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http://dx.doi.org/10.5369/JSST.2005.14.5.343

Humidity sensing properties of carbon nitride film according to fabrication conditions  

Lee, Sung-Pil (Department of Electronic and Electrical Engineering, Kyungnam university)
Kim, Jung-Hoon (Department of Electronic and Electrical Engineering, Kyungnam university)
Lee, Hyo-Ung (Department of Electronic and Electrical Engineering, Kyungnam university)
Lee, Ji-Gong (Department of Electronic and Electrical Engineering, Kyungnam university)
Publication Information
Journal of Sensor Science and Technology / v.14, no.5, 2005 , pp. 343-349 More about this Journal
Abstract
Carbon nitride films were deposited on various substrates for humidity sensors with meshed electrode by reactive RF magnetron sputtering system. As the ratio of injected nitrogen was decreased, the sensitivity of sensor was increased. When the ratio of injected nitrogen was $50{\sim}70%$, the sample showed the best linearity. The sensor impedance changed from $95.4{\;}k{\Omega}$ to $2.1{\;}k{\Omega}$ in a relative humidity range of 5 % to 95 %. The humidity sensors based on silicon wafer revealed higher lineality and faster response than those of alumina or quartz substrates. The adsorption saturation time of the sample was about 80 sec, and its desorption time was about 90 sec.
Keywords
carbon nitride; humidity sensors; surface image; sensing mechanism and thin film;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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