• Journal of Korean Society of Environmental Engineers
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• v.29 no.8
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• pp.909-914
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• 2007

Fluorine compounds are the essential chemicals for wet processes of semiconductor and LCD production line. Problems of conventional treatments for fluoride wastewater are their high operation costs and low fluoride removal capacity. In this study, cement paste containing various Ca-bearing hydrates such as portlandite, calcium silicate hydrate(CSH), and ettringite was investigated for fluoride removal. The objectives of this study are to assess the feasibility of using cement paste cured mixture of cement and water as an alternative agent for treatment of fluoride wastewater and to investigate fluoride removal capacity of the cement paste. The performance of cement paste was comparable to that of lime in the kinetic test. In column experiment where the effluent fluoride concentrations were below 0.5 mg/L. Then the leached calcium reached the maximum level of 800 mg/L. The nitrate reduced to the level of less than 10 mg/L. Nitrate in the wastewater was exchanged with interlayer sulfate of these cement hydrate LDHs. Phosphate concentration could be reduced to 10 mg/L by forming calcium phosphate. These results indicate that the cement paste generally has advantageous characteristics as an economical and viable substitute for lime to remove fluoride.

• Journal of the Institute of Electronics Engineers of Korea SP
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• v.48 no.6
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• pp.18-26
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• 2011

Debates concerning the competitive edge of leading 3DTV technology of the shutter glasses (SG) 3D and the film-type patterned retarder (FPR) are flaring up. Although SG technology enables Full-HD 3D vision, it requires complex systems including the sync transmitter (emitter), the sync processor chip, and the LCD lens in the active shutter glasses. In addition, the transferred sync-signal is easily affected by the external noise and a 3DTV viewer may feel flicker-effect caused by cross-talk of the left and right image. The operating current of the sync processor in the 3DTV active shutter glasses is gradually increasing to compensate the sync reconstruction error. The proposed chip is a low-power hardware sync processor based discrete-event SoC(system on a chip) designed specifically for the 3DTV active shutter glasses. This processor implements the newly designed power-saving techniques targeted for low-power operation in a noisy environment between 3DTV and the active shutter glasses. This design includes a hardware pre-processor based on a universal edge tracer and provides a perfect sync reconstruction based on a floating-point timer to advance the prior commercial 3DTV shutter glasses in terms of their power consumption. These two techniques enable an accurate sync reconstruction in the slow clock frequency of the synchronization timer and reduce the power consumption to less than about a maximum of 20% compared with other major commercial processors. This article describes the system's architecture and the details of the proposed techniques, also identifying the key concepts and functions.

• Korean Journal of Materials Research
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• v.20 no.12
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• pp.676-680
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• 2010

Most TCOs such as ITO, AZO(Al-doped ZnO), FTO(F-doped $SnO_2$) etc., which have been widely used in LCD, touch panel, solar cell, and organic LEDs etc. as transparent electrode material reveal n-type conductivity. But in order to realize transparent circuit, transparent p-n junction, and introduction of transparent p-type materials are prerequisite. Additional prerequisite condition is optical transparency in visible spectral region. Oxide based materials usually have a wide optical bandgap more than ~3.0 eV. In this study, single-phase transparent semiconductor of $SrCu_2O_2$, which shows p-type conductivity, have been synthesized by 2-step solid state reaction at $950^{\circ}C$ under $N_2$ atmosphere, and single-phase $SrCu_2O_2$ thin films of p-type TCOs have been deposited by RF magnetron sputtering on alkali-free glass substrate from single-phase target at $500^{\circ}C$, 1% $H_2$/(Ar + $H_2$) atmosphere. 3% $H_2$/(Ar + $H_2$) resulted in formation of second phases. Hall measurements confirmed the p-type nature of the fabricated $SrCu_2O_2$ thin films. The electrical conductivity, mobility of carrier and carrier density $5.27{\times}10^{-2}S/cm$, $2.2cm^2$/Vs, $1.53{\times}10^{17}/cm^3$ a room temperature, respectively. Transmittance and optical band-gap of the $SrCu_2O_2$ thin films revealed 62% at 550 nm and 3.28 eV. The electrical and optical properties of the obtained $SrCu_2O_2$ thin films deposited by RF magnetron sputtering were compared with those deposited by PLD and e-beam.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.51-60
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• 2005

