• The Transactions of The Korean Institute of Electrical Engineers
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• v.57 no.12
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• pp.2199-2201
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• 2008

Sulfur hexafluoride($SF_6$) is a gaseous dielectric used in high voltage electrical equipment such as an insultor or arc quenching medium in the transmission and distribution of electricity. however, $SF_6$ is one of the greenhouse gases(GHG) with a global warming potential that is 23,900 times greater than that of carbon dioxide($CO_2$). for this reason, $SF_6$ emissions in electric equipment shall be controlled to reduce GHG and improve cost-effective use of $SF_6$ for economical benefits. Until recently there has not been any investigation on $SF_6$ emission characteristics and inventory in Korea. To understand emission characteristics during the use-phase, the scope of this study was limited to the following closed pressure system equipment from 10 substations in Korea. This study highlights (1) the investigation of sampling/analysis methodology for $SF_6$ emissions in high voltage equipment, (2) the estimation of $SF_6$ emissions in the use-phase, and (3) the comparison between the emission ratio and the mass-balance applied to inventory study. According to this study, the majority of emissions were related to electric equipment nameplates and the rest of the emissions were related to the handling of $SF_6$ during operations. from this result, emission ratios estimated from this study were similar; GIS was 14% and GCB was 13%, as maintenance process conditions were the same as manual process conditions for both equipment.

• Plant Journal
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• v.13 no.4
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• pp.41-47
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• 2017

This paper is a study on validation model that can verify the arrangement of equipment constituting offshore plant using system engineering approach in offshore plant tender stage. In order to design offshore plant topside maintenance equipment, topside layout verification should be preceded. However, there are many errors in the bidding stage due to the FEED results that are not perfect, the verification can not be performed sufficiently due to the limitation of the bidding period and others reasons. Therefore, we propose a validation model that can effectively verify the equipment layout within a limited condition by simplifying the main process in the system engineering process, which is a multidisciplinary approach, and confirmed through the Functional Deployment Model. Also, we verified the validation model for topside equipment deployment through case studies.

• Transactions on Electrical and Electronic Materials
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• v.12 no.2
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• pp.56-59
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• 2011

The characterization of the chemical mechanical polishing (CMP) process for undensified phophosilicate glass (PSG) film is reported using design of experiments (DOE). DOE has been used by experimenters to understand the relationship between the input variables and responses of interest in a simple and efficient way, and it typically is beneficial for determining the appropriatesize of experiments with multiple process variables and making statistical inferences for the responses of interest. The equipment controllable parameters used to operate the machine consist of the down force of the wafer carrier, pressure on the back side wafer, table and spindle speeds (SS), slurry flow (SF) rate, pad condition, etc. None of these are independent ofeach other and, thus, the interaction between the parameters also needs to be understoodfor improved process characterization in CMP. In this study, we selected the five controllable equipment parameters the most recommendedby process engineers, viz. the down force (DF), back pressure (BP), table speed (TS), SS, and SF, for the characterization of the CMP process with respect to the material removal rate and film uniformity in percentage terms. The polished material is undensified PSG which is widely used for the plananization of multi-layered metal interconnects. By statistical modeling and the analysis of the metrology data acquired from a series of $2^{5-1}$ fractional factorial designs with two center points, we showed that the DF, BP and TS have the greatest effect on both the removal rate and film uniformity, as expected. It is revealed that the film uniformity of the polished PSG film contains two and three-way interactions. Therefore, one can easily infer that process control based on a better understanding of the process is the key to success in current semiconductor manufacturing, in which the size of the wafer is approaching 300 mm and is scheduled to continuously increase up to 450 mm in or slightly after 2012.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.6
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• pp.49-56
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• 2015

For designing working devices of construction equipment, it is necessary to consider not only sufficient working ability but also available working range. Therefore, it is important to select the appropriate pivot positions of links. This paper presents a study on selection of pivot points of links used in construction equipment. To analyze the effect of each pivot point, a design program for pivot selection is developed. A conventional pivot design method requires a complicated process because it needs to create a certain working position manually to evaluate its performance. However, the developed program includes an automatic link assembly algorithm; thus, the working device can easily be analyzed by using pivot information of links. The developed program also included a kinematic/static analysis module and characteristic analysis algorithms. Therefore, it is possible to easily analyze a working device model created through the automatic assembly algorithm, whereby users can easily analyze the effect of each link pivot point for the actual product design.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.161-166
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• 2021

