface potential distribution and molecular ordering in thin films. We have demonstrated that the SMM can be used for imaging surface potential distribution over the film surface and also be used for detecting surface changes in thin films. This is first step towards the understanding of electrical phenomena in organic and inorganic materials, biological system with SMM.

• 한국공작기계학회논문집
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• 제11권1호
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• pp.77-82
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• 2002

It is known that fractal theory has recently been used as a useful in the characterization of surface texture and the understanding of tribological phenomena such as friction wear and lubrication The fractal based method for describing the rubbed surface texture has aroused great interest In this paper the fractal descriptors was applied to rubbed surface of hydraulic driving material with image processing system in order to describe morphology of the rubbed surface The results showed that the fractal dimension can be determined by sum of intensity difference of surface pixel. The two step size to get fractal dimension is similar to surface roughness Ra. Fractal dimensions of the rubbed surfaces increase with an increase of applied load Morphology of the rubbed surface driving in lubricant can be effectively obtained by fractal dimensions.

• 산업경영시스템학회지
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• 제20권43호
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• pp.47-57
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• 1997

As a general index in surface quality of machined products, surface roughness is to measure worker's skill level, a ground product quality and machining accuracy, etc. The surface roughness is defined by a function of rotational speed and radius of a grinding wheel, distances of active grains composed of the wheel, and feed of a grinder's worktable. To predict surface roughness in horizontal surface grinding operations, probability distributions were used. Probability distribution functions(p.d.f.) of surface roughness were found as results when the size of active grains(=the radius of a grinding wheel) is given as uniform, exponential distribution, and the distance between active grains follows the distributions of uniform, exponential. For each pdf case, probabilistic features of surface roughness were also analyzed and presented. This study is a substantial step for determining mathematically the surface roughness instead of using empirical approaches. More works should be presented to develop a general model by which an accurate roughness value can be obtained in horizontal surface grinding operations.

• Journal of the Korean Wood Science and Technology
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• 제40권2호
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• pp.78-90
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• 2012

Soybean hull is an attractive feedstock for glucose production. To increase the glucose conversion in acid hydrolysis, a pretreatment method combined steam explosion with alkali pretreatment for soybean hull was studied. For first step pretreatment, steam explosion conditions (log Ro 2.45) were optimized to obtain maximum solid recovery and cellulose content. In the second step pretreatment, the conditions for potassium hydroxide pretreatment of steam exploded soybean hull were optimized by using RSM (response surface methodology). The optimum conditions for minimum lignin content were determined to be 0.6% potassium hydroxide concentration, $70^{\circ}C$ reaction temperature and 198 min reaction time. The predicted lignin content was 2.2% at the optimum conditions. Experimental verification of the optimum conditions gave the lignin content in similar value with the estimated value of the model. Finally, glucose conversion of pretreated soybean hull using acid hydrolysis resulted in $97.1{\pm}0.4%$. This research of two-step pretreatment was a promising method for increasing the glucose conversion in the cellulose-to-glucose process.

• 한국응용과학기술학회지
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• 제17권3호
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• pp.149-157
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• 2000

The synthesis of N-methyl glucamine was performed in two step reaction. The first step involves the amination between methylamine and glucose in methane. The N-methyl glucamine was obtained by the reduction of using Ni catalyst under the high pressure. The second step was glucamide anionic derivatives synthesis from N-methyl glucamine, maleic anhydride, lauryl alcohol and laurylamine by Schotten Banmann reaction respectively. Their molecular structures of N-methyl glucamine and glucamide (EG-MAS and AC-MAS) were investigated by IR and $^{1}H-NMR$. Basic physical properties and biodegradability of there glucamide anionic surfactant was investigated. The range of cmc values determined by measurements of surface tention was $10^{-5}{\sim}10^{-4}mol/l$ and the surface tension of the aqueous solution revealed in the range $28{\sim}30$ dyne/cm and their biodegradability was very good in the pH $5{\sim}10$.