This paper describes a robust control scheme for high-speed and long stroke scanning motion of high precision linear motor system consisting of linear motor, air bearing guide and position measurement system using heterodyne interferometer. Nowadays, semiconductor process and inspection of wafer or LCD need high speed and long travel length for their high throughput and extremely small velocity fluctuations or tracking errors. In order to satisfy these conditions, linear motor system are widely used because they have large thrust force and do not need motion conversion mechanisms such as ball screw, rack & pinion or capstan with which the system are burdened. However linear motors have a problem called force ripple. Force ripple deteriorates the tracking performances and makes periodic position errors. So, force ripple must be compensated. To maximize the tracking performance of linear motor system, we propose the control scheme which is composed of a robust control method, Time Delay Controller (TDC) and a feedforward control method, Zero Phase Error Tracking Control (ZPETC) for accurate tracking a given trajectory and an adaptive force ripple compensation (AFC) algorithm fur estimating and compensating force ripple. The adaptive ripple compensation is continuously refined on the basis of tracking error. Computer simulation results based on modeled parameters verify the effectiveness of the proposed control scheme for high-speed, long stroke and high precision scanning motion and show that the proposed control scheme can achieve a sup error tracking performance in comparison to conventional TDC control.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.10
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.11a
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• pp.523-530
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• 2006

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element hearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as veil as the rotor itself. Each resultant hearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.7 s.238
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• pp.1005-1012
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• 2005

An OHT(Over Head Transportation) vehicle is an example of the industrial monorail vehicle, and it is used in the automobile, semiconductor, LCD manufacturing industries. OHT vehicle is moved by main wheels and guide rollers. The major function of the main wheel is to support and drive the OHT vehicle. The roles of the guide roller is the inhibition of derailment and steering of the OHT vehicle. Since the required vehicle velocity becomes faster and the required load capacity is increased, the durability characteristics of the wheel and roller, which was made of urethane, need to be increased. So it is necessary to estimate the fatigue life cycle of the wheel and roller. In this study, OHT dynamic model was developed by using the multi body dynamic analysis program ADAMS. Wheel and roller are modeled by the 3-D surface contact module. Especially, motor cycle tire mechanics is used in the wheel contact model. The OHT dynamic model can analyze the dynamic characteristic of the OHT vehicle with various driving conditions. And the result was verified by a vehicle traveling test. As a result of this study, the developed model is expected to predict wheel dynamic load time history and makes a contribution to design of a new monorail vehicle.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.95-95
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• 2014

An OLED(Organic Light-Emitting Diode) device based on the emissive electroluminescent layer a film of organic materials. OLED is used for many electronic devices such as TV, mobile phones, handheld games consoles. ULVAC's mass production systems are indispensable to the manufacturing of OLED device. ULVAC is a manufacturer and worldwide supplier of equipment and vacuum systems for the OLED, LCD, Semiconductor, Electronics, Optical device and related high technology industries. The SMD Series are single-substrate sputtering systems for deposition of films such as metal films and TCO (Transparent Conductive Oxide) films. ULVAC has delivered a large number of these systems not only Organic Evaporating systems but also LTPS CVD systems. The most important technology of thin-film encapsulation (TFE) is preventing moisture($H_2O$) and oxygen permeation into flexible OLED devices. As a polymer substrate does not offer the same barrier performance as glass substrate, the TFE should be developed on both the bottom and top side of the device layers for sufficient lifetimes. This report provides a review of promising thin-film barrier technologies as well as the WVTR(Water Vapor Transmission Rate) properties. Multilayer thin-film deposition technology of organic and inorganic layer is very effective method for increasing barrier performance of OLED device. Gases and water in the organic evaporating system is having a strong influence as impurities to OLED device. CRYO pump is one of the very useful vacuum components to reduce above impurities. There for CRYO pump is faster than conventional TMP exhaust velocity of gases and water. So, we suggest new method to make a good vacuum condition which is CRYO Trap addition on OLED evaporator. Alignment accuracy is one of the key technologies to perform high resolution OLED device. In order to reduce vibration characteristic of CRYO pump, ULVAC has developed low vibration CRYO pumps to achieve high resolution alignment performance between Metal mask and substrate. This report also includes ULVAC's approach for these issues.

• The KSFM Journal of Fluid Machinery
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• v.10 no.3 s.42
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Journal of Technology Innovation
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• v.20 no.2
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• pp.1-28
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• 2012

The government-supported research institutes' system seems to face a turning point as the country's innovation system, shaped in the industrialization process, now reveals its own limitations. This makes the transformation of the innovation system unavoidable. Korea began to emerge as a leader in several technological areas including semiconductor, TFT-LCD, and handset, in a few cases even outpacing advanced countries. This has changed the very nature of the problems and questions to be resolved. This study analysed the structural limitations and challenges of government-supported research institutes focused ETRI. In a nutshell, The innovation system of government-supported research institutes seems to face a situation where the new innovation environment is conflicting and competing with the legacy of the past: governance, planning, budget, personnel, evaluation system. There are needs for change and thus tries to achieve a innovation system transition and build a new vision and management system including a new mode of working for post-catchup innovation.