• 제목/요약/키워드: surface pressure measurement

검색결과 480건 처리시간 0.025초

UBM 마그네트론 스퍼터 시스템을 이용한 구리 타겟의 이온전류밀도 향상 연구 (Development of UBMS(Unbalanced Magnetron Sputtering) System and Ion Current Density Measurement of Copper Target)

  • 강충현;주정훈
    • 한국표면공학회지
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    • 제50권3호
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    • pp.192-197
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    • 2017
  • A 6-way-cross consisting of a 2.75-inch CF flange was used as a main chamber on a PFEIFFER VACUUM TMP station based on a 67 l / sec turbo molecular pump and a diaphragm pump to produce a magnet array with a volume ratio of 5.5: 1.A 1-inch diameter copper target and graphite target were fabricated using MDX-1.5K from Advanced Energy Industries, Inc as a DC power supply. Ion current density of copper target and graphite target was measured by unbalanced magnetron sputtering. The basic pressure condition was $6.3{\times}10^{-7}mbar$ and the process pressure was Ar 50 sccm at $1.0{\times}10^{-2}mbar$ (7.5 mTorr) in the Ar atmosphere. Therefore, the relative density of copper ions reaching the substrate with the measured ion current density was derived.

적외선 센서를 이용한 초음파 용착부의 마찰열 측정 (Temperature Measurement on Ultrasonic Weld Surfaces by Using an Infrared Sensor)

  • 김원호;강은지;민경탁
    • 한국생산제조학회지
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    • 제26권4호
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    • pp.425-429
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    • 2017
  • During ultrasonic welding, plastic deformation, elastic hysteresis, and friction generate heat at the contact portions of the two materials to be welded, theoretically analyzing and experimentally measuring the temperature at the welded part are very important for identifying the heat affected zone. However, the welding temperature during ultrasonic welding wherein welding is performed in less than a second is a challenge. We investigated the effects of welding conditions such as welding time, welding pressure, and the ultrasonic vibration amplitude of horns on the temperature of welded surface of a Ni sheet of thickness 0.1 mm. We used a horn with a resonance frequency of 40 kHz and an ultrasonic welder. The temperature was measured using a intrared sensor, and its characteristics were investigated. Experimental results showed that increase in welding time and pressure and ultrasonic vibration amplitude of horns generally caused the increase in surface temperature of the weld.

토양의 물리적 특성의 변화를 고려한 강우의 침투모형 개발 (Development of Infiltration Model Considering Temporal Variation of Soil Physical Properties Under Rainfalls)

  • 정하우;김성준
    • 한국농공학회지
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    • 제35권3호
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    • pp.36-46
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    • 1993
  • The purposes of this study are to develop three-layered Green-Ampt infiltration model considering temporal variation of physical properties of soil and to evaluate the model with field experiment on bare-tilled and soybean-growing soil plots under natural rainfalls. Infiltration tests were conducted on a sandy loam soil. The model has three-layered soil profile including a surface crust, a tilled layer, a subsoil and considers temporal variation of porosity, hydraulic conductivity, capillary pressure head on a tilled layer by natural rainfalls and canopy density variation of crop. Field measurement of porosity, average hydraulic conductivity and average capillary presure head on a tilled layer were conducted by soil sampler and air-entry permeameter at regular intervals-after tillage. It was found that temporal variation of porosity and average hydraulic conductivity might be expressed as a function of cumulative rainfall energy and average capillary pressure head might be expressed as a function of porosity of a tilled soil. The model was calibrated by an optimization technique, Hooke and Jeeves method using hourly surface runoff data. With the calibrated parameters, the model was verified satisfactorily.

