• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 하계학술대회 논문집
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• pp.920-923
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• 2000

All solid-state thin film supercapacitor(TFSC) based on $RuO_2$ electrode was fabricated. Ruthenium oxide$(RuO_2)$ thin film was deposited on Pt/Ti/Si subsrate by d.c. magnetron sputtering. LiPON(lithium phosphorus oxynitride) thin film were deposited by r.f. reactive sputtering. X-ray diffraction patterns of $RuO_2$ and LiPON films revealed that crystal structures of both films were amorphous. To decrease resistivity of $RuO_2$ thin film, $RuO_2$ thin film was deposited with $H_2O$ vapor. In order to decide the maximum ionic conductivity, the LiPON films were prepared by various sputtering condition. The maximum ionic conductivity was $9.5\times{10}^7S/cm$. A charge-discharge measurements showed the capacity of $3\times{10-2}\;F/cm^2-\mu{m}$ for the as-fabricated TFSC. The discharging efficiency was decreased after 500 cycles by 40 %.

• 전기학회논문지
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• 제63권1호
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• pp.76-79
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• 2014

We report Zinc oxide (ZnO) nanorods synthesis and electrochemical luminescence (ECL) cell fabrication. The ECL cell was fabricated using the electrode of ZnO nanorods and Ru(II) complex ($Ru(bpy)_3{^{2+}}$) as a luminescence materials. The fabricated ECL cell is composed of F-doped $SnO_2$ (FTO) glass/ Ru(II)/ZnO nanorods/FTO glass. The highest intensity of the emitting light was obtained at the wavelength of ~620 nm which corresponds to dark-orange color. At a bias voltage of 3V, the measured ECL efficiencies were 5 $cd/m^2$ for cell without ZnO nanorod, 145 $cd/m^2$ for ZnO nanorods-$5{\mu}m$, 208 $cd/m^2$ for ZnO nanorods-$8{\mu}m$ and 275 $cd/m^2$ for ZnO nanorods-$10{\mu}m$, respectively. At a bias voltage of 3.5V, the use of ZnO nanorods increases ECL intensities by about 3 times compared to the typical ECL cell without the use of ZnO nanorods.

• 대한금속재료학회지
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• 제50권8호
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• pp.557-562
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• 2012

Self-organized ruthenium (Ru) dots were fabricated by $400^{\circ}C$ RTA (rapid thermal annealing) and ALD (atomic layer deposition). The dots were produced under the $400^{\circ}C$ RTA conditions for 10, 30 and 60 seconds on all Si(100)/200 nm-SiO2, glass, and glass/fluorine-doped tin oxide (FTO) substrates. Electrical sheet resistance, and surface microstructure were examined using a 4-point probe and FE-SEM (field emission scanning electron microscopy). Ru dots were observed when a 30 nm-Ru layer on a Si(100)/200 nm-SiO2 substrate was annealed for 10, 30 and 60 seconds, whereas the dots were only observed on a glass substrate when a 50 nm-Ru layer was annealed on glass. For a glass/FTO substrate, RTA <30 seconds was needed for 30 nm Ru thick films. Those dots can increase the effective surface area for silicon and glass substrates by up to 5-44%, and by 300% for the FTO substrate with a < $20^{\circ}$ wetting angle.

• Elastomers and Composites
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• 제38권1호
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• pp.27-37
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• 2003

This work presents a comparative study of the morphology and structure related properties of thermoplastic elastomer blends based on SEBS/PP/Oil and dynamically vulcanized EPDM/PP/Oil. A combination of ruthenium oxide staining and low voltage scanning electron microscopy (LVSEM) was found to be suitable for the study of morphology of these highly oil extended blends. h close analogy was found in the mechanical, thermal and rheological properties of the two systems made in an internal Brabender mixer and co-rotating turin screw extruder. The morphology of the blends, as made by the two techniques, was found to be significantly different. In the case of TPVs, the blonds made in the extruder had smaller EPDM domains and better tensile properties. In the case of SEBS, the blends made in the Brabender had more co-continuous phases and showed better tensile properties. Crystallization behavior of the isotactic polypropylene in the blends was found to be influenced by the type of rubber. Blends of SEBS/PP crystallized at a lower temperature than the TPVs. These differences were probably caused by differences in the nucleating ability of the two rubbers.

