• 제목/요약/키워드: step bump

검색결과 30건 처리시간 0.022초

플립칩 Sn-3.5Ag 솔더범프의 Electromigration과 Thermomigration 특성 (Electromigration and Thermomigration Characteristics in Flip Chip Sn-3.5Ag Solder Bump)

  • 이장희;임기태;양승택;서민석;정관호;변광유;박영배
    • 대한금속재료학회지
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    • 제46권5호
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    • pp.310-314
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    • 2008
  • Electromigration test of flip chip solder bump is performed at $140^{\circ}C$ C and $4.6{\times}10^4A/cm^2$ conditions in order to compare electromigration with thermomigration behaviors by using electroplated Sn-3.5Ag solder bump with Cu under-bump-metallurgy. As a result of measuring resistance with stressing time, failure mechanism of solder bump was evaluated to have four steps by the fail time. Discrete steps of resistance change during electromigration test are directly compared with microstructural evolution of cross-sectioned solder bump at each step. Thermal gradient in solder bump is very high and the contribution of thermomigration to atomic flux is comparable with pure electromigration effect.

경사진 전극링을 이용한 고균일도의 미세 솔더범프 형성 (Formation of Fine Pitch Solder Bump with High Uniformity by the Tilted Electrode Ring)

  • 주철원;이경호;민병규;김성일;이종민;강영일
    • 한국전기전자재료학회논문지
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    • 제18권9호
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    • pp.798-802
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    • 2005
  • The plating shape in the opening of photoresist becomes gradated shape in the fountain plating system, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. In this paper, the bubble flow from the wafer surface during plating process was studied and we designed the tilted electrode ring to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha-step$. In a-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were $\pm16.6\%,\;\pm4\%$ respectively.

경사진 전극링을 이용한 고균일도의 미세 솔더범프 형성 (Formation of fine pitch solder bump with high uniformity by the tilted electrode ring)

  • 주철원;이경호;민병규;김성일;이종민;강영일
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.323-327
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    • 2004
  • The bubble flow from the wafer surface during plating process was studied in this paper. The plating shape in the opening of photoresist becomes gradated shape in the fountain plating system, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. So, we designed the tilted electrode ring contact to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and ${\alpha}-step$. In ${\alpha}-step$ measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were ${\pm}16.6%,\;{\pm}4%$ respectively.

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하드디스크 슬라이더의 동적수치해석 (A Numerical Dynamic Simulation of the Slider in HDD)

  • 김도완;임윤철
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1999년도 제30회 추계학술대회
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    • pp.146-153
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    • 1999
  • A numerical dynamic simulation is necessary to investigate the capacity of the HDD. The slider surface become more and more complicated to make the magnetized area smaller and readback signal stronger. So a numerical dynamic simulation must be preceded to develop a new slider in HDD. The dynamic simulations of air-lubricated slider bearing have been peformed using FIFD(Factored Implicit Finite Difference) method. The governing equation, Reynolds equation Is modified with Fukui and Kaneko model(FK model) which includes the first and the second-order slip. The equations of motion for the slider bearing are solved simultaneously with the modified Reynolds equation for the case of three degrees of freedom. The slider transient response for disk step bump and slider impulse force is given for various case and for iteration algorithm and new algorithm.

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하드디스크 슬라이더의 동적수치해석 (A Dynamic Simulation of the Slider in HDD)

  • 김도완;임윤철
    • Tribology and Lubricants
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    • 제16권4호
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    • pp.295-301
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    • 2000
  • The dynamic simulation of slider in hard disk drive is performed using Factored Implicit Finite Difference method. The modified Reynolds equation with Fukui and Kaneko model is employed as a governing equation. Equations of motion for the slider of three degrees of freedom are solved simultaneously with the modified Reynolds equation. The transient responses of the slider for disk step bumps and slider impulse forces are shown for various cases and are compared for the iteration algorithm and new algorithm.

경사진 전극링에 의한 웨이퍼레벨패키지용 고균일도의 솔더범프 형성 (Formation of high uniformity solder bump for wafer level package by tilted electrode ring)

  • 주철원;이경호;민병규;김성일;이종민;강영일;한병성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.1
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    • pp.366-369
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    • 2003
  • The vertical fountain plating system with the point contact has been used in semiconductor industry. But the plating shape in the opening of photoresist becomes gradated shape, because bubbles from the wafer surface are difficult to escape from the deep openings, vias. So, we designed the tilted electrode ring contact to get uniform bump height on all over the wafer and evaluated the film uniformity by SEM and $\alpha$-step. A photoresist was coated to a thickness of $60{\mu}m$ and vias were patterned by a contact aligner After via opening, solder layer was electroplated using the fountain plating system and the tilted electrode ring contact system. In $\alpha$-step measurement, film uniformities in the fountain plating system and the tilted electrode ring contact system were ${\pm}16%,\;{\pm}3.7%$ respectively. In this study, we could get high uniformity bumps by the tilted electrode ring contact system. So, tilted electrode ring contact system is expected to improve workability and yield in module process.

