• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.12 s.117
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• pp.1272-1278
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• 2006

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.16 no.5
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• pp.999-1008
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• 2012

Unlike the existing CMOS chip, ISB (Intelligent Silicon Bead) is new concept biochip equipped with optical communication and memory function. It uses the light for power of SoC CMOS and interface with external devices therefore it is possible to miniaturize a chip size and lower the cost. This paper introduces an input protocol and a design of the low power and the low area to transfer the power and the signal through a single optical signal applied from external reader device to bead chip at the same time. It is also verified through simulation and measurement. In addition, low-power PROM is designed for recording and storing ID of a chip and it is successful in obtaining the value of output according to the optical input. Through this study, a new type biochip development can be expected by solving high cost and a limit of miniaturizing a chip area problem of an existing RFID.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2004.11a
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• pp.3-4
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• 2004

A flexible Packaging scheme, which embedded chip packaging, has been developed using a thinned silicon chip. Mechanical characteristics of thinned silicon chips are examined by bending test and finite element analysis. Thinned silicon chips ($t<50{\mu}m$) are fabricated by chemical etching process to avoid possible surface damages on them. These technologies can be use for a real-time monitoring of blood pressure. Our research targets are implantable blood pressure sensor and its telemetric measurement. By winding round the coronary arteries, we can measure the blood pressure by capacitance variation of blood vessel.

• Journal of the Korean Society of Industry Convergence
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• v.12 no.4
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• pp.215-219
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• 2009

A packaging technology based on flip-chip bonding and Pb-free solder for silicon pressure sensors on printed circuit board (PCB) is presented. First, the bump formation process was conducted by Pb-free solder. Ag-Sn-Cu solder and the pressed-screen printing method were used to fabricate solder bumps. The fabricated solder bumps had $189-223{\mu}m$ width, $120-160{\mu}m$ thickness, and 5.4-6.9 standard deviation. Also, shear tests was conducted to measure the bump shear strength by a Dage 2400 PC shear tester; the average shear strength was 74 g at 0.125 mm/s of test speed and $5{\mu}m$ shear height. Then, silicon pressure sensor packaging was implemented using the Pb-free solder and bump formation process. The characteristics of the pressure sensor were analogous to the results obtained when the pressure sensor dice are assembled and packaged using the standard wire-bonding technique.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.15 no.8
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• pp.5195-5200
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• 2014

White LEDs are expected to be applied widely as a lighting system. To make white LED chips, one requires a mixture with silicon and a phosphor coating on a LED blue chip. The process of preparing a mixture with silicon using phosphor involves the use of discarded phosphor in the chip process. Reducing the costs of chip production depends on many factors, such as the mixture errors, exposure over time of silicon, and changes in the characteristics of blue chip. This paper reports the characteristics of a white LED chip manufactured through a reproduction process of derelict phosphor. This method was applicable to a real LED flashlight. A derelict phosphor chip showed similar results to a normal white chip for the degradation of cd 3.2[Cd] and 3.6[Cd], color temperature, 57[K] and 58[K], and maximum white wavelength 444.3[nm] and 449.8[nm]. These results are expected to make ea great contribution to cost reduction.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.2
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• pp.334-337
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• 2007

After the advent of micro-Total Analysis Systems(${\mu}-TAS$) based on silicon various polymer for microfluidic chip has been studied. Polymer materials for microfluidic compared with silicon and glass which were traditional materials of a microfluidic chip, have the advantages of economical efficiency simple manufacturing process and wide materials selectivity corresponding to fluids. Surface energy of polymers we, however lower than silicon or glass. To overcome this problem, various surface modification methods have been investigated. The surface modification using laser has the advantage of the simple experiment that only directly irradiated laser beam on the material surface in the air. This work discuss the surface modification of polymethly methacrylate(PMMA) by 4th harmonic Nd:YAG laser (${\lambda}266nm$, pulse) treatment. After the laser treatment, the PMMA surface was investigated using a contact angle measuring instrument. The contact angle was decreased with a increase of the surface oxygen content. This result means the surface energy of PMMA was increased by the laser treatment without changing of its bulk characteristics.

• Journal of electromagnetic engineering and science
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• v.11 no.4
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• pp.282-289
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• 2011

GHz electromagnetic interference (EMI) characteristics are analyzed for a 3dimensional (3D) stacked chip power distribution network (PDN) with through silicon via (TSV) connections. The EMI problem is mostly raised by P/G (power/ground) noise due to high switching current magnitudes and high PDN impedances. The 3D stacked chip PDN is decomposed into P/G TSVs and vertically stacked capacitive chip PDNs. The TSV inductances combine with the chip PDN capacitances produce resonances and increase the PDN impedance level in the GHz frequency range. These effects depend on stacking configurations and P/G TSV designs and are analyzed using the P/G TSV model and chip PDN model. When a small size chip PDN and a large size chip PDN are stacked, the small one's impedance is more seriously affected by TSV effects and shows higher levels. As a P/G TSV location is moved to a corner of the chip PDNs, larger PDN impedances appear. When P/G TSV numbers are enlarged, the TSV effects push the resonances to a higher frequency range. As a small size chip PDN is located closer to the center of a large size chip PDN, the TSV effects are enhanced.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.7
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• pp.131-137
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• 2016

In this paper, we analyze the impedance analysis of vertical interconnection through-silicon vias (TSV) that is being studied for the purpose of improving the degree of integration and an electric feature in 3D IC. Also, it is to improve the performance and the degree of integration of the three-dimensional integrated circuit system which can exceed the limits of conventional two-dimensional a IC. In the future, TSV technology in full-chip 3-dimensional integrated circuit system design is very important, and a study on the electrical characteristics of the TSV for high-density and high-bandwidth system design is very important. Therefore, we study analyze the impedance influence of the TSV in accordance with the distance and frequency in a multiple TSV-to-TSV for the purpose of designing a full-chip three-dimensional IC. The results of this study also are applicable to semiconductor process tools and designed for the manufacture of a full-chip 3D IC.

• Proceedings of the IEEK Conference
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• 1999.06a
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• pp.199-202
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• 1999

In this paper, a possibility of building various types of RF passive components using the silicon micromachining technique has been examined with special emphasis on the wireless and mobile communication applications. Silicon micromachining technique is compatible with conventional silicon IC process and could provide a possibility of integrating base-band signal processing units and RF passive and active circuit components all in one silicon wafer rendering implementation of system-on-chip paradigm for future mobile and wireless communication systems.