• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.743-744
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• 2014

Hyperbolic metamaterials in which waves can only propagate through the radial direction have achieved much attention these days due to their capability of sub-wavelength resolution. In this work, the realization and optimization of hyperbolic elastic metamaterials are mainly studied. To obtain a new hyperbolic elastic metamaterial, a specially-engineered mass-spring system is introduced. Based on the mass-spring system, the hyperbolic elastic metamaterials are proposed and realized. In addition, the sub-wavelength resolution of the proposed hyperbolic elastic metamaterial is verified by ultrasonic elastic wave experiments. For the experiments, specially-designed magnetostrictive patch transducers are developed to realize two sub-wavelength elastic wave sources. Furthermore, the proposed hyperbolic elastic metamaterial is optimized to maximize its operating frequency ranges by the topology optimization method.

• Korean Journal of Remote Sensing
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• v.35 no.6_4
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• pp.1391-1401
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• 2019

The KOMPSAT-3A is a high-resolution optical satellite launched in 2015 by Korea Aerospace Research Institute (KARI). KOMPSAT-3A provides Panchromatic (PAN-0.55 m), Multispectral (MS-2.2 m), and Mid-wavelength infrared (MIR_OR-5.5 m) image. However, due to security or military problems, MIR_OR image with 5.5m spatial resolution are provided down sampled at 33 m spatial resolution (MIR_rd). In this study, we propose spatial sharpening method to improve the spatial resolution of MIR_rd image (33 m) using virtual High Frequency (HF) image and optimal fusion factor. Using MS image and MIR_rd image, we generated virtual high resolution (5.5 m) MIR_OR^fus image and then compared them to actual high-resolution MIR_OR image. The test results show that the proposed method merges the spatial resolution of MS image and the spectral information of MIR_rd image efficiently.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.29-37
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• 2021

A 7 nm technology node using extreme ultraviolet lithography with a wavelength of 13.5 nm has been recently developed and applied to the semiconductor manufacturing process. Furthermore, the development of sub-3 nm technology nodes continues to be required. In this study, design factors of an electrostatic deflector for an ultra-miniaturized microcolumn system that can realize an electron wavelength of below 1.23 nm with an acceleration voltage of above 1 eV were investigated using a three-dimensional simulator. Particularly, the optimal design of the electrostatic octupole floating deflector was derived by optimizing the design elements and improving the driving method of the 1 keV low energy ultra-miniaturized microcolumn deflector. As a result, the entire wide field of view greater than 330 ㎛ at a working distance of 4 mm was realized with an ultra-high-resolution electron beam spot smaller than 10 nm. The results of this study are expected to be a basis technology for realizing a wafer-scale multi-array microcolumn system, which is expected to innovatively improve the throughput per unit time, which is the biggest drawback of electron beam lithography.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.403.1-403.1
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• 2014

In conventional far-field microscopy, two objects separated closer than approximately half of an emission wavelength cannot be resolved, because of the fundamental limitation known as Abbe's diffraction limit. During the last decade, several super-resolution methods have been developed to overcome the diffraction limit in optical imaging. Among them, super-resolution optical fluctuation imaging (SOFI) developed by Dertinger et al [1], employs the statistical analysis of temporal fluorescence fluctuations induced by blinking phenomena in fluorophores. SOFI is a simple and versatile method for super-resolution imaging. However, due to the uncontrollable blinking of fluorophores, there are some limitations to using SOFI for several applications, including the limitations of available blinking fluorophores for SOFI, a requirement of using a high-speed camera, and a low signal-to-noise ratio. To solve these limitations, we present a new approach combining SOFI with speckle pattern illumination to create illumination-induced optical fluctuation instead of blinking fluctuation of fluorophore.. This technique effectively overcome the limitations of the conventional SOFI since illumination-induced optical fluctuation is possible to control unlike blinking phenomena of fluorophore. And we present the sub-diffraction resolution image using SOFI with speckle illumination.