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Maskless Screen Printing Process using Solder Bump Maker (SBM) for Low-cost, Fine-pitch Solder-on-Pad (SoP) Technology

  • Choi, Kwang-Seong;Lee, Haksun;Bae, Hyun-Cheol;Eom, Yong-Sung
    • 마이크로전자및패키징학회지
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    • 제20권4호
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    • pp.65-68
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    • 2013
  • A novel bumping process using solder bump maker (SBM) is developed for fine-pitch flip chip bonding. It features maskless screen printing process. A selective solder bumping mechanism without the mask is based on the material design of SBM. Maskless screen printing process can implement easily a fine-pitch, low-cost, and lead-free solder-on-pad (SoP) technology. Its another advantage is ternary or quaternary lead-free SoP can be formed easily. The process includes two main steps: one is the thermally activated aggregation of solder powder on the metal pads on a substrate and the other is the reflow of the deposited powder on the pads. Only a small quantity of solder powder adjacent to the pads can join the first step, so a quite uniform SoP array on the substrate can be easily obtained regardless of the pad configurations. Through this process, an SoP array on an organic substrate with a pitch of 130 ${\mu}m$ is, successfully, formed.

A Study on the Optimized Copper Electrochemical Plating in Dual Damascene Process

  • Yoo, Hae-Young;Chang, Eui-Goo;Kim, Nam-Hoon
    • Transactions on Electrical and Electronic Materials
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    • 제6권5호
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    • pp.225-228
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    • 2005
  • In this work, we studied the optimized copper thickness in Cu ECP (Electrochemical Plating). In order to select an optimized Cu ECP thickness, we examined Cu ECP bulge (bump, hump or over-plating amount), Cu CMP dishing and electrical properties of via hole and line trench over dual damascene patterned wafers split into different ECP Cu thickness. In the aspect of bump and dishing, the bulge increased according as target plating thickness decreased. Dishing of edge was larger than center of wafer. Also in case of electrical property, metal line resistance distribution became broad gradually according as Cu ECP thickness decreased. In conclusion, at least $20\%$ reduced Cu ECP thickness from current baseline; $0.8\;{\mu}m$ and $1.0\;{\mu}m$ are suitable to be adopted as newly optimized Cu ECP thickness for local and intermediate layer.

잠수물체에 의하여 발생되는 비선형파의 수치 시뮬레이션 (Numerical Simulations of Nonlinear Waves Generated by Submerged Bodies)

  • 강국진
    • 한국전산유체공학회지
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    • 제2권1호
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    • pp.13-20
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    • 1997
  • A fundamental study for the numerical scheme to simulate unsteady nonlinear waves by solving Euler equations is presented. First a conservation form and a non-conservation form of the Euler equations with a free surface fitted coordinate system are compared. Next, a time splitting fractional step method and an alternating direction implicit(ADI) method for the time integration are compared. For the comparative study, flow calculations around a bottom bump in a channel and a NACA 0012 hydrofoil in a flume are performed. The results show that the ADI method with a third order upwind differencing scheme is very efficient in reducing the computing time with keeping the accuracy, And, there is no distinct difference between two expression forms except that the non-conservative form shows faster wave propagating velocity than the conservation form. Some results are compared with experiments and show good agreement.

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체결단계를 고려한 승용차용 에어스프링 정특성 설계해석기법 개발 (Static FE Analysis of Air Springs for Passenger Cars Considering the Mounting Steps)

  • 이형욱;H.ThomasHahn;박진용
    • 소성∙가공
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    • 제24권6호
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    • pp.387-394
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    • 2015
  • Air springs are designed to support loads using the volume elasticity in a cylindrical shaped air bag made of a composite material with a rubber matrix and two plies of reinforced fibers. Recently, applications of these springs have been expanded from railway vehicles to passenger cars. The current study presents a finite element analysis of a manufactured air spring for a passenger car. The analysis was conducted including the mounting steps of the air bag using a static loading condition. A method for controlling the internal pressure and displacements during the mounting step was developed. The characteristic load curve and the shape of the air bag were in good agreement with the experimental data with respect to the design height, the bump height and the rebound height. Results indicate that ply angles of fibers vary from 38 degrees to 56 degrees during static loading.