• Journal of information and communication convergence engineering
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• v.11 no.1
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• pp.56-61
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• 2013

Modern integrated circuits (ICs) are becoming an integrated parts of analog, digital, and radio frequency (RF) circuits. Testing these RF circuits on a chip is an important task, not only for fabrication quality control but also for tuning RF circuit elements to fit multi-standard wireless systems. In this paper, RF test circuits suitable for embedded testing are introduced: RF power detectors, power control circuits, directional couplers, and six-port reflectometers. Various types of embedded RF power detectors are reviewed. The conventional approach and our approach for the RF power control circuits are compared. Also, embedded tunable active directional couplers are presented. Then, six-port reflectometers for embedded RF testing are introduced including a 77-GHz six-port reflectometer circuit in a 130 nm process. This circuit demonstrates successful calibrated reflection coefficient simulation results for 37 well distributed samples in a Smith chart. The details including the theory, calibration, circuit design techniques, and simulations of the 77-GHz six-port reflectometer are presented in this paper.

• Journal of the Semiconductor & Display Technology
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• v.15 no.4
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• pp.36-40
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• 2016

The 2 wt.% Al-doped ZnO(AZO) thin films were fabricated on PET substrates with various RF power 20, 35, 50, 65, and 80W by using RF magnetron sputtering in order to investigate the structure, electrical and optical properties of AZO thin films in this study. The XRD measurements showed that AZO films exhibit c-axis orientation. At a RF power of 80W, the AZO films showed the highest (002) diffraction peak with a FWHM of 0.42. At a RF power of 65W, the lowest electrical resistivity was about $1.64{\times}[10]$ ^(-4) ${\Omega}-cm$ and the average transmittance of all films including substrates was over 80% in visible range. Good transparence and conducting properties were obtained due to RF power control. The obtained results indicate that it is acceptable for applications as transparent conductive electrodes.

• Journal of the Semiconductor & Display Technology
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• v.15 no.3
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• pp.57-61
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• 2016

We have studied the structural, optical and electrical properties of IGZO thin films. The IGZO thin films were deposited on the silicon wafer by RF magnetron sputtering method. The RF power in sputtering process was varied as 15W, 30W, 45W, 60W, 75W, respectively. All of the thin films transmittance in the visible range was above 85%. XRD analysis showed that amorphous structure of the thin films without any peak. The Hall measurements in the low RF power is the high mobility above $10cm^2/V{\cdot}s$ and the low resistvity are obtained in the IGZO thin films.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.4
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• pp.293-297
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• 2010

We have studied the optical and electrical properties of a-IGZO thin films on the n-type semiconductor fabricated by RF magnetron sputtering method. The ceramic target was used in which $In_2O_3$, $Ga_2O_3$ and ZnO powder were mixed with 1:1:2 mol% ratio and furnished. The RF power was set at 25 W, 50 W, 75 W and 100 W as a variable process condition. The transmittance of the films in the visible range was above 80%, and it was 92% in the case of 25 W power. AFM analysis showed that the roughness increased as increasing RF power, and XRD showed amorphous structure of the films without any peak. The films are electrically characterized by high mobility above 10 $cm^2/V{\cdot}s$ at low RF power, high carrier concentration and low resistivity. It is required to study further finding the optimal process condition such as lowering the RF power, prolonging the deposition ratio and qualification analysis.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.15 no.6
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• pp.231-238
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• 2015

In this paper, we have studied a sheet resistance property of N- and P-type thin films deposited on ITO glass by use of RF magnetron sputtering. The N-type samples which has the deposition condition of 150W RF power, shows the highest current value, and the samples deposited for 15 minutes shows a better Ohmic contact property. As the substrate temperature, RF power and deposition time are increased, the sheet resistance of the samples is increased, and the low sheet resistance sample shows a better I-V property. The P-type samples shows the highest current value by 150W RF power condition as similar as N-type samples. and the samples deposited for 20 minutes shows a better ohmic contact property. The sheet resistance of the both types samples is increased as increasing RF power and deposition time.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.10
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• pp.2194-2200
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• 2010

