Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2003.05c
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- Pages.124-130
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- 2003
A measurement of the line spread function of computed radiography
Computed radiograhy의 line spread funciton(LSF) 측정
- Kim, Chang-Bok (Dept. of Electrical and Electronic Eng, Dongshin) ;
- Kim, Young-Keun ;
- Kim, Keon-Jung ;
- Lee, Kyung-Sup
- Published : 2003.05.16
Abstract
Zinc Oxide(ZnO) thin films on Si (100) substrate were deposited by RF magnetron sputter with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance. To analyze a crystallographic properties of the films,