Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1998.02a
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- Pages.101-102
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- 1998
In-situ x-ray scattering studies of AIN thin films on sapphire substrates by RF magnetron sputtering
- Soe, S.H. (Deppartmeno of Materials Science and Engineering) ;
- M.S.Yi (Center for Electronic materials Rescarch) ;
- H. C. Kang (Kwangju Institute of Science) ;
- D. Y. Noh (Techology Kwangju, korea)
- Published : 1998.02.01
Abstract
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