The Electric Control Method on the Packaging Technology for Non-Conductive Materials Using the Surface Processing Cavity Pressure Sensor (표면 가공형 캐비티 압력센서를 이용하여 비전도성 물질용 패키지 기술에 전기적 제어방식 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.33 no.5
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- pp.350-354
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- 2020