• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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• pp.280-284
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• 2005

Recently, the demands of the high quality LCD display device have increased. We have developed the smart LCD that photo sensor is integrated in. Amorphous silicon TFTs have photo leakage current characteristics when the channel of TFTs are lighted on. This characteristic has applied in our device. We expect that photo sensor integrated LCDs have lots of merits in mobile display device, note PC panel and LCD TV.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 추계학술대회 논문집
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• pp.445-447
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• 2000

The terminal and core(wire conductor) in a Harness processing is connected by putting them in a applicator by virtue of a manual operation. A normal or abnormal condition of crimping connections is nearly determined by a skilled worker. In general, a skilled worker operates a press motor with a foot switch by pressing on foot and puts a wire conductor into a press with one hand. By doing so, sufficient efficiency is not obtained by a worker. In this paper, a basic study has done to make improve an efficiency by finding the normal arrangement out as to whether a terminal and wire conductor in Harness are placed on the right position or not with a quadrant plane photo position sensor.

• 센서학회지
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• 제14권5호
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• pp.343-349
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• 2005

Carbon nitride films were deposited on various substrates for humidity sensors with meshed electrode by reactive RF magnetron sputtering system. As the ratio of injected nitrogen was decreased, the sensitivity of sensor was increased. When the ratio of injected nitrogen was $50{\sim}70%$, the sample showed the best linearity. The sensor impedance changed from $95.4{\;}k{\Omega}$ to $2.1{\;}k{\Omega}$ in a relative humidity range of 5 % to 95 %. The humidity sensors based on silicon wafer revealed higher lineality and faster response than those of alumina or quartz substrates. The adsorption saturation time of the sample was about 80 sec, and its desorption time was about 90 sec.

• 로봇학회논문지
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• 제17권3호
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• pp.282-287
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• 2022

High shear adhesion on wet and rough surfaces and tactile feedback of gripping forces are highly important for realizing robotic gripper systems. Here, we propose a bioinspired robotic gripper with highly shear adhesion and sensitive pressure sensor for tactile feedback systems. To achieve them, we fabricated multi-walled carbon nanotube sensing layer on a thin polymeric adhesive layer of polydimethylsiloxane. With densely hexagonal-packed microstructures, the pressure sensor achieved 9 times the sensing property of a sensor without microstructures. We then assembled hexagonal microstructures inspired by the toe pads of a tree frog, giving strong shear adhesion under both dry and wet surfaces such as silicon (42 kPa for dry and ~30 kPa for underwater conditions) without chemical-residues after detachment. Our robotic gripper can prevent damage to weak or smooth surfaces that can be damaged at low pressure through pressure signal feedback suggesting a variety of robotic applications.

• 센서학회지
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• 제13권5호
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• pp.378-382
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• 2004

A micromachined fluidic structure for the introduction of liquid samples into a chip-based sensor array composed of individually addressable polymeric microbeads has been developed. The structure consists of a separately attached cover glass, a single silicon chip having micromachined channels and microbead storage cavities, and a glass carver. In our sensor array, transduction occurs via colorimetric and fluorescence changes to receptors and indicator molecules that are covalently attached to termination sites on the polymeric microbeads. Data streams are acquired for each of the individual microbeads using a CCD. One of the key parts of the structure is a passive fluid introduction system driven only by capillary force. The velocity of penetration of a horizontal capillary for the device having a rectangular cross section has been derived, and it is quite similar to the Washburn Equation calculated for a pipe with a circular cross section having uniform radius. The test results show that this system is useful in a ${\mu}$-TAS and biomedical applications.

• 전기학회논문지
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• 제58권3호
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• pp.573-577
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• 2009

Piezoresistive pressure sensor have become the successfully-commercialized MEMS product and the related technologies have been well developed over the past decades. Regarding the design methodology, however, the coupled-physics FEM analyses of the transducer itself and the signal-processing circuitry design based on the conventional EDA are separated and both of the analyses were sequentially processed for the full design of the pressure sensor. For the fast and effective R&D, new design methodology is proposed in this paper where the FEM results are linked to the EDA environment and therefore most of the design works can be done in the EDA environments, which means the time-consuming FEM analyses can be minimized. In order to verify the proposed approach, a typical piezoresistive pressure sensor having the silicon diaphragm and piezoresistors was modeled and analyzed based on the proposed methodology. The verification results showed that the simulated results were matched well with the measured data within the 7% difference while the simulation time was reduced less than 5% compared to the conventional methodology. Through the proposed approach, various types of the piezoresistive pressure sensors can be developed in more effective way.

• 센서학회지
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• 제29권4호
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• pp.270-274
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• 2020

In this study, a read-out integrated circuit (ROIC) that can be applied to a colorimetry-based optical sensor for analyzing total phosphorus and total nitrogen was developed and characterized. The proposed ROIC minimizes the effect on temperature fluctuation, improves sensitivity, and extends the dynamic range by utilizing a dual optical path and feedback control circuit. Using a dual optical path makes it possible to calibrate the output signal of the optical sensor automatically, along with the temperature fluctuation. The calibrated voltage is fed back into the measurement stage; thus, the output current of the measurement is adaptively controlled. As a result, the sensitivity and dynamic range of the proposed ROIC are improved. Finally, a total-phosphorus analysis was conducted by utilizing the ROIC. The ROIC was found to operate stably over a wide temperature range.

• JSTS:Journal of Semiconductor Technology and Science
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• 제3권2호
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• pp.83-88
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• 2003

The reset operation of a CCD image sensor was improved using charge trapping of a MOS structure to realize a loe voltage driving. A DC bias generating circuit was added to the reset structure which sets reference voltage and holds the signal charge to be detected. The generated DC bias is added to the reset pulse to give an optimized voltage margin to the reset operation, and is controlled by adjustment of the threshold voltage of a MOS transistor in the circuit. By the pulse-type stress voltage applied to the gate, the electrons and holes were injected to the gate dielectrics, and the threshold voltage could be adjusted ranging from 0.2V to 5.5V, which is suitable for controlling the incomplete reset operation due to the process variation. The charges trapped in the silicon nitride lead to the positive and negative shift of the threshold voltage, and this phenomenon is explained by Poole-Frenkel conduction and Fowler-Nordheim conduction. A CCD image sensor with $492(H){\;}{\times}{\;}510(V)$ pixels adopting this structure showed complete reset operation with the driving voltage of 3.0V. The resolution chart taken with the image sensor shows no image flow to the illumination of 30 lux, even in the driving voltage of 3.0V.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.132-136
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• 2004

대기중의 NO₂ 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. WO₃와 같은 가스 감응물질을 목표 온도까지 가열하기 위해서 마이크로 핫플레이트를 가스센서에 장착하였다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘 웨이퍼 기판의 온도가 거의 상온에 가까워 핫플레이트에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 마이크로 핫플레이트의 형상을 변경함으로써 가스 감지물질의 온도 균일도를 높일 수 있다.

• 대한기계학회논문집B
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• 제33권8호
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• pp.573-579
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• 2009

A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.