• 유기물자원화
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• 제32권1호
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• pp.21-29
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• 2024

본 연구에서는 반도체 패키징의 몰딩 공정에서 발생하는 EMC 폐기물을 재활용하여 실리카 나노입자를 성공적으로 제조하였으며, 이를 CMP 공정용 슬러리의 연마재 물질로 응용하였다. 상세히는, EMC 폐기물을 암모니아 용액과 소니케이터를 활용하여 열과 에너지를 가하는 에칭 과정을 통해 실리카 나노입자를 제조하기 위한 실라놀 전구체를 추출하였다. 이후 실라놀 전구체를 활용하여 졸-겔법을 통해 약 100nm를 나타내는 균일한 구형의 실리카 나노입자(e-SiO₂, experimentally synthesized SiO₂)를 합성하였다. 제조한 e-SiO₂는 물리화학적 분석을 통해 상용화된 실리카 입자(c-SiO₂, commercially SiO₂)와 동일한 형상과 구조를 지니고 있음을 확인할 수 있었다. 최종적으로, e-SiO₂를 연마재로 사용하여 CMP 공정용 슬러리를 제조하여 실제적인 반도체 칩의 연마 성능을 확인하였다. 그 결과, 반도체 칩의 표면에 존재하던 스크래치가 성공적으로 제거되어 매끈한 표면으로 바뀌게 된 것을 확인하였다. 본 연구 결과는 물질의 재활용법에 대한 설계를 통해 EMC 폐기물의 부가가치를 향상시키기 위하여 반도체 공정에서 대표적으로 활용되는 고부가가치 소재인 실리카 입자로 성공적으로 제조하고 이를 응용하는 방법에 대해 제시하였다.

• 폴리머
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• 제32권6호
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• pp.573-579
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• 2008

두 단계 에멀젼 중합을 통해 PBA/PS 코어-셸 고분자 나노입자 및 실리카가 함유된 유기-무기 하이브리드 재료를 합성하였다. 실리카 나노입자는 코어-셸 고분자 에멀젼과 혼합되어 $Na_2CO_3$가 녹아있는 증류수/메탄올의 혼합용매에 침전되었다. 건조 후 압축성형으로 제조된 시편의 물성평가를 통해 탄성계수는 코어-셸 나노입자의 크기가 작을수록, 분자량이 클수록, 실리카가 많이 첨가될수록 증가함을 확인하였다. 또한 PBA/PS 코어-셸 고분자는 실리카가 13.0 wt% 첨가되었음에도 불구하고 25$^\circ$C, 13.8 MPa, 5분의 조건에서 우수한 압력가소성 특징을 나타내었으며 6배 이상 증가된 탄성계수가 얻어졌다.

• Structural Engineering and Mechanics
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• 제69권5호
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• pp.547-555
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• 2019

In this study, vibration analysis of a concrete foundation-reinforced by $SiO_2$ nanoparticles resting on soil bed is investigated. The soil medium is simulated with spring constants. Furthermore, the Mori-Tanaka low is used for obtaining the material properties of nano-composite structure and considering agglomeration effects. Using third order shear deformation theory or Reddy theory, the total potential energy of system is calculated and by means of the Hamilton's principle, the coupled motion equations are obtained. Also, based an analytical method, the frequency of system is calculated. The effects of volume percent and agglomeration of $SiO_2$ nanoparticles, soil medium and geometrical parameters of structure are shown on the frequency of system. Results show that with increasing the volume percent of $SiO_2$ nanoparticles, the frequency of structure is increased.

