Transactions of the Korean Society of Mechanical Engineers A (대한기계학회논문집A)

The Korean Society of Mechanical Engineers (대한기계학회)
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Investigation into Deformation of Three-Dimensional Microstructures via Surface Tension of a Rinsing Material During a Developing Process

현상공정에서 표면장력에 의한 극미세 3 차원 구조물의 변형거동 분석 및 저감방안에 관한 연구

  • 박상후 (부산대학교 정밀금형 및 금형가공연구소 (ERC) / 부산대학교 기계공학부) ;
  • 양동열 (한국과학기술원 기계공학과)
  • Published : 2008.04.01
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Abstract

Dense and fine polymer patterns often collapse, as they come into contact with each other at their protruding tips. Resist pattern collapse depends on the aspect ratio of patterns and the surface tension of rinsing materials. The pattern collapse is a very serious problem in microfabrication, because it is one of the factors which limit the device dimensions. The reasons for the pattern collapse are known as the surface tension of rinse liquid, centrifugal force and rinse liquid flow produced in the developing process. In this work, we tried to evaluate the pattern collapse of three-dimensional microstructures that were fabricated by two-photon induced photopolymerization, and showed the way how to reduce the deformation of microstructures.

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References

  1. Sun, H.B., Takada, K. and Kawata, S., 2003, 'Scaling Laws of Voxels in Two- Photopolymerization Nanofabrication,' Appl. Phys. Lett., Vol.83, No.6, pp1104-1106 https://doi.org/10.1063/1.1599968
  2. Park, S.H., Lim, T.W., Yang, D.Y., Kong, H.J., 2004, 'Directly Nano-precision Feature Patterning on Thin metal Layer using Top-down Building Approach in nRP Process,' J. of KSPE, Vol. 21, No. 6, pp. 153-159
  3. Park, S.H., Jeong, J.H., Lim, T.W., Yang, D.Y., Kim, K.D., Lee, K.S. Kong, H.J., 2006, 'Effective Fabrication of Three-dimensional Nano/ micro-structures in a Single Step,' Appl. Phys. Lett., Vol. 88, Paper No. 203105 https://doi.org/10.1063/1.2204448
  4. Lim, T.W., Park, S.H., Yang, D.Y., Kong, H.J., Lee, K.S., 2006, 'Direct Single-layered Fabrication of 3D Concavo-convex Patterns in Nano-stereolithography,' Appl. Phys. A, Vol. 84, pp. 379-383 https://doi.org/10.1007/s00339-006-3633-x
  5. Park, S.H., Lim, T.W., Yang, D.Y., Kong, H.J., Lee, K.S., 2006, 'Direct Laser Patterning on Opaque Substrate in Two-photon Polymerization,' Macromol. Res., Vol. 14, No. 2, pp. 245-250 https://doi.org/10.1007/BF03218517
  6. Park, S.H., Lee, S.H., Yang, D.Y., Kong, H.J., Lee, K.S., 2005, 'Subregional Slicing Method to Increase 3D Nanofabrication Efficiency in Two-photon Polymerization,' Appl. Phys. Lett., Vol. 87, Paper No. 154108 https://doi.org/10.1063/1.2103393
  7. Maruo, S., Ikuta, K., 2000, 'Fabrication of Freely Movable Microstuructures by using Two-photon Three-dimensional Microfabrication,' Proc. of SPIE, Vol. 3937, pp. 106-112 https://doi.org/10.1117/12.382800
  8. Kawata, S., Sun, H.B., Tanaka, T., Takada, K., 2001, 'Finer Features for Functional Microdevices,' Nature, Vol. 412, No. 16, pp. 697-698 https://doi.org/10.1038/35089130
  9. Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 2003, 'Femtosecond Laser-induced Two-photon Polymerization of Inorganic-Organic Hybrid Materials for Applications in Photonics,' Opt. Lett., Vol. 28, No. 5, pp. 301-303 https://doi.org/10.1364/OL.28.000301
  10. Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 2005, 'Direct Fabrication of Micro-Patterns and Three-Dimensional Structures using Nano Replication Printing (nRP) Process,' Sensor. Mater., Vol. 17, No. 2, pp. 65-75
  11. Kato, J., Takeyasu, N., Adachi, Y., Sun, H.B., Kawata, S., 2005, 'Multiple-spot Parallel Processing for Laser Micronanofabrication,' Appl. Phys. Lett., Vol. 86, Paper No. 044102 https://doi.org/10.1063/1.1855404
  12. Park, S.H., Lim, T.W., Yang, D.Y., Kong, H.J., 2004, 'Fabrication of a PDMS Stamp using Nano-Replication Printing Process,' Trans. of KSME(A), Vol. 28, No. 7, pp. 999-1005 https://doi.org/10.3795/KSME-A.2004.28.7.999
  13. Pham, A.T., Kim, D.P., Lim, T.W., Park, S.H., Yang, D.Y., Lee, K.S., 2006, 'Three-dimensional SiCeramic Structures via Nano-stereolithography of Inorganic Polymer Photoresist,' Adv. Func. Mater., Vol. 16, pp. 1235-1241 https://doi.org/10.1002/adfm.200600009
  14. Tanaka, T., Ishikawa, A., Kawata, S., 2006, 'Two-photon-induced Reduction of Metal Ions for Fabricating Three-dimensional Electrically Conductive Metallic Microstructure,' Appl. Phys. Lett., Vol. 88, Paper No. 081107 https://doi.org/10.1063/1.2177636
  15. Tanaka, T., Morigami, M., Atoda, N., 1993, 'Mechanism of Resist Pattern Collapse during Development Process,' Jpn. J. Phys., Vol. 32, pp. 6059-6064 https://doi.org/10.1143/JJAP.32.6059
  16. Deguchi, K., Miyoshi, K., Ishii, T., Matsuda, T., 1992, 'Patterning Characteristics of a Chemically-Amplified Negative Resist in Synchrotron Radiation Lithography,' Jpn. J. Appl. Phys., Vol. 31, pp. 2954-2958 https://doi.org/10.1143/JJAP.31.2954