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Confocal Scanning Microscopy : a High-Resolution Nondestructive Surface Profiler  

Yoo, Hong-Ki (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST)
Lee, Seung-Woo (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST)
Kang, Dong-Kyun (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST)
Kim, Tae-Joong (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST)
Gweon, Dae-Gab (Nano Opto-Mechatronics Lab., Department of Mechanical Engineering, KAIST)
Lee, Suk-Won (Micro Nano System Technology R/D Lab, Institute of Intelligent Systems, Mechatronics Center, Samsung Electronics Co, Ltd)
Kim, Kwang-Soo (Micro Nano System Technology R/D Lab, Institute of Intelligent Systems, Mechatronics Center, Samsung Electronics Co, Ltd)
Publication Information
International Journal of Precision Engineering and Manufacturing / v.7, no.4, 2006 , pp. 3-7 More about this Journal
Abstract
Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.
Keywords
Confocal microscopy; Nondestructive; Surface profiler; High resolution; 3D; Optical sectioning;
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Times Cited By KSCI : 1  (Citation Analysis)
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