Silicide Formation of Atomic Layer Deposition Co Using Ti and Ru Capping Layer
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Yoon, Jae-Hong
(School of Electrical and Electronics Engineering, Yonsei University)
Lee, Han-Bo-Ram (School of Electrical and Electronics Engineering, Yonsei University) Gu, Gil-Ho (Department of Materials Science and Engineering, POSTECH) Park, Chan-Gyung (Department of Materials Science and Engineering, POSTECH) Kim, Hyung-Jun (School of Electrical and Electronics Engineering, Yonsei University) |
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