Errors in the semiconductor process are generated by a change in the state of the equipment, and errors usually arise when the state of the equipment changes or when parts that make up the equipment have flaws. In this investigation, we anticipated that aging of the mass flow controller in the plasma enhanced chemical vapor deposition SiO2 thin film deposition method caused a minute flow rate shift. In seven cases, fourier transformation infrared film quality analysis of the deposited thin film was used to characterize normal and pathological processes. The plasma condition was monitored using optical emission spectrometry data as the flow rate changed during the procedure. Preprocessing was used to apply the collected OES data to the artificial immune system algorithm, which was then used to process diagnosis. Through comparisons between datasets, the learning algorithm compared classification accuracy and improved the method. It has been confirmed that data characterized as a normal process and abnormal processes with differing flow rates may be discriminated by themselves using the artificial immune system data mining method.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.19 no.39
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• pp.229-234
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• 1996

When we analyze equipment replacement problem, we take the table of the duration period of tangible fixed asset on the corporation income tax law, and treat depreciation as simple allocation process for capital recovery. In this problem, there are some papers considering the concepts of economic depreciation. Those are not perfect model from a economical point of view. Therefore, we deal with equipment replacement problem considering the engineering valuation as well as the economic concept in the evaluation of asset.

• Proceedings of the KSR Conference
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• 2011.05a
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• pp.1364-1371
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• 2011

Advanced EMU completed a production of test train, composed of 6 cars, after 5 years of development process, and it is currently under the process of integrated test and evaluation to inspect performance of car system, efficiency of transport, safety, punctuality, energy efficiency in accordance with urban railways act at Daebul test line. Advanced EMU was produced under consideration of transportation capacity, maintainability, reliability, energy saving, convenience of passengers, and traffic-vulnerables, so it has an epochal difference from former EMU system. And advanced EMU assures operation management from manager's perspective and efficiency of maintenance for practicalization of car and individual equipment. This paper introduces each major equipment of advanced EMU which is based on many years of experience of management and maintenance.

• Proceedings of the KIEE Conference
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• 2003.04a
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• pp.266-269
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• 2003

A sterilizer equipment by using electrical energy has merits that no process of chemical and no second environmental pollution. Also, the power conversion circuit for sterilizer equipment has merits that are reducing switching loss for soft switching topology by using zero current and zero voltage switching, and miniaturizing size of equipment. Thus, it is expected that the cost of sterilization process, when quality of the device is measured by power consumption, will be reduced. Therefore, the purpose of this research is to solve the sterilization problems of existing powder with plasma sterilization device, to find more economical and effective way, and to suggest more improved sterilizer.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.25 no.1
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• pp.49-55
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• 2002

For making a lead terminal(condenser, resistor etc.), it is the matter that lead wire have to be supplied smooth without twisting and curving when it is supplied to the further processing (cutting, forming, attach process) after it being forwarded. The purpose of this study is to solve the winding claims of lead wire through the structural expansion of winding equipment to which the improvement of packing equipment to forward safely and supply the lead wire and QFD method are applied. The results of this study is available to solve the technical problem caused by the installation of the existing flyer system for the prevention of twisting and can expect the quality assurance as it prevents the claim(surface fault) caused by the bumping among lead wire which are involved in the packing equipment in its moving stage.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.5
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• pp.31-37
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• 2011

For the domestic glasses industry to procure competitiveness in the world CA(Cellulose Acetate) frame of spectacles market, CNC machining system for CA frame including high-value added CA cutting technologies should be developed with new materials for the rim based on Cellulose and sheet manufacturing base. The spindle system of glasses frame equipment that is the core to the quality of CA frame is the key technologies to realize high-speed, high-precision so its importance is remarkably emerging. In the study, at the structural design of the high spindle system of the private equipment for CA glasses frame embedded a motor of 40,000rpm, the stability of design was analyzed and investigated through selecting lubrication structure and thermal characteristics of the spindle system.