• Title/Summary/Keyword: sapphire substrates.

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Effect of Temperature Gradient on the Characteristics of GaN Nanorods Grown on R-plane Sapphire Substrates (기판 주변 반응 기체와 기판 사이의 온도 차이에 따른 r-면 사파이어 기판에 성장된 길화갈륨 나노 막대의 특성 변화 연구)

  • Shin, Bo-A;Kim, Chin-Kyo
    • Journal of the Korean Vacuum Society
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    • v.18 no.1
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    • pp.44-48
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    • 2009
  • The effect of temperature gradient between the substrate and ambient gas on the structural characteristics of GaN nanorods grown on r-plane sapphire substrates by hydride vapor phase epitaxy was investigated. The density, diameter, and length strongly depended on the tempearture gradient. In addition, the cross-sectional shape of the nanorrods at the end of growth was found to be more dependedent on the temperature of a substrate itself than the temperature gradient.

Study on Graphene Thin Films Grown on Single Crystal Sapphire Substrates Without a Catalytic Metal Using Pulsed Laser Deposition

  • Na, Byoung Jin;Kim, Tae Hwa;Lee, Cheon;Lee, Seok-Hyun
    • Transactions on Electrical and Electronic Materials
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    • v.16 no.2
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    • pp.70-73
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    • 2015
  • Many studies have used chemical vapor deposition (CVD) to grow graphene. However, CVD is inefficient in terms of production costs, and inefficient for mass production because a transfer process using a catalytic metal is needed. In this study, graphene thin films were grown on single crystal sapphire substrates without a catalytic metal, using pulsed laser deposition (PLD) to resolve these problems. In addition, the growth of graphene using PLD was confirmed to have a close relationship with the substrate temperature.

Optical and Electrochemical Properties of LiNiPO4 Thin Film for Transparent Thin Film Lithium Secondary Battery (투명 박막 리튬이차전지를 위한 LiNiPO4 박막의 광학 및 전기화학적 특성)

  • Lee, HyunSeok;Parmar, Narendra S.;Kim, Kwang-Bum;Choi, Ji-Won
    • Journal of Sensor Science and Technology
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    • v.27 no.1
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    • pp.36-39
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    • 2018
  • Transparent olivine $LiNiPO_4$ thin films on sapphire substrates were fabricated by radio frequency (RF) magnetron sputtering. The X-ray diffraction patterns show these thin films have the phase of $LiNiPO_4$ with an ordered olivine structure indexed to the orthorhombic Pmna space group. $LiNiPO_4$ thin films deposited on sapphire substrates exhibit transmittance of about 83 %. It was confirmed that the $LiNiPO_4$ thin film exhibits a high potential of 5 V-class.

Properties of thick-film GaN on sapphire substrates by HVPE method (HVPE 법으로 사파이어 기판 위에 성장한 후막 GaN의 특성)

  • 이영주;김선태
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.11a
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    • pp.37-39
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    • 1996
  • A hydride vapor phase epitaxy (HVPE) method was performed to prepare the GaN thick-films on c-plane sapphire substrates. The full-width at half maximum of double crystal X-ray rocking curve from 350${\mu}{\textrm}{m}$ thick GaN was 576 arcsecond. The photo- luminescence spectrum measured (at room temperature) show the narrow bound exciton(I$_2$) line and weak donor-acceptor pair recombination peak, however, there was not observed deep donor-acceptor pare recombination indicate the GaN crystals prepared in this study are of high purity and high crystalline quality.

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Simulation and analysis of DC characteristics in AlGaN/GaN HEMTs on sapphire, SiC and Si substrates (Sapphire SiC, Si 기판에 따른 AlGaN/GaN HEMT의 DC 전기적 특성의 시뮬레이션과 분석)

  • Kim, Su-Jin;Kim, Dong-Ho;Kim, Jae-Moo;Choi, Hong-Goo;Hahn, Cheol-Koo;Kim, Tae-Geun
    • Journal of IKEEE
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    • v.11 no.4
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    • pp.272-278
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    • 2007
  • In this paper, we report on the 2D (two-dimensional) simulation result of the DC (direct current) electrical and thermal characteristics of AlGaN/GaN HEMTs (high electron mobility transistors) grown on Si substrate, in comparison with those grown on sapphire and SiC (silicon carbide) substrate, respectively. In general, the electrical properties of HEMT are affected by electron mobility and thermal conductivity, which depend on substrate material. For this reason, the substrates of GaN-based HEMT have been widely studied today. The simulation results are compared and studied by applying general Drift-Diffusion and thermal model altering temperature as 300, 400 and 500 K, respectively. With setting T=300 K and $V_{GS}$=1 V, the $I_{D,max}$ (drain saturation current) were 189 mA/mm for sapphire, 293 mA/mm for SiC, and 258 mA/mm for Si, respectively. In addition, $G_{m,max}$ (maximum transfer conductance) of sapphire, SiC, Si was 38, 50, 31 mS/mm, respectively, at T=500 K.

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Theoretical Calculation of SAW Propagation of GaN/Sapphire Structure according to SAW Propagation Direction (사파이어 기판방향에 따른 GaN 박막의 표면탄성파 특성에 대한 이론적 계산)

  • 임근환;김영진;최국현;김범석;김형준;김수길;신영화
    • Journal of the Korean Ceramic Society
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    • v.40 no.6
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    • pp.539-546
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    • 2003
  • The GaN/sapphire layered structure is a potential candidate for high frequency devices due to high acoustic velocity of sapphire. Generally, the GaN thin films are epitaxially grown on c, a, and r-plane sapphire substrates. In this study, wave equations of GaN/sapphire structure were calculated according to crystallographic relationship between GaN layer and sapphire substrate. On each plane, the shear velocity was changed by the kH of GaN layer and propagation direction on sapphire substrate. We found electromechanical coupling constant of r-plane was better than the others. As a result, elastic stiffness and electromechanical coupling constant of materials are affected by a cut and an orientation of substrate. GaN/r-plane sapphire structure is more advantageous for high frequency SAW devices.

Substrate effects on the characteristics of $YBa_2Cu_3O_{7-x}$ thin films prepared by RF magnetron sputtering (RF마그네트론 스퍼터링법으로 제조한 $YBa_2Cu_3O_{7-x}$전도체 박막의 특성에 대한 기판의 영향)

  • 신현용;박창엽
    • Electrical & Electronic Materials
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    • v.8 no.1
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    • pp.6-12
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    • 1995
  • High Tc superconducting YBa$_{2}$Cu$_{3}$$O_{7-x}$ thin films were prepared on various substrates by off-axis rf magnetron sputtering method to examine the substrate effects on the film structure and its R-T characteristics. The SEM analysis showed that the surface morphology of the grown YBa$_{2}$Cu$_{3}$O.sub 7-x/, film has different characteristic structure with different substrate used. The film on (100) SrTiO$_{3}$ substrate has critical current density of 3*10$^{5}$ A/cm$^{2}$ at 77K under zero magnetic field. The X-ray diffraction measurements revealed that the films on (100) SrTiO$_{3}$ substrate have mixed a-axis and c-axis normal to the substrate surface and the films on (100) MgO and ZrO$_{2}$/sapphire substrates have c-axis normal orientation to the substrate surface. However, YBa$_{2}$Cu$_{3}$$O_{7-x}$ films on (100) sapphire substrates showed no preferential orientation.ion.

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