• 한국산학기술학회논문지
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• 제14권5호
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• pp.2529-2535
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• 2013

SPEEK/PWA/silica 전해질 복합막을 제조하기 위하여 졸-겔 방법을 이용하였다. 졸-겔반응의 전구체로는 TEOS를 사용하였으며 첨가제 겸 촉매로는 phosphotungstic acid(PWA)를 사용하였다. FE-SEM 분석을 통하여 PWA 및 silica 나노입자들은 고분자속으로 균일하게 분산되는 것을 확인할 수 있었다. SPEEK/PWA/silica 복합막의 함수율은 TEOS의 비율이 낮은 경우에는 TEOS의 증가에 따라 함수율이 감소하였지만 TEOS의 비율이 높은 경우에는 TEOS의 영향을 적게 받았다. SPEEK/PWA/silica 복합막의 이온전도도는 함수율의 변화와 유사한 경향을 나타내었으며 TEOS의 비율이 증가함에 따라 처음에는 이온전도도가 감소하다가 다시 증가하는 경향을 나타내었다. SPEEK/PWA/silica 복합막의 메탄올 투과도는 TEOS의 농도가 증가함에 따라 투과도가 감소하는 경향을 나타내었다.

• 한국산학기술학회논문지
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• 제21권4호
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• pp.20-25
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• 2020

나노과학과 나노기술의 발전에 따라 선택적 패턴 성장을 위한 기술이 주목을 받고 있다. 실리카(Silica) 나노입자는 바이오 라벨링, 바이오 이미징 및 바이오 센싱에 사용되고 있는 유망한 나노소재이다. 본 연구에서는 실리카 나노입자를 수정된 스토버 방법(Stöber Method)인 졸겔(Sol-Gel) 공정으로 합성하였다. 또한 기판의 표면을 미세접촉프린팅 기술로 발수 처리하여 실리카 나노입자를 선택적으로 패턴 성장시켰다. 합성된 실리카 나노입자의 크기와 선택적으로 패턴 성장된 실리카 나노입자의 표면형상을 전계방출 주사전자현미경(Field Emission Scanning Electron Microscopy, FE-SEM)으로 조사하였고, 기판의 표면 기능화에 따른 기판의 접촉각 특성을 조사하였다. 그 결과 OTS 용액으로 발수 처리된 기판에서는 실리카 나노입자를 스핀 코팅하였을 때, 실리카 나노입자를 관찰할 수 없었으나, KOH 용액으로 친수 처리된 기판에서는 실리카 나노입자가 잘 코팅되는 것을 확인하였다. 또한 미세접촉프린팅 기술로 발수 처리한 기판영역 외에서만 실리카 나노입자가 선택적으로 패턴 성장하는 것을 FE-SEM으로 확인하였다. 이러한 실리카 나노입자의 패턴성장 특성을 염료가 도핑 된 실리카 나노입자에 적용한다면, 실리카 나노입자의 패턴 성장 기술은 바이오 이미징 및 바이오 센싱 분야에 유용하게 활용될 것으로 기대된다.

• Transactions on Electrical and Electronic Materials
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• 제15권6호
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• pp.291-296
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• 2014

In recent years, researchers have extensively investigated polymers filled with inorganic nanoparticles because these materials present improved physical properties relative to those of conventional unfilled polymers. Oxides, silica in particular, are the most commonly used inorganic particles because they possess good properties and can be fabricated at a low cost. However, oxides are hydrophilic in nature, and this leads to the presence of water at the interface between the nanoparticles and the polymer matrix. Due to the predominance of particle-matrix interfaces in nanocomposites, the presence of water at the interlayer region can be problematic. Moreover, the hydrophobic nature of most polymers, particularly for polyolefins such as polyethylene, may make it difficult to remove this interfacial water. In this paper, as-received and moistened samples of agglomerated nanosilica/polyethylene were dried using an isothermal treatment at $60^{\circ}C$, and the efficacy of this treatment was studied using dielectric spectroscopy. The Maxwell-Wagner-Sillars relaxation peaks were observed to shift to lower frequencies by three decades, and this was linked to a modification of the water content, due to drying, at the interfaces between silica and polyethylene and at the interfaces within the nanosilica agglomerates. The evolution of the extracted retardation time is explained by the nanosilica hydrophily and the free volume introduced by the nanoparticles.

