• 한국가스학회지
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• 제24권5호
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• pp.74-81
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• 2020

일반적으로 반도체를 제조할 때는 인화성, 독성, 부식성의 유해·위험물질이 다수 사용되며, 특히 화학적 증착(CVD), 식각(Etch) 등의 공정에서는 특수가스를 사용하여 반도체를 제조하고 있다. 특수가스는 압축 또는 액화가스의 상태로 용기에 충전되어 있는데, 특수가스를 반도체 제조공정에 공급하는 설비로서 가스캐비닛(Gas Cylinder Cabinet)이 사용되고 있다. 이러한 가스공급시스템 내에서 실린더 이상 발생 시 배관·계측기 등 공급시스템의 안전 확보를 위해 가스실린더에 설치된 압력방출장치를 통해 가스가 방출하게 되는데, 이 경우 가스캐비닛 내부에 방출되는 가스가 캐비닛 외부로 누출될 위험성이 존재한다. 따라서 가스캐비닛 내부의 유체유동을 분석하여 누출에 따른 위험성을 파악하고 이에 대한 위험도 감소를 위한 대책을 제시하고자 한다.

• 한국가스학회지
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• 제25권2호
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• pp.42-51
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• 2021

반도체 제조에 사용하는 특수가스를 공급하는 설비는 인화성·독성·부식성을 지닌 유해·위험물질을 주로 취급하는데, 이러한 공급설비로는 주로 가스캐비닛이 사용되고 있다. 가스캐비닛 내 파열판을 통한 누출, 누출 개구부의 확대가 가능한 누출, 누출 개구부가 확대되지 않는 누출의 케이스별로 공급장치 내부 상태 및 외부로의 확산 영향을 누출 원인별로 분석하였다. 이 경우 누출 단면적에 따라 공급장치 외부로 가스가 누출되는 경우가 발생함을 확인하였다. 외부로 누출되는 가스의 농도에 따라 폭발분위기 형성 등 위험성이 존재하는 요인으로 작용하며, 위험에 따라 공급설비의 안전운전절차 등 제반 조치사항을 다시 검토할 필요가 있음을 확인하였다.

• Journal of Microbiology and Biotechnology
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• 제25권12호
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• pp.2116-2124
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• 2015

To understand the effects of physicochemical factors on nitrite transformation by microalgae, a lipid-rich Chlorella with high nitrite tolerance was cultured with 8 mmol/l sodium nitrite as sole nitrogen source under different conditions. The results showed that nitrite transformation was mainly dependent on the metabolic activities of algal cells rather than oxidation of nitrite by dissolved oxygen. Light intensity, temperature, pH, NaHCO₃ concentrations, and initial cell densities had significant effects on the rate of nitrite transformation. Single-factor experiments revealed that the optimum conditions for nitrite transformation were light intensity: 300 μmol/m²/s; temperature: 30℃ pH: 7-8; NaHCO₃ concentration: 2.0 g/l; and initial cell density: 0.15 g/l; and the highest nitrite transformation rate of 1.36 mmol/l/d was achieved. There was a positive correlation between nitrite transformation rate and the growth of Chlorella. The relationship between nitrite transformation rate (mg/l/d) and biomass productivity (g/l/d) could be described by the regression equation y = 61.3x (R² = 0.9665), meaning that 61.3 mg N element was assimilated by 1.0 g dry biomass on average, which indicated that the nitrite transformation is a process of consuming nitrite as nitrogen source by Chlorella. The results demonstrated that the Chlorella suspension was able to assimilate nitrite efficiently, which implied the feasibility of using flue gas for mass production of Chlorella without preliminary removal of NO_X.

• 반도체디스플레이기술학회지
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• 제5권4호
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• pp.23-27
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• 2006

Semiconductor industry has been dramatically developed with the information era of 21C, and the trend now is to consider that the technology of management system of the computer utility that has a high efficiency is important. This study investigated the intelligent decision system for residual gas purge process to effectively remove the residual gas in the tube after replacing the cylinder that is used for the gas cabinet or BSGS(Bulk Specialty Gas Supply System) of the semiconductor process. It was suggest from this study that it is possible to decide the type, frequency and volume of purge gas using various toxic gases which is necessary for each process. Also, this result will be utilized for operating the system, increasing the efficiency of management and saving energy.

• 한국가스학회지
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• 제15권3호
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• pp.74-78
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• 2011

반도체용 특수가스인 BF3는 반도체 생산공정에서 웨이퍼의 플라즈마 식각 공정과 화학증기증착(CVD : Chemical vapor deposition) chamber 세정공정 등에 사용되며, $BF_3$ 가스는 boron Ion Implant 공정에서 p-type doping을 위한 원료 등으로 사용된다. 본 연구에서는 간단한 공정으로 $NaBF_4$ 와 $KBF_4$의 열분해를 통하여 $BF_3$ 가스의 생산에 대해서 연구 하였다.