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하복의 온열생리학적 기초연구 (The Basic Studies of Thermal Physiology for Summer Wears)

  • 성수광;정현옥
    • 한국의류학회지
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    • 제9권2호
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    • pp.57-65
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    • 1985
  • In the experiment with a basic material for the design of summer wear that comfort can be obtained in temperature, to get individual differences, clothing styles (slacks, skirt), material differences(T/C, cotton), and the contrast between when naked and dressed, when two healthy females were dressed four kinds of summer wear as an object of experiment under the regular warm temperature environmental condition (24, 28, 32, $36^{\circ}C$, $60\pm10\%$ RH), the measurement of physiological, phychological change was taken and the result goes as follow; 1. Mean skin temperature rose by clothing, body weight loss decreased below $32^{\circ}C$, thermal sensation changed toward low temperature by $2\~3^{\circ}C$. 2. Mean skin temperature, body weight loss, the lowest blood pressure above $32^{\circ}C$, under-clothing temperature, and thermal sensation increased when in slacks to be compared with when in skirt. 3. Ambient temperature had a great effect on mean skin temperature, body weight loss, respiration, clothing surface temperature, under-clothing temperature and humidity, thermal sensation, etc. 4. It was admitted that pulse, thermal sensation, comfort show different individuality. 5. It was recognized that the lowest blood pressure, clothing surface temperature, under. clothing humidity differ according to the kinds of clothing. 6. A comfortable ambient temperature in clothing summer wear was about $27\~28^{\circ}C$.

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자장을 이용한 이온화율 증대형 삼극형 BARE에서 이온화율의 증대경향과 QMS를 이용한 이온의 에너지 분포 측정 (Measurement of Ion Energy Distribution using QMS & Ionization Enhancement by usign Magnetic Field in Triod BARE)

  • 김익현;주정훈;한봉희
    • 한국표면공학회지
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    • 제24권3호
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    • pp.119-124
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    • 1991
  • Recently, the trend of research in hard coating is concentrate on developing the process of ionization rate under low operating pressure, to get the thin film with high adhesion and dense microstructures. In this study ionization rate enhancement type PVD process using permanent magnet is developed, which enhances the ionization rate by confining the plasma suppressing the wall loss of electron. By the result to investigate the characteristic of glow discharge, the ionization rate of this process is enhanced about twice as high as that of triod BARE process (about 26%), and more dense TiN microstructures are obtained in this process. Cylindrical ion energy analyzer is made and attached in front of a quadrupole mass filter for the analysis of the energy distribution of reactive gas and activated gas ions from the plasma zone. To analyze the operation mechanism of ion energy analyzer, computer simulation is performed by calculation the electric field environment using finite element method. By these analyses of ion energy distribution of outcoming ions from the plasma zone, it is found that magnetic field enhances ion kinetic energy as well as ionization rate. The other results of this study is that the foundation of feed-back system is constructed, which automatically control the partial pressure of reactive gas. In can be possible by recording the data of mass spectrum and ion energy analysis using A-D converter.

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FTS법을 이용한 ITO박막의 제작 (Preparation of ITO Thin Films by FTS{Facing Targets Sputtering) Method)

  • 김건희;금민종;김한기;손인환;장경욱;이원재;최형욱;박용서;김경환
    • 한국전기전자재료학회논문지
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    • 제17권11호
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    • pp.1230-1233
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    • 2004
  • The ITO thin films were prepared by the FTS(Facing Targets Sputtering) system. The ITO thin films are deposited by changing the input current and working gas pressure. Then, electric characteristics, transmittance and surface roughness of ITO thin films were measured by Hall effect measurement, UV-VIS spectrometer and AFM. As a result, the ITO thin film was fabricated with resistivity 6xl0$^{-4}$ Ωㆍcm, carrier mobility 52.11 $\textrm{cm}^2$/Vㆍsec, carrier concentration 1.72 x $10^{20}$ $cm^{-3}$ transmittance over 85 % of ITO film at working gas pressure 1 mTorr and input current 0.6 A.