• Structural Engineering and Mechanics
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• 제86권1호
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• pp.109-118
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• 2023

Any place where exercise is common, such as a club, sports hall, or school, is considered a place for teaching sports. When doing sports, a very safe environment for sports should be chosen. The athlete should consider the safety of sports facilities and equipment, and if there is a defect, he should refrain from exercising in these places. The safety of sports facilities is very effective in creating people's sports activities, with the benefits of staying away from physical harm, enjoying sports, and having mental peace. Everyone has the right to participate in sports and recreation and to ensure that they enjoy a safe environment. The ability to manage and solve issues that may arise plays the most critical role in creating a safe environment. The quality of construction materials used for the construction of sports facilities is of great importance. In this work, the resistance and water repellency of concrete constituents for the construction of sports buildings have been investigated by nanoscience. Nano-concrete material solves the main problem of concrete surfaces, i.e., the entry of water and humidity into the structure. It also gives it a self-cleaning ability with its water repellency. Nanoparticles are placed between pores and cover the cracks, which causes roughness in the surface structure of concrete. The high roughness of the surface of the coated concrete caused its super-hydrophobicity. In hydrophobic surfaces, the higher the contact angle, the more hydrophobic the surface will be. In order to investigate the hydrophobic properties, silica nanoparticles, silica nanoparticles, and fly ash were prepared on concrete, and their properties were analyzed.

• Elastomers and Composites
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• 제54권2호
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• pp.149-155
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• 2019

Controlled mass transport in response to stimuli is essential for drug carriers. The complexity of the signaling system under physiological conditions has led researchers to develop precise nanocontainers that respond to stimuli in the physiological environment. Owing to several reasons, soft nanocontainers such as liposomes and micelles have been investigated for use as drug delivery systems. However, such carriers often suffer from the undesired leakage of drug molecules. In contrast, inorganic nanocontainers are robust, and their surfaces can be easily functionalized. For example, mesoporous silica nanoparticles equipped with gatekeeper molecules are increasingly being used for the controlled release of drug molecules in response to the desired stimuli. Since the development of the first hybrid nanocontainer comprising molecular machines, multiple versions of such gatekeeper systems featuring significantly improved stability and precise response to stimuli have been reported. In this study, various methods for incorporating photoresponsive nanocontainers with porous channels are developed.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.217-217
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• 2011

Recently, demand for thermally stable metal nanoparticles suitable for chemical reactions at high temperatures has increased to the point to require a solution to nanoparticle coalescence. Thermal stability of metal nanoparticles can be achieved by adopting core-shell models and encapsulating supported metal nanoparticles with mesoporous oxides [1,2]. However, to understand the role of metal-support interactions on catalytic activity and for surface analysis of complex structures, we developed a novel catalyst design by coating an ultra-thin layer of titania on Pt supported silica ($SiO_2/Pt@TiO_2$). This structure provides higher metal dispersion (~52% Pt/silica), high thermal stability (~600$^{\circ}C$) and maximization of the interaction between Pt and titania. The high thermal stability of $SiO_2/Pt@TiO_2$ enabled the investigation of CO oxidation studies at high temperatures, including ignition behavior, which is otherwise not possible on bare Pt nanoparticles due to sintering [3]. It was found that this hybrid catalyst exhibited a lower activation energy for CO oxidation because of the metal-support interaction. The concept of an ultra-thin active metal oxide coating on supported nanoparticles opens-up new avenues for synthesis of various hybrid nanocatalysts with combinations of different metals and oxides to investigate important model reactions at high-temperatures and in industrial reactions.

• 대한금속재료학회지
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• 제48권9호
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• pp.856-860
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• 2010

Silver nanoparticles were formed on silica substrates through thin film dewetting at high temperature. The microstructural and morphological evolution of the particles were characterized as a function of processing variables such as initial film thickness, annealing time, and temperature. Silver thin films were deposited onto the silica using a pulsed laser deposition system and annealed in reducing atmosphere to induce agglomeration of the films. The film thicknesses before dewetting were in the range of 5 to 25 nm. A noticeable agglomeration occurs with annealing at temperatures higher than $300^{\circ}C$, and higher annealing temperature increases particle size uniformity for the same film thickness sample. Average particle size linearly correlates to the film thickness, but it does not strongly depend on annealing temperature and time, although threshold temperature for complete dewetting increases with an increase of film thickness. Lower annealing temperature develops faceted surface morphology of the silver particles by enhancing the growth of the low index crystal plane of the particles.