In this paper, the power detectors using metamaterials were designed and fabricated for multi-band six-port direct conversion method. The RF short-stubs for power detector were designed by using metamaterials which provide multi-band characteristics. The power detectors with metamaterial RF short-stub were analyzed and fabricated by using lumped and distributed element. The measured results of metamaterial power detectors show the good agreement with the simulation results. The performance of lumped-metamaterial RF short-stub shows the insertion loss below 1 dB and the good frequency response characteristics. Also, the distributed-metamaterial RF short-stub shows the good frequency response characteristics and the insertion loss under that of lumped-metamaterial RF short-stub. The multi-band power detectors with metamaterial RF short-stub detect the input RF signal in the designed dual frequency bands very well.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.11 no.6
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• pp.772-777
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• 2018

This paper used RF Magnetron Sputtering to deposition n-type and p-type to ITO glass. The N-type ohmic contact worked well under all conditions. Sheet resistance has been shown to increase sheet resistance as RF Power increases. After analyzing the surface of the deposited thin film, in the condition that RF Power was 250W and substrate temperature was $250^{\circ}C$, particles were measured to have a uniform and consistent thin film. P-type has good ohmic contact under all conditions and sheet resistance has been shown to increase as RF Power increases. As the RF Power grew, thickness increased and stabilized. PN junction thin film and NP junction thin film showed increased thickness and stabilized as sputtering time increased. As a result of thin film, conversion efficiency was at 0.2 when sputtering time was 10 minutes.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.1
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• pp.13-17
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• 2005

The Pb(Zr/sub 0.52/Ti/sub 0.48/)O₃/(Ba/sub 0.6/Sr/sub 0.4/)TiO₃[PZT/BST] heterolayered thin films were deposited on Pt/Ti/SiO₂/Si substrates by using the RF sputtering method with different RF power. The PZT/BST heterolayered thin films had the tetragonal structure of the PZT phase and BST phase. Increasing the RF power. the intensity of the PZT (100), (110) peaks and BST (111) peaks were decreased and the intensity of the BST (100), (110) peaks were increased. The thickness ratio of the top layered BST thin film and the bottom layered PZT thin film was 2 to1. The atomic concentration of the Ba, Sr, Pb. Zr, Ti atoms were constant in the PZT thin films and BST thin films, respectively. The Pt atom was diffused to the PZT region in the PZT/BST heterolayered thin films deposited at condition of 60[W] RF power. Increasing the frequency, dielectric constant and loss of the PZT/BST heterolayered thin films were decreased. The dielectric constant and loss of the PZT/BST heterolayered thin films deposited with RF power of 90[W] were 406 and 3%, respectively.

• Proceedings of the KIEE Conference
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• 2003.11b
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• pp.35-42
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• 2003

We have studied DC energy conversion of RF card by wireless communication. In order to attain an objective, it used the system which is a Rectenna. The main purpose of energy conversion system is the operation of the circuits at RF-ID system. The proposed RF-ID system is a lot classified with the reader and tag. Reader is a kind of the base station role supporting RF energy. And priority tag convert RF energy from the reader it was delivered with a wireless to DC energy. The energy which is converted like Tag. It transmits to the reader characteristic ID of each card. The tag is mainly divided into rectifier, power module, memory and controller. The FRAM maintains the data like a ROM in no-power situation. And the advantage is a low power element compared with other EEPROM. There are two considerations, when RF energy is converted into DC source by wireless. One is energy amount supported from the reader, the other is high power efficiency. This paper presents a study of simulation and experiments on the RF-DC conversion circuit in tag by the power efficiency concentrated.

• Journal of electromagnetic engineering and science
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• v.17 no.4
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• pp.191-196
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• 2017

Microwave wireless power transmission (MWPT) is a promising technique for low and medium power applications such as wireless charging for sensor network or for biomedical chips in case with long ranges or in dispersive media such. A key factor of the MWPT technique is its efficiency, which includes the wireless power transmission efficiency and the radio frequency (RF) to direct current (DC) voltage efficiency of RF-DC converter (which transforms RF energy to DC supply voltage). The main problem in designing an RF-DC converter is the nonlinear characteristic of Schottky diodes; this characteristic causes low efficiency, higher harmonics frequency and a change in the input impedance value when the RF input power changes. In this paper, rather than using harmonic termination techniques of class E or class F power amplifiers, which are usually used to improve the efficiency of RF-DC converters, we propose a new method called "optimal input impedance" to enhance the performance of our design. The results of simulations and measurements are presented in this paper along with a discussion of our design concerning its practical applications.