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http://dx.doi.org/10.7842/kigas.2020.24.5.74

A study on the Internal Flow Analysis of Gas Cylinder Cabinet for Specialty Gas of Semiconductor  

Kim, Jung-Duck (Dept. of Safety Engineering, Korea National University of Trans.)
Han, Seung-A (Environment & Safety Center, Samsung Electronic DS.)
Yang, Won-Baek (Dept. of Industrial Safety Engineering, Soongsil Cyber Univ.)
Rhim, Jong-Guk (Dept. of Safety Engineering, Korea National University of Trans.)
Publication Information
Journal of the Korean Institute of Gas / v.24, no.5, 2020 , pp. 74-81 More about this Journal
Abstract
In general, when manufacturing a semiconductor, a number of hazardous and dangerous substances such as flammability, toxic, and corrosiveness are used. In particular, semiconductors are manufactured using specialty gas in processes such as CVD and etching. The specialty gas is filled in a container in the state of compressed or liquefied gas, and a gas cylinder cabinet is used as a facility for supplying this specialty gas to the semiconductor manufacturing process. When a accident occurs in the gas supply system, gas is released through a pressure release device installed in the gas cylinder to secure the safety of the supply system. In this case, the gas released inside the gas cabinet, there is a risk of leaking to the outside. After that, by analyzing the gas flow in the gas cabinet, it is intended to identify the risk associated with leak and to provide measures to prevent accidents.
Keywords
gas cylinder; gas cabinet; gas cylinder cabinet; specialty gas; semiconductor;
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