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http://dx.doi.org/10.3795/KSME-A.2010.34.7.859

Replication of Multi-level Microstructures by Microinjection Molding Using Modularized and Sectioned Micromold System  

Lee, Bong-Kee (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH))
Kwon, Tai-Hun (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH))
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.34, no.7, 2010 , pp. 859-866 More about this Journal
Abstract
In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.
Keywords
Micromold System; Microinjection Molding; Modularization; LIGA Process; Multi-Level Microstructures;
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