• Vacuum Magazine
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• v.2 no.1
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• pp.17-20
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• 2015

In this article, a historical and scientific review on the development of an ultrafast electron microscope is supplied, and the challenges in further improvement of time resolution under sub-picosecond or even sub-femtosecond scale is reviewed. By combining conventional scanning electron microscope and femtosecond laser technique, an ultrafast electron microscope was invented. To overcome its temporal resolution limit which originates from chromatic aberration and Coulomb repulsion between individual electrons, a generation of electron pulse via strong-field photoemission has been investigated thoroughly. Recent studies reveal that the field enhancement and field accumulation associated with the near-field formation at sharply etched metal nanoprobe enabled such field emission by ordinary femtosecond laser irradiation. Moreover, a considerable acceleration reaching 20 eV with near-infrared laser and up to 300 eV acceleration with mid-infrared laser was observed, and the possibility to control the amount of acceleration by varying the incident laser pulse intensity and wavelength. Such findings are noteworthy because of the possibility of realizing a sub-femtosecond, few nanometer imaging of nanostructured sample.in silicon as thermoelectric materials.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.2
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• pp.165-171
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• 2022

The SiO₂/TiO₂ multilayer thin films used for narrow band pass filter were fabricated using E-beam evaporation method. The narrow band pass filter was used to enhance the resolution of spectroscopy and sensor applications with near infrared (NIR) light source. The narrow band pass filter with multilayer thin films were designed with Essential Macleod program. The multilayers of SiO₂/TiO₂ with 32 layers were deposited on the silicon encapsulation of IR with peak wavelength (λ_p) of 660 nm and NIR LEDs with λ_p of 830 nm, 880 nm, and 955 nm. After NIR light passed through the narrow band pass filter, the full width of half maximum of 33.4~48.6 nm became narrow to 20~24 nm owing to the absorption of photons with short or long wavelength of designed band of 20 nm. The SiO₂/TiO₂ band pass filter fabricated in this study can be used for sensor, optoelectronics, and NIR spectroscopy applications.

• Korean Journal of Materials Research
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• v.23 no.5
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• pp.260-265
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• 2013

Silicon nanoparticle is a promising material for electronic devices, photovoltaics, and biological applications. Here, we synthesize silicon nanoparticles via $CO_2$ laser pyrolysis and study the hydrogen flow effects on the characteristics of silicon nanoparticles using high resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), and UV-Vis-NIR spectrophotometry. In $CO_2$ laser pyrolysis, used to synthesize the silicon nanoparticles, the wavelength of the $CO_2$ laser matches the absorption cross section of silane. Silane absorbs the $CO_2$ laser energy at a wavelength of $10.6{\mu}m$. Therefore, the laser excites silane, dissociating it to Si radical. Finally, nucleation and growth of the Si radicals generates various silicon nanoparticle. In addition, researchers can introduce hydrogen gas into silane to control the characteristics of silicon nanoparticles. Changing the hydrogen flow rate affects the nanoparticle size and crystallinity of silicon nanoparticles. Specifically, a high hydrogen flow rate produces small silicon nanoparticles and induces low crystallinity. We attribute these characteristics to the low density of the Si precursor, high hydrogen passivation probability on the surface of the silicon nanoparticles, and low reaction temperature during the synthesis.

• Journal of the Optical Society of Korea
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• v.17 no.3
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• pp.262-268
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• 2013

We study the focusing properties of a two-dimensional square-lattice photonic crystal (PC) comprising silica and germanium partitioned cylinders in air background. The finite difference time domain (FDTD) method with periodic boundary condition is utilized to calculate the dispersion band diagram and the FDTD method incorporating the perfectly matched layer boundary condition is employed to simulate the image formation. In contrast to the common square PCs in which the negative refraction effect occurs in the first photonic band without negative phase propagation, in our suggested model system, the frequency with negative refraction exists in the second band and in near-infrared region. In this case, the wave propagates with a negative phase velocity and the evanescent waves can be supported. We also discuss the dependency of the image resolution and its location on surface termination, source location, and slab thickness. According to the simulation results, spatial resolution of the proposed PC lens is below the radiation wavelength.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.33A no.10
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• pp.160-167
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• 1996

A new pathlength deviation detection technique which is composed of michelson interferometer is described and verified experimentally. The technique uses a sub-threshold biased visible laser diode of 20$\mu$m coherence length as a low-coherent light source. And for zeroth-order fringe(which is the largest among fringes) identification we used a piezoelectric transducer with a large modulation smplitude, which enables without the need of constant velocity scanning, to distinguish reflection surfaces separated by more than 10$\mu$m with a resolution of less than half-wavelength.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.4
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.