Computed radiograhy의 line spread funciton(LSF) 측정 (A measurement of the line spread function of computed radiography)

  • 김창복;김영근;김건중;이경섭
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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    • pp.124-130
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    • 2003
  • Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films, $\theta/2\theta$ mode X-ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity. and surface roughness highly depended on $Ar/O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7{\Omega}cm$ was obtained at a working pressure of 10 mTorr with $Ar/O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with $Ar/O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

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원뿔에 충돌하는 초음속 제트에 관한 연구 (A Study of Supersonic Jets Impinging on Axisymmetric Cone)

  • 박종호;이택상;김윤곤
    • 한국항공우주학회지
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    • 제31권7호
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    • pp.26-31
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    • 2003
  • 수직 이착륙기나 로켓 등을 발사시킬 때 사용되는 제트 편향기 설계를 위한 기초 자료를 얻기 위해 축대칭 원뿔에 충돌하는 초음속 제트에 대한 연구를 수행하였다. 본 논문에서는 충격파 간섭 또는 전단층에 의한 박리 등과 같은 유동 현상을 분석하기 위해 쉬리렌 장치를 이용한 유동가시화, 표면압력분포 등을 측정하였으며, 수치해석을 통해 실험결과와 비교, 검증하였다. 유동은 원뿔 충격파와 배럴 충격파 사이에서 간섭으로 인해 발생되는 충격파 패턴이었으며, 자유제트의 구조에 따라 다양한 형상을 나타내며 표면 압력분포에 크게 영향을 미친다.

PSP를 이용 다양한 공동 후류의 전역적 압력분포 측정 (The Whole Region Pressure Measurement of Cavity Downstream using PSP Technique)

  • 서형석;오주영;전영진;이재우;변영환
    • 한국추진공학회지
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    • 제11권6호
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    • pp.50-57
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    • 2007
  • Pressure Sensitive Paint(PSP)는 압력에 반응하는 도료를 뜻한다. PSP는 압력에 반응하는 대기 중의 산소량을 측정하여 전역적인 압력정보를 광학적으로 측정 할 수 있다. 본 연구에서는 PSP를 사용하여 제트 분사 후류의 표면압력 분포를 알아보았다. 또한 제트 분사구 5mm앞에 종횡비 1에서 4까지의 사각형 공동을 위치시켜 후류에 미치는 영향을 알아보았다. 제트 분사 후류의 압력 분포는 공동의 전단층의 영향으로 공동이 없을 때와 비교해서 옆으로 넓게 퍼지면서 강도는 약해지는 모습을 보였다. 또한 공동의 종횡비가 커짐에 따라서 전단층의 크기가 커지고 그 영향이 커졌다. 현재까지의 계산 결과는 압력공과 같은 불연속점에서의 압력측정 결과와 비교하였다. 본 연구에서는 전영역에서의 압력을 측정하여 전산해석 결과와 근접함을 증명함으로써 공동 후류에서의 유동현상을 보다 명확히 파악하였다.

밀착형 셔츠 설계를 위한 피부변형의 3차원 측정 (3D Measurement of Skin Deformation for the Design of a Tight-fitting Torso Pattern)

  • 박혜준;오염군;홍경희
    • 한국의류학회지
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    • 제34권11호
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    • pp.1824-1835
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    • 2010
  • This study develops tight-fitting torso patterns for performance garments by taking into account the skin deformation generated directly from a 3D scan during arm movements. The skin deformation caused during the arm movements was scanned after scanning the skin surface stamped with a circle. To create a torso pattern in response to skin deformation, the ratio and direction of the skin deformation were first measured and analyzed so that the 3D human body could be segmented. After translating, the 3D skin surface was segmented into 2D flat patterns, designing nude patterns and reducing them as well as tight-fitting shirts: the skin deformation segment shirts were made in response to the skin deformation. The features of the fabric deformation and the garment pressure were analyzed and evaluated. In comparison with a clothing construction segment shirt, the diameter of the skin deformation segment shirt was smaller as well the ratios of extension and reduction was less. The garment pressure of the skin deformation segment shirt was higher. The skin deformation segment shirt fitted more tightly compared to a clothing construction segment shirt as it covered the body more thoroughly and was as comfortable as the other shirts with less fabric deformation made as the body moved.