• 대한금속재료학회지
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• 제49권5호
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• pp.395-399
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• 2011

In this study, micro gas sensors for ammonia gas were prepared by adopting MEMS technology and using a sol-gel process. Three types of sensors were prepared via different synthesis routes starting with W sol and Ru sol mixture. This mixture was deposited on a MEMS platform and the platform was subsegueny heated to a temperature of $350^{\circ}C$. The topography and crystal structure of the sensing film were studied using FE-SEM and XRD. The response of the gas sensor to $NH_3$ gas was examined at various operating temperatures and gas concentrations. The sensor response increased almost linearly with gas concentration and the best sensing response was obtained at $333^{\circ}C$ for 5.0 ppm $NH_3$ for the specimen prepared by coating $WO_3$ powders with the Ru sol mixture.

• Corrosion Science and Technology
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• 제14권4호
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• pp.177-183
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• 2015

Prestressed Concrete steel Cylinder Pipe (PCCP) is extensively used as seawater pipes for cooling in nuclear power plants. The internal surface of PCCP is exposed to seawater, while the external surface is in direct contact with underground soil. Therefore, materials and strategies that would reduce the corrosion of its cylindrical steel body and external steel wiring need to be employed. To prevent against the failure of PCCP, operators provided a cathodic protection to the pre-stressing wires. The efficiency of cathodic protection is governed by the anodic performance of the system. A mixed metal oxide (MMO) electrode was developed to meet criteria of low over potential and high corrosion resistance. Increasing coating cycles improved the performance of the anode, but cycling should be minimized due to high materials cost. In this work, the effects of $RuCl_3$ concentration on the electrochemical properties and lifespan of MMO anode were evaluated. With increasing concentration of $RuCl_3$, the oxygen evolution potential lowered and polarization resistance were also reduced but demonstrated an increase in passive current density and oxygen evolution current density. To improve the electrochemical properties of the MMO anode, $RuCl_3$ concentration was increased. As a result, the number of required coating cycles were reduced substantially and the MMO anode achieved an excellent lifespan of over 80 years. Thus, we concluded that the relationship between $RuCl_3$ concentration and coating cycles can be summarized as follows: No. of coating cycle = 0.48*[$RuCl_3$ concentration, $M]^{-0.97}$.

• 전기화학회지
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• 제6권3호
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• pp.169-173
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• 2003

금속산화물 전극을 이용한 전기화학 캐패시터는 일반적으로 산성 수용액 전해질에서 금속산화물에 대한 양성자의 가역적인 전기화학반응을 이용한다. 수계 전해질을. 사용한 수퍼캐패시터는 전위창(electrochemical stability window)이 유기계 전해질을 사용한 수퍼캐패시터에 비해 좁은 문제를 안고 있다. 금속산화물 전극과 리튬 또는 암모늄 이온을 함유한 유기계 전해질을 사용한 전기화학 캐패시터의 특성을 확인하였다. $RuO_2$ 전극을 사용한 전기화학 캐패시터는 1M $LiPF_6$, EC, DEC 및 EMC혼합용매 전해액 중에서 순환전위전류법(주사속도. 2mV/sec, 전위영역: $2.0\~4.2V(Li|Li^+))$으로 산화 및 환원에 대하여 비정전용량을 구한 바, 각각 145 및 $142F/g-RuO_2{\cdot}nH_2O$이었다

• 한국재료학회지
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• 제22권4호
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• pp.202-206
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• 2012

