Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Replication of Multi-level Microstructures by Microinjection Molding Using Modularized and Sectioned Micromold System

모듈화된 초소형 몰드 시스템(MSMS)을 이용한 다단 마이크로 구조물의 초소형 사출성형 공정

  • Lee, Bong-Kee (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH)) ;
  • Kwon, Tai-Hun (Department of Mechanical Engineering, Pohang University of Science and Technology (POSTECH))
  • 이봉기 (포항공과대학교 기계공학과) ;
  • 권태헌 (포항공과대학교 기계공학과)
  • Received : 2010.01.05
  • Accepted : 2010.05.10
  • Published : 2010.07.01
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Abstract

In this study, microinjection molding process using the newly developed micromold system, namely modularized and sectioned micromold system (MSMS), has been carried out for a replication of multi-level microstructures. The present MSMS consisted of several micromold modules, each having cross-sectional microstructures on the top surface. The micromold modules were precisely fabricated by deep X-ray lithography and subsequent nickel electroforming. By assembling the micromold modules, an MSMS having multi-level microstructures, which could be used as a mold system in micromolding processes, was obtained. In this manner, polymeric multi-level microstructures, such as the triangular prism microstructures on a stepped surface, were successfully replicated by the microinjection molding process.

본 연구에서는 다단 마이크로 구조물의 대량성형을 위하여, 모듈화된 초소형몰드 시스템(MSMS)을 이용한 초소형 사출성형 공정을 수행하였다. 본 연구에서 적용된 초소형몰드 시스템은 여러 모듈들로 구성되어 있으며, 각 모듈들은 다양한 단면 마이크로 구조물을 가지고 있다. 초소형몰드 시스템의 모듈들은 X-선 리소그래피 공정 및 니켈 전주도금 공정으로 제작되었으며, 다양한 모듈들을 조합 및 결합함으로써 복잡한 형상을 가지는 초소형몰드 시스템을 효과적으로 구현할 수 있다. 이와 같은 초소형몰드 시스템을 적용함으로써, 본 연구에서는 다단 구조물의 표면에 마이크로 삼각 프리즘이 주기적으로 배열되어 있는 다단 마이크로 구조물의 초소형 사출성형 공정을 성공적으로 수행하였다.

Keywords

References

  1. Char, S. K., Jung, H. J. and Jeong, K. H., 2008,"Micropatterned Complex Optical Surface for WideAngle Illumination," Proc. IEEE Optical MEMS, pp.37-38.
  2. Lee, B.-K., Cha, K. J. and Kwon, T. H., 2009,"Fabrication of Polymer Micro/Nano Hybrid LensArray by Microstructured Anodic Aluminum Oxide(AAO) Mold," Microelectron. Eng., Vol. 86, No. 4-6,pp. 857-860. https://doi.org/10.1016/j.mee.2008.11.066
  3. Kwon, J. W. and Kim, E. S., 2002, "Multi-levelMicrofluidic Channel Routing with Protected ConvexCorners," Sens. Actuator A-Phys., Vol. 97-98, pp.729-733. https://doi.org/10.1016/S0924-4247(02)00012-2
  4. Mai, J., Sun, C., Li, S. and Zhang, X., 2007, "AMicrofabricated Platform Probing CytoskeletonDynamics Using Multidirectional TopographicalCues," Biomed. Microdevices, Vol. 9, No. 4, pp.523-531. https://doi.org/10.1007/s10544-007-9060-8
  5. Lin, C.-Y., Su, C.-H., Hsu, C.-M. and Lin, C.-R.,2008, "Improvement of the Microcrystalline CubeCorner Reflective Structure and Efficiency," Jpn. J.Appl. Phys., Vol. 47, No. 7, pp. 5693-5701. https://doi.org/10.1143/JJAP.47.5693
  6. Leclerc, E., Sakai, Y. and Fujii, T., 2003, "CellCulture in 3-Dimensional Microfluidic Structure ofPDMS(polydimethylsiloxane)," Biomed. Microdevices,Vol. 5, pp. 109-114. https://doi.org/10.1023/A:1024583026925
  7. Yan, J., Yoshino, M., Kuriagawa, T., Shirakashi, T.,Shoji, K. and Komanduri, R., 2001, "On the DuctileMachining of Silicon for Micro Electro-mechanicalSystems (MEMS), Opto-electronic and OpticalApplications," Mater. Sci. Eng. A-Struct. Mater. Prop.Microstruct. Process., Vol. 297, No. 1-2, pp. 230-234. https://doi.org/10.1016/S0921-5093(00)01031-5
  8. Heyl, P., Olschewski, T. and Wijnaendts, R. W., 2001,"Manufacturing of 3D Structures for Micro-tools Using Laser Ablation," Microelectron. Eng., Vol. 57-58, pp. 775-780. https://doi.org/10.1016/S0167-9317(01)00485-3
  9. Zhang, X., Jiang, X. N. and Sun, C., 1999, "Micro-stereolithographyof Polymeric and CeramicMicrostructures," Sens. Actuator A-Phys., Vol. 77, No.2, pp. 149-156. https://doi.org/10.1016/S0924-4247(99)00189-2
  10. Han, M., Lee, W., Lee, S.-K. and Lee, S. S., 2004,"3D Microfabrication with Inclined/rotated UVLithography," Sens. Actuator A-Phys., Vol. 111, No. 1,pp. 14-20. https://doi.org/10.1016/j.sna.2003.10.006
  11. Lin, C. P., Yang, H. and Chao, C.-K., 2003,"Hexagonal Microlens array Modeling and FabricationUsing a Thermal Reflow Process," J. Micromech.Microeng., Vol. 13, No. 5, pp. 775-781. https://doi.org/10.1088/0960-1317/13/5/333
  12. Tabata, O., You, H., Matsuzuka, N., Yamaji, T.,Uemura, S. and Dama, I, 2002, "Moving Mask DeepX-ray Lithography System with Multi Stage for 3-DMicrofabrication," Microsyst. Technol., Vol. 8, No. 2-3, pp. 93-98. https://doi.org/10.1007/s00542-001-0168-0
  13. Becker, E. W., Ehrfeld, W., Hagmann, P., Manner,A. and Münchmeyer, D., 1986, "Fabrication ofMicrostructures with High Aspect Ratios and GreatStructural Heights by Synchrotron RadiationLithography, Galvanoformung, and Plastic Moulding(LIGA Process)," Microelectron. Eng., Vol. 4, No. 1,pp. 35-56. https://doi.org/10.1016/0167-9317(86)90004-3
  14. Lee, B.-K. and Kwon, T. H., 2009, "Development ofModularized & Sectioned Micromold System(MSMS) via LIGA Technology," 8th InternationalWorkshop on High Aspect Ratio MicrostructureTechnology (HARMST), pp. 79-80, Saskatoon,Canada, June 25-28.