Browse > Article

Replication of Microstructured Surfaces by Microinjection Molding  

Lee, Bong-Kee (Department of Mechanical Engineering, POSTECH)
Kim, Young-Bae (Digital Appliance Company, LG Electronics)
Kwon, Tai-Hun (Department of Mechanical Engineering, POSTECH)
Publication Information
Journal of the Korean Society for Precision Engineering / v.26, no.9, 2009 , pp. 135-142 More about this Journal
Abstract
In the present study replication of microstructured surfaces by microinjection molding was carried out. For a fabrication of mold inserts, nickel microstructures having various characteristic dimensions were fabricated by nickel electroforming onto Si mother microstructures. In addition, reverse nickel microstructures based on the electroformed nickel microstructures were successfully realized by electroforming with passivation process. The fabricated nickel microstructures were used as mold inserts for a replication of microstructured surfaces by microinjection molding. Microinjection molding experiment was carried out under three different processing conditions, which revealed effects of a packing stage and mold wall temperature. The microinjection-molded microstructured surfaces were characterized by using an atomic force microscope (AFM). It was found that mold wall temperature could enhance replication quality resulting in the precise microstructured surfaces.
Keywords
Microinjection Molding; Microstructured Surface; Mold Insert; Replication Quality; Mold Wall Temperature;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Fu, G., Loh, N. H., Tor, S. B., Tay, B. Y., Murakoshi, Y. and Maeda, R., 'A Variotherm Mold for Micro Metal Injection Molding,' Microsystem Technologies, Vol. 11, No. 12, pp. 1267-1271, 2005   DOI
2 Langer, R. and Vacanti, J. P., 'Tissure Engineering,' Science, Vol. 260, No. 5110, pp. 920-926, 1993   DOI
3 Dunkel, K., Bauer, H.-D., Ehrfeld, W., Hoßfeld, J., Weber, L., Hㅐrcher, G. and Muller, G., 'Injectionmoulded Fibre Ribbon Connectors for Parallel Optical Links Fabricated by the LIGA Technique,' Journal of Micromechanics and Microengineering,Vol. 8, No. 4, pp. 301-306, 1998   DOI   ScienceOn
4 Rha, M., Park, J. M. and Kwon, T. H., 'Replication of Nano Dimple Structures by Injection Molding with Rapid Thermal Control System,' Technical Proceedings of the 2008 Nanotechnology Conference and Trade Show, Vol. 1, pp. 969-972, 2008
5 Sinzinger, S. and Jahns, J., 'Microoptics,' Wiley-VCH, 2003
6 Becker, H. and Gartner, C., 'Polymer Microfabrication Technologies for MicrofluidicSystems,' Analytical and Bioanalytical Chemistry,Vol. 390, No. 1, pp. 89-111, 2008   DOI
7 Chang, P.-C. and Hwang, S.-J., 'Experimental Investigation of Infrared Rapid Surface Heating for Injection Molding,' Journal of Applied Polymer Science, Vol. 102, No. 4, pp. 3704-3713, 2006   DOI   ScienceOn
8 Hierlemann, A., 'Integrated Chemical MicrosensorSystems in CMOS Technology,' Springer, 2005
9 Lee, B.-K., Kim, D. S. and Kwon, T. H., 'Replicationof Microlens Arrays by Injection Molding,' Microsystem Technologies, Vol. 10, No. 6-7, pp. 531- 535, 2004   DOI
10 Lowe, D. and Haubelt, J., 'Microengineering of Metals and Ceramics,' Wiley-VCH, 2005
11 Yoshii, M., Kuramoto, H. and Ochiai, Y., 'Experimental Study of the Transcription of Minute Width Grooves by Injection Molding,' Polymer Engineering and Science, Vol. 38, No. 9, pp. 1587- 1593, 1998   DOI   ScienceOn
12 Piotter, V., Bauer, W., Benzler, T. and Emde, A., 'Injection Molding of Components for Microsystems,' Microsystem Technologies, Vol. 7, No. 3, pp. 99-102, 2001   DOI
13 Heckele, M.,Bacher,W.and Muller,K.D., 'Hot Embossing The Molding Technique for Plastic Microstructures,' Microsystem Technologies, Vol. 4, No. 3, pp. 122-124,1998   DOI
14 Lee, B.-K., Hwang, C. J., Kim, D. S. and Kwon, T. H., 'Replication Quality of Flow-Through Microfilters in Microfluidic Lab-on-a-Chip for Blood Typing by Microinjection Molding,' Transactions of ASME: Journal of Manufacturing Science and Engineering, Vol. 130, No. 2, Paper No. 021010, 2008   DOI
15 Yoo, Y.-E., Seo, Y.-H., Je, T. J. and Choi, D. S., 'Injection Molding Technology for Micro/Nano Pattern,' Journal of the Korean Society for PrecisionEngineering, Vol. 22, No. 2, pp. 23-29, 2005
16 Kim, S. K., Yoo, Y. E., Seo, Y. H., Jae, T.-J., Whang,K.-H. and Choi, D. S., 'Fabrication of Ni Stamper based on Micro-Pyramid Structures for HighUniformity Light Guide Panel (LGP),' Journal of the KSPE, Vol. 23, No. 9, pp. 174-178, 2006
17 Kim, S. M., Lee, S. H. and Suh, K. Y., 'Cell Researchwith Physically Modified Microfluidic Channels: AReview,' Lab on a Chip, Vol. 8, No. 7, pp. 1015-1023, 2008   DOI   ScienceOn
18 Yao, D., Virupaksha, V. L. and Kim, B., 'Study on Squeezing Flow during Nonisothermal Embossing of Polymer Microstructures,' Polymer Engineering and Science, Vol. 45, No. 5, pp. 652-660, 2005   DOI   ScienceOn
19 Merz, L., Rath, S., Piotter, V., Ruprecht, R. andHaußelt, J., 'Powder Injection Molding of Metallicand Ceramic Microparts,' Microsystem Technologies, Vol. 10, No. 3, pp. 202-204, 2004   DOI
20 Chou, S. Y., Krauss, P. R. and Renstorm, P. J., 'Imprint of Sub-25nm Vias and Trenches in Polymers,' Applied Physics Letters, Vol. 67, No. 21, pp. 3114-3116, 1995   DOI   ScienceOn
21 Chen, S.-C., Jong, W.-R., Chang, Y.-J., Chang, J.-A. and Cin, J.-C., 'Rapid Mold Temperature Variation for Assisting the Micro Injection of High AspectRatio Micro-Feature Parts using Induction Heating Technology,' J. Micromech. Microeng., Vol. 16, No. 9, pp. 1783-1791, 2006   DOI   ScienceOn
22 Beeby, S. P., Ensel, G., Kraft, M. and White, N., 'MEMS Mechanical Sensors,' Artech House Publishers, 2004
23 Xia, Y. and Whitesides, G. M., 'Soft Lithography,' Annual Review of Materials Science, Vol. 28, pp.153-184, 1998   DOI   ScienceOn