$CoSi_2$ was formed through annealing of atomic layer deposition Co thin films. Co ALD was carried out using bis(N,N'-diisopropylacetamidinato) cobalt ($Co(iPr-AMD)_2$) as a precursor and $NH_3$ as a reactant; this reaction produced a highly conformal Co film with low resistivity ($50\;{\mu}{\Omega}cm$). To prevent oxygen contamination, $ex-situ$ sputtered Ti and $in-situ$ ALD Ru were used as capping layers, and the silicide formation prepared by rapid thermal annealing (RTA) was used for comparison. Ru ALD was carried out with (Dimethylcyclopendienyl)(Ethylcyclopentadienyl) Ruthenium ((DMPD)(EtCp)Ru) and $O_2$ as a precursor and reactant, respectively; the resulting material has good conformality of as much as 90% in structure of high aspect ratio. X-ray diffraction showed that $CoSi_2$ was in a poly-crystalline state and formed at over $800^{\circ}C$ of annealing temperature for both cases. To investigate the as-deposited and annealed sample with each capping layer, high resolution scanning transmission electron microscopy (STEM) was employed with electron energy loss spectroscopy (EELS). After annealing, in the case of the Ti capping layer, $CoSi_2$ about 40 nm thick was formed while the $SiO_x$ interlayer, which is the native oxide, became thinner due to oxygen scavenging property of Ti. Although Si diffusion toward the outside occurred in the Ru capping layer case, and the Ru layer was not as good as the sputtered Ti layer, in terms of the lack of scavenging oxygen, the Ru layer prepared by the ALD process, with high conformality, acted as a capping layer, resulting in the prevention of oxidation and the formation of $CoSi_2$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.567-567
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• 2012

Since the carbon nanotubes (CNTs) have extraordinary material properties, many researchers are trying to make a practical application in various fields [1]. In particular, the high surface area of CNTs was fascinated for nano-template on the catalytic system. $RuO_2$ coated CNTs are useful functional nano-composites in many applications, including super capacitors, fuel cells, biosensors, and field emitters. However, the research of interaction between CNTs and $RuO_2$ was not satisfied with various fields [2]. In this study, we will introduce the change of chemical and electrical state of $RuO_2$/CNTs at different temperatures by synchrotron radiation photoemission spectroscopy (SRPES). The t-MWCNTs used in this experiment were grown on the Ni/TiN/Si substrates by chemical vapor deposition. $RuO_2$ of 4-20 nm in thickness was deposited on the t-MWNTs by sputter. The SRPES measurements were carried out at the 4B1 beamline of the Pohang Accelerator Laboratory in Korea. The result of XPS measurement indicates that the deposited $RuO_2$ on the CNTs was reduced into pure Ru at above $300^{\circ}C$. And we confirmed that the effective work function of $RuO_2$/CNTs was decreased with increasing temperature.

• 한국세라믹학회지
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• 제51권4호
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• pp.362-366
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• 2014

Dye-sensitized solar cells (DSSCs) were synthesized using a $0.25cm^2$ area of a $TiO_2$ nanoparticle layer as the electrode and platinum (Pt) as the counter electrode. The $TiO_2$ nanoparticle layers (12 to 22 ${\mu}m$) were screen-printed on fluorine-doped tin oxide glass. Glancing angle X-ray diffraction results indicated that the $TiO_2$ layer is composed of pure anatase with no traces of rutile $TiO_2$. The Pt counter electrode and the ruthenium dye anchored $TiO_2$ electrode were then assembled. The best photovoltaic performance of DSSC, which consists of a $18{\mu}m$ thick $TiO_2$ nanoparticle layer, was observed at a short circuit current density ($J_{sc}$) of $14.68mA{\cdot}cm^{-2}$, an open circuit voltage ($V_{oc}$) of 0.72V, a fill factor (FF) of 63.0%, and an energy conversion efficiency (${\eta}$) of 6.65%. It can be concluded that the electrode thickness is attributed to the energy conversion efficiency of DSSCs.