• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.12
• /
• pp.117-122
• /
• 2009

The hexagonal network-type PDMS microstructures were fabricated and they were employed to low-friction drag surfaces. While the lowest contact angle measured from the smooth surface was $108^{\circ}$ the highest contact angle measured from the microstructured surfaces was $145^{\circ}$ The moving speed of bullet-type capsule attached with a PDMS pad of smooth surface ($CA=108^{\circ}$) was 0.1261 m/s and that with a PDMS pad of microstructured surface ($CA=145^{\circ}$) was 0.1464 m/s. Compared with the smooth surface, the microstructured surface showed 16.1% higher moving speed. The network-type microstructures have a composite surface that is composed with air and PDMS solid. Therefore, the surface does not wet: rather water is lifted by the microstructures. Because of the composite surface, water shows slip-flow on the microstructures, and thus friction drag can be reduced.

• 한국정보디스플레이학회:학술대회논문집
• /
• 2008.10a
• /
• pp.1286-1289
• /
• 2008

We report on a wide-viewing liquid crystal (LC) display with bi-level microstructures spontaneously formed by selective wetting on a chemically heterogeneous surface. The bi-level microstructures serve as spacers for maintaining uniform cell gap, as well as protrusions for wide-viewing properties. Our LC cell having the bi-level microstructures shows good electro-optic properties.

• Carbon letters
• /
• v.1 no.3_4
• /
• pp.138-142
• /
• 2001

The effect of electrochemical surface treatments in KOH chemical solution on microstructures of carbon blacks was investigated in terms of surface functional values and XRD measurements. And their mechanical interfacial properties of the carbon blacks/rubber composites were studied by the composite tearing energy ($G_{IIIC}$). It was found that the development of basic-surface functional groups lead to the significant physical changes of carbon blacks, such as, decrease of the interlayer spacing ($d_{002}$), increase of the crystalline size along c-axis ($L_c$), and increase of degree of crystalline (${\chi}_c$). This treatment is possibly suitable for carbon blacks to be incorporated in a hydrocarbon rubber matrix, resulting in improving the hardness and tearing energy of the resulting composites.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.32 no.4
• /
• pp.303-309
• /
• 2008

Dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing materials. The pattern collapse is a very serious problem in microfabrication, because it is one of the factors which limit the device dimensions. The reasons for the pattern collapse are known as the surface tension of rinse liquid, centrifugal force and rinse liquid flow produced in the developing process. In this work, we tried to evaluate the pattern collapse of three-dimensional microstructures that were fabricated by two-photon induced photopolymerization, and showed the way how to reduce the deformation of microstructures.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.34 no.1
• /
• pp.73-76
• /
• 2010

The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.670-673
• /
• 2003

Fabrication of three dimensional microstructures by laser-assisted chemical vapor deposition of material is investigated. To fabricate microstructures, a thin layer of deposit in desired patterns is first written using laser direct writing technique and on top of this layer a second layer is deposited to provide the third dimension normal to the surface. By depositing many layers. a three dimensional microstructure is fabricated. Optimum deposition conditions for direct writing of initial and subsequent layers with good surface quality and profile uniformity are determined. Using an arson ion laser and ethylene as the light source and reaction gas, respectively, fabrication of three-dimensional carbon microstructures is demonstrated.

• Journal of the Korean Society for Precision Engineering
• /
• v.23 no.11 s.188
• /
• pp.116-125
• /
• 2006

MEMS and LIGA technologies have been used for fabricating microstructures, but their shape is not 3D because of difficulty for preparation of many masks. To fabricate 3D microstructures, microstereolithography technology based on Digital Micromirror Device($DMD^{TM}$) was introduced. It has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, STL file is the standard format as the same of conventional rapid prototyping system, and 3D parts are fabricated by layer-by-layer according to 2D section sliced from STL file. The UV light source is illuminated to DMD which makes bitmap images of 2D section, and they are transferred and focused on resin surface. In this paper, we addressed optical design of microstereolithography system in consideration of light path according to DMD operation and image-forming on the resin surface using optical design program. To verify the performance of implemented microstereolithography system, 3D microstructures with complexity and high aspect ratio were fabricated.

• Journal of Mechanical Science and Technology
• /
• v.20 no.12
• /
• pp.2094-2104
• /
• 2006

As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A microstereolithography technology can meet these demands because it has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, 3D part is fabricated by stacking layers, 2D sections, which are sliced from STL file, and the Dynamic Image Projection process enables the resin surface to be cured by a dynamic image generated with $DMD^{TM}$ (Digital Micromirror Device) and one irradiation. In this paper, we address optical design process for implementing this microstereolithography system that takes the light path based on DMD operation and image-formation on the resin surface using an optical design program into consideration. To verify the performance of this implemented microstereolithography system, complex 3D microstructures with high aspect ratios were fabricated.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.34 no.7
• /
• pp.859-866
• /
• 2010

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.

• Journal of the Korean Society for Precision Engineering
• /
• v.26 no.9
• /
• pp.135-142
• /
• 2009

In the present study replication of microstructured surfaces by microinjection molding was carried out. For a fabrication of mold inserts, nickel microstructures having various characteristic dimensions were fabricated by nickel electroforming onto Si mother microstructures. In addition, reverse nickel microstructures based on the electroformed nickel microstructures were successfully realized by electroforming with passivation process. The fabricated nickel microstructures were used as mold inserts for a replication of microstructured surfaces by microinjection molding. Microinjection molding experiment was carried out under three different processing conditions, which revealed effects of a packing stage and mold wall temperature. The microinjection-molded microstructured surfaces were characterized by using an atomic force microscope (AFM). It was found that mold wall temperature could enhance replication quality resulting in the precise microstructured surfaces.