Proceedings of the IEEK Conference (대한전자공학회:학술대회논문집)

The Institute of Electronics and Information Engineers (대한전자공학회)
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Characteristics of CMOS ISFET pH sensor as packaging type

Packaging 형태에 따른 CMOS ISFET pH 센서의 특성평가

  • Shin, Kyu-Sik (Nano sensor Research Center of Korea Electronics Technology Institute) ;
  • Roh, Ji-Hyoung (Nano sensor Research Center of Korea Electronics Technology Institute) ;
  • Cho, Nam-Kyu (Nano sensor Research Center of Korea Electronics Technology Institute) ;
  • Lee, Dae-Sung (Nano sensor Research Center of Korea Electronics Technology Institute)
  • 신규식 (전자부품연구원 나노센서센터) ;
  • 노지형 (전자부품연구원 나노센서센터) ;
  • 조남규 (전자부품연구원 나노센서센터) ;
  • 이대성 (전자부품연구원 나노센서센터)
  • Published : 2008.06.18
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Abstract

Highly integrated ISFETs require the monolithic implementation of ISFETs, CMOS electronics, and additional sensors on the same chip This paper presents novel packaging type of CMOS ISFET pH sensor using standard CMOS FET chip and extended sensing membrane which is separated from CMOS FET. This proposed packaging type will make it easy to fabricate CMOS ISFET pH sensors

Keywords