• KSTLE International Journal
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• 제3권1호
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• pp.30-37
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• 2002

There have been significant improvements in base oil quality in order to satisfy recent market needs. In particular requirements of passenger car motor oils have been leading the trend. Now, high quality base oils such as VHVI base oils and PAOs are to be formulated in order to meet the tight volatility specifications. The severe hydrocracking, hydro-isomerized dewaxing and hydro-finishing process with noble-metal based catalysts (named UCO lube process) developed by SK corporation has been introduced as one of economic hydroprocessing routes to produce high quality VHVI base oils and food grade white mineral oils from fuels hydrocracker residue. Product quality of UCO lube process is similar to PAO in. general performances and therefore provides satisfactory performance far all straightforward applications in general lubricants. However, when applied to specialty lubricants like transformer oils, spray oils and coning oils, severely hydrocracked base oils are known to have various compatibility problems with gas or surfactants formulated in them. These problems are related to the difference in their composition; inherent high paraffin contents and lack of dissolving ability, Fortunately, it was found that excellent specialty lubricants could be made by carefully selecting and formulating adequate additives and/or aromatic compounds. Moreover, these specialties with high quality VHVI base oils ofter various advantages over conventional base oil based products.

• 대한설비공학회:학술대회논문집
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• 대한설비공학회 2008년도 하계학술발표대회 논문집
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• pp.1309-1314
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• 2008

I.G.G is abbreviation for Inert Gas Generator, High temperature in Cargo Tank it desulfurize, exhausted and froze the gas that combined brimstone element and soot, then supply Inert gas by blower, and mack tank inside incombustible range this is equipment that nip in the bud the explosion. The blower for suppling inactivated gas has big impeller with heavy weight to achieve the high pressure, it causes a delay for first operation time and too much load is delivered to motor, total destruction by fire of motor is happening frequently. On this research, we will reduce the size & weight of impeller and install it with several stage, it makes an effect for reducing the first operation time. We also intend to contribute to efficient IGG blower design by research a flowing & pressure specialty from the diameter of impeller, number of blade, and size of casing.

• 한국생산제조학회지
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• 제21권3호
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• pp.446-450
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• 2012

I.G.G is abbreviation for inert gas generator high temperature in cargo tank it desulfurize, exhaust and froze the gas that combined brimstone element and soot, then supply inert gas by blower and mack tank inside incombustible range this is equipment that nip in the bud the explosion. The blower for suppling inactivated gas has big impeller with heavy weight to achieve the high pressure, it causes a delay for first operation time and too much load is delivered to motor, total destruction by fire of motor is happen frequently. On this research, we will reduce the size and weight of impeller and install it with several stage, it makes an effect for reducing the first operation time. We also intend to contribute to efficient I.G.G. blower design by research a flow rate and pressure specialty from the diameter of impeller number of blades and size of casing.

• 국제학술발표논문집
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• The 3th International Conference on Construction Engineering and Project Management
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• pp.375-380
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• 2009

Gas & Oil plant construction projects are increasing recently all over oil-producing countries. An EPC (Engineering, Procurement and Construction) company, which participates in the plant projects, should possess pertinent engineering licenses and EPC management skills to create high added-value. Nonetheless, there exist various risks involved in the EPC life cycle process due to such characteristics of construction projects as long duration of construction time and complicated processes along with the procured goods or services subjected to various logistics. The objective of this paper is to analyze the overall EPC life cycle for proper process and to examine various information and document. Additionally, the principal data for the analysis of the EPC process are derived from personal interviews with experts and specialty contractors of the plant projects. The results of this study would be widely used as a guide for efficient and effective management of overseas gas plant projects.

• 전기학회논문지
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• 제60권4호
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• pp.805-810
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• 2011

This paper deals with the method and algorithm used to find fault locations in gas insulated transmission line. The method uses UHF sensors and digital oscilloscope to detect discharge signals emitted to the outside through insulating spacer in the event of breakdown inside GIL. UHF sensors are the external type and installed at outside of insulating spacers of GIL. And we used wavelet signal processing to analyze the discharge signals and confirm the exact fault location findings in the GIL test line. This method can overcome demerit of TDR(Time Domain Reflectometer) method having been applied to detect fault location for conventional underground transmission lines, and Ground Fault Sensors used in conventional GIS systems. TDR method requires high level of specialty and experience in analyzing the measured signals. Ground fault sensors are installed inside GIL and can be destroyed by high transient voltage. This paper's method can simplify the fault location process and minimize the damage of sensors. In addition, this method can estimate the fault location only by the time difference when discharge signals are arrived to detecting sensors at the ends of GIL sections without reasons of breakdown. To test the performance of our method, we installed sensors at the ends of test line of GIL(84m) and sensed discharge signals occurred in GIL, energized with AC voltage generator up to 700kV.